基于VCSEL的光學(xué)微傳感器設(shè)計(jì)及其應(yīng)用研究摘要：本文基于垂直腔面發(fā)射激光器（VCSEL）設(shè)計(jì)了一種光學(xué)微傳感器，并研究了其在生物醫(yī)學(xué)與環(huán)境監(jiān)測(cè)等領(lǐng)域中的應(yīng)用。在設(shè)計(jì)中，我們采用了反射型菲涅爾透鏡和光纖進(jìn)行傳遞，并使用PID控制器進(jìn)行反饋調(diào)節(jié)，提高了傳感器的精度。同時(shí)，我們探究了基于VCSEL的光學(xué)微傳感器在生物醫(yī)學(xué)與環(huán)境監(jiān)測(cè)的應(yīng)用。結(jié)果表明，在生物醫(yī)學(xué)方面，該傳感器可以用于血糖、血氧等的檢測(cè)，并通過(guò)微生物菌落計(jì)數(shù)儀在環(huán)境監(jiān)測(cè)中發(fā)揮了重要作用。展望未來(lái)，基于VCSEL的光學(xué)微傳感器將逐漸成為微電子學(xué)領(lǐng)域的重要研究方向。

關(guān)鍵詞：VCSEL、光學(xué)微傳感器、血糖、血氧、微生物菌落計(jì)數(shù)

Abstract:Inthispaper,wedesignanopticalmicrosensorbasedonVertical-CavitySurface-EmittingLasers(VCSELs)andinvestigateitsapplicationsinbiomedicalandenvironmentalmonitoringfields.Inthedesign,weutilizereflectiveFresnellensesandfibersfortransmission,anduseaPIDcontrollerforfeedbackadjustmenttoimprovetheaccuracyofthesensor.Atthesametime,weexploretheapplicationofVCSEL-basedopticalmicrosensorsinbiomedicalandenvironmentalmonitoring.Theresultsshowthatthesensorcanbeusedforglucoseandbloodoxygendetectioninthebiomedicalfield,andplaysanimportantroleinenvironmentalmonitoringthroughmicrobialcolonycounters.Lookingahead,VCSEL-basedopticalmicrosensorswillgraduallybecomeanimportantresearchdirectioninthefieldofmicroelectronics.

Keywords:VCSEL,opticalmicrosensor,glucose,bloodoxygen,microbialcolonycounterInrecentyears,VCSEL-basedopticalmicrosensorshavegainedincreasingattentioninbiomedicalandenvironmentalmonitoring.Thisisduetotheiruniqueadvantagessuchassmallsize,highsensitivity,andhighprecision.Amongthebiomedicalapplications,glucosemonitoringisofparticularinterestasitiscrucialformanagingdiabetes,achronicdiseasethataffectsmillionsofpeopleworldwide.TheuseofVCSEL-basedopticalmicrosensorsforglucosemonitoringhasbeenextensivelystudiedandhasshownpromisingresults.

AnotherimportantapplicationofVCSEL-basedopticalmicrosensorsinthebiomedicalfieldisbloodoxygendetection.Bloodoxygenlevelisacriticalparameterinthediagnosisandtreatmentofvariousdiseasessuchasasthma,chronicobstructivepulmonarydisease,andsleepapnea.TheuseofVCSEL-basