ESDBestPracticalSharingTITLQRA12IndexESDHistoryDefinitionofESDMaterialReduceESDDamagedMethodologyESDChecklist3~1314~1718~4647~52Page2ReminderthatESDisaseriousproblemintheentireelectronicsindustry.

提醒所有員工“靜電”對IC材料的破壞是一個(gè)非常嚴(yán)重的問題,它是整個(gè)半導(dǎo)體所面臨的一項(xiàng)挑戰(zhàn).WhyDoWeNeedESDTraining?為何需要此ESD訓(xùn)練課程?Itisbelievedthat25%ofallcomponentfailures

arearesultofESD.

相信有大約25%的IC材料是因靜電(ESD)的影響而遭破壞33ElectricalOverStress(EOS)-Theexposureofanitemtoa

currentorvoltagebeyonditsmaximumratings.

EOS-指一個(gè)IC材料受到超過其所能負(fù)荷的電壓,電流而遭受到破壞

的狀態(tài)Definitions

定義ElectrostaticDischarge(ESD)-Thetransferofelectrostatic

chargebetweenbodiesorsurfacesatdifferentelectrostatic

potential.ESDisasubsetofEOS.

ESD-即靜電放電之意.指不同電位的二個(gè)物體之間產(chǎn)生的電荷急驟流

動的現(xiàn)象.44ConductorsvsInsulators帶靜電的絶緣體

ChargedInsulator帶靜電的導(dǎo)體

ChargedConductorConductorevenlydistributeschargeoverentiresurface

平均分佈於整個(gè)表面Oppositepolaritychargescanexistonthesameinsulator.

不同極性的電荷會同時(shí)存在絶緣體上Conductorcompletely

dischargeswhengrounded.Insulatoarsdonotallowchargetoflow.

Groundinganinsulatorneitherremoves

chargeorpreventssurfacecharges.5IC++++++++++++IC--++++++----ICIC------5

Staticelectricityhasbeenacuriosityformany

hundredsofyears.HistoryToday,specialprecautionsaretakenbyindustrieswhere

staticsparkscouldcauseanexplosion,e.g..,flour

mills,hospitaloperatingrooms,etc..

在今天,靜電所產(chǎn)生的破壞已引起工業(yè)界的注意.例如:麵粉廠的

塵爆,院的手術(shù)過程,IC製造工業(yè)等..AftertheinventionofgunpowderbytheChinese,it

wasnolongeracuriosityforanyonemanufacturing

thatproduct.

靜電現(xiàn)象一直存在於人類歷史中,以前則被認(rèn)為是一種奇特的異象66Strangefailuresoccurred,andthecauseofthe

problemwasnoteasilyseenwiththeoptical

microscopes-failureanalysisread:cause

unknown.

靜電造成一些奇特而不易察覺的破壞,F/A分析的結(jié)論往往是:原因

不明.

EOS/ESDisperhapsthemostsignificant

failuremechanismintheelectronicsindustry

today.

EOS/ESD對半導(dǎo)體之元件的破壞,可能是當(dāng)今半導(dǎo)體界最頭痛,也

是最嚴(yán)重的一個(gè)問題.History77FundamentalsofStatic-Tribocharging

磨擦產(chǎn)生靜電Thissituationoccurswhenoneorbothofthematerialsareinsulators.

但這種情況為發(fā)生在其中一種物質(zhì)為絕緣體Whenevertwodissimilarmaterialsmakecontactandthenareseparated,astaticchargeiscreated.

二種不同性質(zhì)的物質(zhì)碰在一起再分離也會產(chǎn)生靜電.88TriboelectricSeriesFactorstoconsider:Humidity:濕度Speedofseparation:分離速度Typeofmaterial:材料性質(zhì)Contactarea:接觸面積IncreasingPositiveAir:空氣HumanHand:手RabbitFur:兔毛Glass:玻璃Mica:humanhair:頭髮Nylon:尼龍Wool:毛Silk:絲Aluminum:錫Paper:紙Cotton:棉Steel:銅鐵Wood:木頭Amber:HardRubber:橡膠Nickel,Copper,Brass,SilverPolyester:聚醋棉PolyethylenePolypropylene:軟片PVC(Vinyl)IncreasingNegative99靜電放電的模型Human-BodyModel,HBM)人體放電模型MachineModel,MM)機(jī)器放電模型Charged–DeviceModel,CDM)元件充電模型模擬由個(gè)人之手指尖端放電至元件的現(xiàn)像GroundedSurface10HBM波形C=100PFR=1.5K

Standard資料來源:工研院電子所11自動組裝之製造環(huán)境ESD模型電感I(A)Time(ns)MM12CDMEvent的來源CDM測試機(jī)臺自動插件IC的包裝(Tube)13Definition定義(1)1.Conductivematerial-ESDprotectivematerialhavingasurfaceresistivitylessthan1xE5ohms/squareoravolumeresistivitylessthan1x10E4ohm-cm.導(dǎo)體-ESD保護(hù)物質(zhì)其表面電阻系數(shù)小於1x10E5歐姆/單位面積或容積電阻係數(shù)小於1x10E4歐姆-公分者.14Staticdissipativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E5ohms/squareor1x10E4ohm-cmvolumeresistivity,butlessthan1x10E12ohm/squaresurfaceresistivityor1x10E11ohm-cmvolumeresistivity.靜電傳導(dǎo)物質(zhì)-表面電阻系數(shù)介於1x10E5與1x10E12歐姆/單位面積,或容積電阻係數(shù)介於1x10E4與1x10E11歐姆-公分者.Definition定義(2)153.Insulativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E12ohms/squareor1x10E11ohm-cmvolumeresistivity.絕緣物質(zhì)-物質(zhì)它的表面電阻係數(shù)大於1x10E12歐姆/單位面積或容積電阻係數(shù)大於1x10E11歐姆-公分者.Definition定義(3)16InsutaticMaterial-Materialthatminimizesthegenerationofstaticchargelessthan+/-200(TCP100V)voltswhenrubbedagainstitself,orwhenseparatedfromitselforothersimilarmaterials.抗靜電物質(zhì)-物質(zhì)若經(jīng)自己相互磨擦或相互分開或與其它類似物質(zhì)分開時(shí)不產(chǎn)生大於+/-200(TCP100V)伏特的靜電壓者.Definition定義(4)17SafetyArea

安全區(qū)域Theoperationwhereallleadsareatcommonvoltagepotential.(Wiresarebondedandtiebarisnotseparatedsuchassealing,molding,PMIandsoon.)材料所有的腳都在等電位.(已接線,且腳尚未分離.如過爐,壓模,壓模前檢查等區(qū)域).18Equipment

設(shè)備a)ElectrostaticVoltmeters/fieldmeters:靜電表b)DigitalOHMMeter:數(shù)位歐姆表c)AirIonizer:離子風(fēng)扇d)WriststraporFootStrap(Optional):靜電手環(huán)或腳環(huán)e)ConductiveBag&AntistaticMagazine:導(dǎo)電袋及抗靜電管f)CautionLabel:提醒標(biāo)籤g)Anti-StaticVoidFiller:抗靜電泡墊h)DissipativeTable/FloorMAT(Optional):靜電地氈或桌墊i)Esdprotectedworkstation:無靜電工作桌j)CautionSign:提醒看板k)ESDProtectiveShoesTester:靜電鞋測試器19DigitalOHMMeter

數(shù)位歐姆表Shallbecapableofmeasuringadcresistanceof0.1ohmthrough1megohm+/-10%withanopencircuitvoltagegreaterthan1.5V.三用電錶或直流電阻表應(yīng)可量測0.1歐姆到1M歐姆+/-10%範(fàn)圍的電阻,且開路電壓應(yīng)大於1.5V以上.20AirIonizer

離子風(fēng)扇(1)Thedevicesatworkstationmustbewithin4feetmaximumaremeasuredbyverticallinefromthefaceoftheionizersandaround45degreesoneachsideofthisline.switchedonandproperlydirectedacrosstheworksurface.工作時(shí)必須置於距離離子風(fēng)扇4英尺圓弧內(nèi),兩邊各近似45度角範(fàn)圍內(nèi).且方向正對著工作區(qū)域任何靜電敏感的材料放於工作臺之前,必須把離子風(fēng)扇先打開,而且中途不可關(guān)掉.211.IonizerBalance<+/-35V餘額電壓離子風(fēng)扇的餘額=30cm,<5min.小於+/-35V2.Ionizerchargedecaytime.來量測離子風(fēng)扇的放電衰退程度.<20sec,=30cm,1000Vreduceto100V3.Bluetapewillputunderionizerstreamaround5sec.thenputwaferonit.膠布撕下後，在離子風(fēng)扇下大約吹5秒鐘,方可將晶片置於其上AirIonizer

離子風(fēng)扇(2)22WriststraporFootStrap(Optional)

靜電手環(huán)或腳環(huán)(1)Wriststrapconnectedtodissipativeorconductivetabletopthroughanintegral1Mohm+/-10%resistorshouldbewornbyoperators.Thiswayresultinthewriststrapbeing2Mohm+/-10%groundandisacceptable.靜電環(huán)必須有1M歐姆+/-10%的電阻連接到導(dǎo)電或靜電傳導(dǎo)的工作桌面.若因此使得靜電環(huán)與接地間形成2M歐姆+/-10%之電阻是可接受的。23Theworkingresistorofwriststripmustbecheckedshiftilyasfollowingpath,fromtheuser'shand,throughtheuser'sbody,thebody-to-strapcontact,theintegralresistor,thestrapwire,tothestrapgroundconnector.Anditshouldbeduring500k-10MEGAOHMS,recordisrequired.靜電環(huán)的工作電阻必須以如下的迴路每班檢驗(yàn)並做記錄,而其阻抗值需介於:或500k到10MEGA歐姆.迴路帶者的手帶者的身體身體與手環(huán)接觸點(diǎn)1M+/-10%歐姆的靜電環(huán)內(nèi)含電阻手環(huán)連接線接地點(diǎn) 歐姆計(jì)WriststraporFootStrap(Optional)

靜電手環(huán)或腳環(huán)(1)24ConductiveBag&AntistaticMagazine

導(dǎo)電袋及抗靜電管(1)

1.AllESDSdevicesshallbepackedinESDprotectivepackagingwhennotatanESDprotectedareaorwork-station.當(dāng)不在靜電防護(hù)區(qū)域或工作站時(shí)所有的靜電敏感材料必須裝在靜電防護(hù)包裝之內(nèi).2.Conductivemagazine,bagorcontainerwhichFaradaycagecontainersimulatedwillbeusedforalldevicetransportationandstorage.材料在貯存或運(yùn)送中必須以導(dǎo)電管子,袋子或?qū)щ娙萜鞯确ɡ谌萜靼b.25

3.Tubewillbeanti-staticorconductive.管子要用抗靜電或?qū)щ姷牟馁|(zhì)．There-cycleperiodforanti-statictubeusedonlineshouldnotexceedoneyear.線上用做循環(huán)使用之管子，使用期限不得超過一年。ConductiveBag&AntistaticMagazine

導(dǎo)電袋及抗靜電管(2)26CautionLabel

提醒標(biāo)籤AyellowESDcautionlabelshallbeattachednoconductivebagandonesideofpackingbox.黃色的ESD警告標(biāo)誌必須貼在導(dǎo)電袋及包裝箱上.2.EachESDprotectivepackageshallhaveacontrastingESDcautionlabel.Thecautionlabelshallbelegibletonormalvisionatadistanceofthreefeet.每件靜電防護(hù)包裝物必須有明顯的靜電警告標(biāo)籤.這靜電警告標(biāo)籤必須能在三英尺外以正常目視可辨識出.27Anti-StaticVoidFiller

抗靜電泡墊PackingandfillermaterialsforESDsdevicesshallnotturboelectricchargetogreaterthan+/-200(TCP100V)voltsundernormal/intendeduse.靜電敏感材料的包裝及填充物當(dāng)使用時(shí)不得因摩擦而產(chǎn)生大於+/-200(TCP100V)伏特之靜電壓.28DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(1)1.ESDprotectivestatic>/=10E5to<10E9ohmdissipativeworksurfacetoESDgroundresistance.靜電防護(hù)傳導(dǎo)物表面至靜電接地之電阻等於或大於10E5歐姆到10E9歐姆Therecommendedlowerlimitis10E5ohm.Howeveralowervaluemaybeusediflocalsafetyrequirementscanstillbemet.建議最低的阻抗值是10E5歐姆.但是如果能夠符合當(dāng)?shù)匕踩髣t低於此建議值的阻抗可以採用.29Electrodes--Twocylindrical2.27kg(5pound)electrodeswithadiameterof63.5mm(2.5inches)eachhavingcontactsofelectricallyconductivematerialwithaShore-A(IRHD)udometerhardnessof50-70.Theresistancebetweenthetwoelectrodesshouldbelessthan1kilohmwhenmeasuredat10Vorlessonametallicsurface.電極-兩個(gè)重約2.27公斤(5磅),直徑6.35公分(2.5英吋)的圓柱型電極,每個(gè)都要有硬度在(IRHD)50-70間的導(dǎo)電物相接觸.兩個(gè)電極間的電阻在金屬表面及10伏特或更低的量測電壓下時(shí)不得大於1k歐姆.DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(2)30Cleanelectrodewithaclean,low-liningcloth.orusingaminimumof70%isopodan-watertocleanit.Allowelectrodetoairdry.使用清潔且不會脫纖維的布料來清潔電極.或用至少含有70%的異丙醇水溶液來清潔電極,並讓電極在空氣中乾燥.ConnectoneleadofthemetertoESDground,andtheotherleadtotheelectrode.Placeelectrodeonthesurfaceofthematerialbeingtested.Applytestvoltageandrecordtheresistanceafterthemeasurementhasstabilizedorafter15secondshaselapsed.Removetestvoltageandremoveelectrodefromsurface.連結(jié)儀表的一端到接地點(diǎn),另一端到電極.將電極置於待量測物體表面相距至少3英尺.輸入測試電壓並在量度穩(wěn)定或15秒後記錄阻抗值.停止測試電壓且將電極也移開.DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(3)31PerformaminimumoffivetestspercontiguousFloorsurfacematerialoraminimumoffivetestsper5,000Squarefeetoffloormaterial,whicheverisgreater.AMinimumofthreeofthefivetestsshouldbeconductedinThoseareasthataresubjecttowearorthathavechemicalorWaterspillageorthatarevisiblydirty.在連續(xù)的地板面至少要做5次測試或每5000平方英尺要做5次測試,那種次數(shù)多就採用那種.5次中至少有3次要在有受磨損,或受化學(xué)物,水污染或看起有些髒的地方DissipativeTable/FloorMAT(Optional)

靜電地氈或桌墊(4)32ESDProtectedWorkStation

無靜電工作桌(1)1.StaticdissipativeESDprotectiveworksurfacesarepreferred.Adirectconnectiontogroundisrecommended.Aresistorof1Mohm+/-10%inthegroundingwireisoptional.建議最好使用靜電傳導(dǎo)防護(hù)工作面,且直接連結(jié)到接地.接地線可加或不加1M+/-10%電阻.WhenhighlyconductiveESDprotectiveworksurfacesarerequiredduetothemanufacturingprocessneeds(e.g.,stainlesssteel),theyshallbeconnecteddirectlytoESDgroundwithoutaseriesresistortoensuretheyarecontinuouslyatgroundpotential.InthiscaseGroundfaultcircuitinterrupters(GFCI)isarecommendation.當(dāng)高導(dǎo)電性靜電防護(hù)工作面(如:不銹鋼工作面)因製造部需要而設(shè)置時(shí),它們需直接連結(jié)到靜電接地而不須外加一串連電阻以確定它們持續(xù)的維持接地電位;此時(shí)每一電源插座建議需有漏電斷路器(GFCI).33WhenunprotectedESDSdevicesorassembliesarecandledonconductive/highlyconductiveworksurfaces,theworksurfaceshallbecoveredwithagroundedstaticdissipativeworksurfaceormeettheresistancerequirementofstaticdissipativeworksurface,10E5to10E9ohms.當(dāng)使用不銹鋼工作桌面處理材料時(shí),必需在其上覆蓋一層已接地的靜電傳導(dǎo)性桌面或其桌面電阻要符合靜電傳導(dǎo)性桌面電阻的要求,10E5到10E9ohms.ESDProtectedWorkStation

無靜電工作桌(2)34CautionSign

提醒看板SDcautionsignsshallbepostedateachESDprotectedworkstationand/orattheentrancesofdefinedESDprotectedareas.靜電警告標(biāo)誌必須置於每一個(gè)無靜電工作桌,且或在每個(gè)靜電防護(hù)區(qū)域的入口處.警告標(biāo)誌可如下或類似者:Caution注意StaticCanDamageComponents靜電會破壞材料HandleItemsonlyinAccordancewithESDspecification處理材料必須依照靜電規(guī)格行之35ESDProtectiveShoesTester

靜電鞋測試器ESDprotectiveshoes>/=1Mohmto=/<450Mohm靜電防護(hù)鞋迴路1M歐姆到450M歐姆間.36ESDProtectiveSmocks

靜電防護(hù)衣1.ESDprotectivesmocks.</=+/-200V(TCP:100V)靜電防護(hù)衣靜電壓小於或等於200伏特(TCP:100V)TheESDprotectivesmocksshallbebuttoned(exceptforthecollar)wheneverthewearerisatanESDprotectedworkstationorinadesignatedESDprotectedarea.當(dāng)穿者在靜電防護(hù)工作站或靜電保護(hù)區(qū)內(nèi)時(shí),靜電防護(hù)衣的鈕扣(衣領(lǐng)上的除外)或拉鍊需要扣好,拉好37ESDGround

靜電接地(1)TheESDgroundshallbetheequipmentgroundorearthground.Equipmentgroundistheelectricalground(green)wireatreceptaclesthathavebeentestedWhenbothequipmentandearthgroundsareusedatthesameESDprotectiveworkstationtheyshallbebondedtogetheratsomepointinthegroundsystem.靜電接地應(yīng)使用設(shè)備接地或大地接地.設(shè)備接地是電源插中的電氣接地(綠)線它需經(jīng)過測試.當(dāng)兩種接地方式於同一靜電防護(hù)工作站均被採用時(shí),在接地系統(tǒng)上它們必須被連結(jié)在一起.38EachESDworkstationshallbeindividuallyconnectedtotheESDground.Thegroundingshouldnotbehookedinseries.Thisistoavoidtheadditiveresultofresistiveandresultinginincreaseofdecaytime,alsotoavoidthegroundingdisconnectedsimultaneouslywhenanygroundingwirebecomeopen.每個(gè)靜電工作站必須個(gè)別的連結(jié)到靜電接地.當(dāng)一個(gè)靜電工作站上有很多靜電工作面時(shí)則每一個(gè)靜電工作面需個(gè)別的接到靜電接地點(diǎn).接地線也不可串接,為的是防止增加衰減時(shí)間,並防止同時(shí)斷路的發(fā)生.ESDGround

靜電接地(2)39Anyinsulatormaterialswhichmakecontactwithorcomewithintwelve(12)inchesofthesemiconductordevicesastheypassthroughthetestequipmentshouldbereplaced(wherepractical)withantistaticorstaticdissipativematerials.Ifthisisnotfeasible,theinsulatormaterialsshouldbetreatedwithanantistaticsolution.Inaddition,anymetalpartsinthetestequipmentwhichcomeincontactwithsemiconductordevicesatanytimeshouldbegrounded.Thisisespeciallyimportanttoavoidthechargeddevicemodelfailuresinhighlysensitivesemiconductordevices.電性測試設(shè)備上的任何絕緣物若會接觸到或靠近半導(dǎo)體材料12英吋以內(nèi)時(shí)應(yīng)以抗靜電或靜電傳導(dǎo)物取代之.如果不可能的話,則該絕緣物必須用抗靜電溶液處理過.此外,測試機(jī)臺上的金屬零件部份若會接觸到半導(dǎo)材料時(shí)則該金屬部份無論何時(shí)均要接地.是非常重要的,可以避免高敏感的半導(dǎo)體材料因靜電而受損傷.ESDGround

靜電接地(3)40Impedanceofequipmentgroundingconductorislessthan1.0ohm.設(shè)備接地導(dǎo)線的阻抗需小於1歐姆.Note:Alligatorclipforwriststrapisnotallowedtouse.鱷魚夾頭禁止使用.ESDGround

靜電接地(4)41Gloves/Fingercoats

手套/手指套Onlycottongloves,antistatic/conductivegloves,orantistatic/conductivefingercotsshouldbeusedforhandlingESDsdevices.當(dāng)需要用手套或手指套時(shí),只有棉手套,抗靜電/導(dǎo)電手套或抗靜電/導(dǎo)電手指套可用來處理靜電敏感材料.PeoplehandlingESDSdevices.Theyshouldusethegloves,fingercotsorgloveswithfangcots.處理靜電敏感材料時(shí),可只用手套,手指套或手套加上手指套.42StorageAreas

儲存地區(qū)WhenthestorageshelvingisnotanESDprotectedareaorworkstation,theESDSdevicesshallbeinESDprotectivepackaging.若儲物架不是一個(gè)靜電防護(hù)區(qū)域或工作站,則靜電敏感材料必須置於靜電防護(hù)包裝物中.2.Thegroundchainfortrailers(forWipe/finishgood)enoughtocompletelycontactwithgroundandkeepthechainclean,replacinganewoneifnecessary.裝載材料成品的推車必須要有接地鍊條,其長度要能夠完全與地面接觸,並保持乾淨(jìng)整潔,若不潔淨(jìng)則必需更換之.43

MobileEquipment

可移動的設(shè)備Mobileequipment(e.g.,carts,chairs,tablesshallnotgenerateelectrostaticvoltagesgreaterthan+/-200V(TCP100V)withintwelve(12)inchesofunprotectedESDSdevicesduringuse.可移動的設(shè)備(例如:車子,椅子,桌子)在使用時(shí)若接近未受保護(hù)的靜電敏感材料12英吋以內(nèi)不得產(chǎn)生大於+/-200(TCP100V)伏特之靜電壓.44MethodsforMinimizingStaticCharging

低靜電的方法

AntistaticSolution

抗靜電液Antistaticchemicals(antistatsolutions)canbeusedtopreventstaticchargegenerationonstaticgenerating/chargingmaterialsintheworkorstorageareas.Duringapplicationofanyantistaticchemical,theusermustconsiderthefollowing:抗靜電化學(xué)物(抗靜電液)可以用來防止在工作或儲存區(qū)的靜電產(chǎn)生或充電物發(fā)生靜電充電.在使用任何抗靜電化學(xué)物時(shí),使用者應(yīng)考慮下列:1.抗靜電液要選擇不會污染靜電敏感材料者.2.抗靜電噴劑或溶液不可用於能夠產(chǎn)生能量的電氣部份或設(shè)備上.3.當(dāng)裝置或包裝體直接暴露在噴霧下時(shí)不可使用抗靜電溶液.4.靜電溶液需要的程度以及使用頻率要根據(jù)在正常作業(yè)下使用靜電伏特計(jì)來做靜電壓量測的結(jié)果來做決定.45MethodsforMinimizingStaticCharging

低靜電的方法

RelativeHumidityControl

相對濕度的控制Relativehumidityhasasignificantimpactonthegenerationofstaticelectricityanditscontrolisrecommendedwherepracticable.相對濕度對靜電產(chǎn)生有很大的影響如有能力最好要加以控制.Note:Therecommendedminimumhumidityis40%R.H.註:建議最小的濕度為40%R.H.46MethodsforMinimizingStaticCharging

低靜電的方法

Training

訓(xùn)練It'stheresponsibilityofeachareasupervisortomakesurethathis/herpeoplereceiveESDcontroltraininginitiallyforworkinginhandlingESDSitems.每一區(qū)域的主管必須確定其操作靜電敏感材料的人員,須受過ESD的訓(xùn)練.Note:PersonnelenteringESDprotectedareasshouldreceiveESDawarenesstraining.註:進(jìn)入靜電防護(hù)區(qū)域之人員必須受過靜電認(rèn)知訓(xùn)練.47CheckList

檢查表(1)1_____Doesthecalibrationsystemforallinspection,measuringandtestequipmentusedtoperformrequiredESDitemcheckslistedinTable1meettheTITLcalibrationrequirementsofTQ-General01002有ESD量測儀器是否都有校正,且都在有效期內(nèi)? 2_____AregroundedflooringorfloormatscoveringthefloorareaswherepersonnelormobileESDprotectiveworkstationsareusingfloorgroundingmethods?使用靜電防護(hù)鞋的工作區(qū)域是否配合有接地良好之靜電防護(hù)地板?3_____Iseachpersonhandlingorwithintwelve(12)inchesofunprotectedESDSdevicesgroundedbyeitherawriststraporESDprotectivefootwear?在接近ESDS產(chǎn)品(即IC材料)12英吋範(fàn)圍內(nèi)的人員是否都有戴靜電手環(huán)或穿靜電鞋?4_____Whenpersonnelfloorgroundingmethodsareused,istheESDprotectivefootwearwornonbothfeet?是否所有人兩隻腳都穿有靜電鞋(不能只穿一支腳)?5_____ArenonessentialandpersonalitemskeptoffoftheESDprotectiveworksurfaces?靜電防護(hù)工作桌面上是否沒有不必要的東西或私人用品?6_____Arethestaticvoltagesgeneratedbyessentialmaterials/itemslessthan+/-200volts(top100V)withintwelve(12)inchesofunprotectedESDSdevices?在接近ESDS產(chǎn)品(即IC材料)12英吋範(fàn)圍內(nèi)是否沒有會產(chǎn)品大於+/-200V(TCP100V)靜電壓的任何物品?7_____WhenESDprotectivesmocksareused,dothesmockscoverallpersonalgarmentsabovethewaistexceptattheneckarea?靜電服是否能蓋到由腰部以上(頸部除外)的部位?8_____WhereunprotectedESDSdevicesarehandled,aregroundedstaticdissipativeworksurfacesused?處理ESDS產(chǎn)品(即IC材料)時(shí),是否在接地良好的靜電防護(hù)工作桌面上處理?489_____AreESDcautionsignspostedateachESDprotectedworkstationand/orattheentrancesofdefinedESDprotectedareas?是否在靜電防護(hù)區(qū)域的入口或工作桌區(qū)域有一靜電防護(hù)的”警式看板”?10_____Arethedailywriststrapchecksbeingperformedandrecordedtheresults?靜電手環(huán)是否每班做檢查及記錄檢查結(jié)果呢?11_____Doesthewriststrapresistancemeasurementpathgofromthewearer'shand,throughtheuser'sbody,thebody-to-strapcontact,theintegralresistor,thestrapwire,tothestrapgroundconnector?靜電手環(huán)檢測是否由穿戴者的手,使用者的身體,靜電環(huán)內(nèi)阻,一直到靜電接地做一迴路電阻值量測.12_____ArethedailyESDprotectivefootwearchecksbeingperformedandrecordedtheresults?靜電鞋是否每班做量測與記錄呢?13______AretheESDgroundconnectionvisualchecksbeingperformedweekly?所有靜電接地,如靜電手環(huán),桌墊.,靜電地板的接地聯(lián)接是否每週目檢一次?14_____ArethemonthlyESDprotectivesmockstaticvoltagechecksbeingperformedandkeptrecord?靜電衣的靜電壓是否每個(gè)月偵測一次並記錄其電壓值?15_____AretheESDprotectedareaandworkstationstaticvoltagesurveysbeingperformed&recordmonthly?生產(chǎn)線上ESD保護(hù)區(qū)域和工作桌區(qū)域的靜電壓是否每個(gè)月檢檢測一次.並記錄其電壓值?16_____AretheESDprotectivestaticdissipativeworksurfacetoESDgroundresistancechecksbeingperformed&recordedquarterly?ESD防護(hù)工作桌面(靜電消散桌面)到其接地的電阻是否每季檢測一次並記錄CheckList

檢查表(2)4917_____AretheESDprotectivefloortoESDgroundresistancechecksbeingperformedper&recordedquarterly?ESD防護(hù)地板到其接地的電阻是否每季檢測一次並記錄其電阻值?18_____AretheESDgroundcontinuitychecksbeingperformed&recordedquarterly?靜電接地,如靜電手環(huán),工作桌面,地板等的接地線是否每季量測一次並記錄其電阻值?19_____Aretheionizebalancechecksbeingperformedper&recordedsemi-annual?離子風(fēng)扇的balance電壓和DecayTime是否每半年校正一次並有記錄?20_____Whenused,aretheairionizesaimedatthedevicesandoperator'shandsratherthanattheoperator?離子風(fēng)扇是否朝向處理材料的雙手,而非朝向operator?21_____IsanannualESDsystemcompliancechecktotherequirementsofthisstandardbeingperformed?每一工作區(qū)域是否每年做一次檢查,看是否符合此靜電管制規(guī)格的要求?22_____Whencompliancetothedaily,weekly,quarterly,semiannual,and/orannualchecksisnotcontinuouslymaintained,arethechecksperformedadoublefrequency?如果任何定期的測量不通過其量測頻率是否增加一倍呢?23_____ArerecordsoftheESDitemchecksmaintainedatleast2yearsminimumrequirement.所有ESD量測的記錄皆必須保存至少二年的要求?24____DoeseachESDprotectivepackagehaveacontrastingESDcautionlabel?是否每一靜電防護(hù)包裝都有一明顯的靜電警告標(biāo)示25_____AretheESDcautionlabelslegibletonormalvisionatadistanceofthreefeet?是否此靜電警告標(biāo)示(籤)在3英呎的距離即可看得清楚?26_____WhenmorethanoneESDworksurfaceisusedataworkstation,iseachsurfaceindividuallyconnectedtotheESDground?是否每一工作桌面或桌墊都有其個(gè)別的靜電接地?CheckList

檢查表(3)5027____Whenconductive/highlyconductiveESDprotectiveworksurfacesareused(e.g.,stainlesssteel),aretheyconnecteddirectlytoESDgroundwithoutaseriesresistortoinsuretheyarecontinuouslyatgroundpotential?不鏽鋼工作桌面是否直接接地,即不需連接一1Mega歐姆的電阻?28_____Whenafloorgroundingdevice(e.g.,dragchain,dragwire,conductivecastor)isusedtogroundmobileESDprotectedworkstations,isanESDprotectivefloorormatused?當(dāng)移動性工作桌,車子被用來當(dāng)成處理材料的工作桌時(shí),它們是否有靜電接地?及在有靜電地板的工作環(huán)境?29_____AreallESDSdevicespackedinESDprotectivepackaging,whennotatanESDprotectedareaorworkstation?當(dāng)ESDS產(chǎn)品(即IC材料)不在靜電防護(hù)區(qū)域時(shí)它們是否有在靜電防護(hù)包裝之內(nèi)?30_____ArethepackingmaterialdonotGeneratestaticvoltagemorethan+/-200voltswhenoperation?所有包裝用的材料,在使用時(shí)是否不會產(chǎn)生大於+/-200v(TCP100V)的靜電壓?31____Isapplyingorremovingstaticgeneratingtapesandlabelstoantistatictubes,magazinesandcarrierswithESDSdevicesinside,performed?當(dāng)有IC材料在管子或盤子內(nèi)時(shí),是否沒有做會產(chǎn)生大於+/-200v(TCP100V)靜電壓的撕膠布或貼膠布的動作?32____AreallESDS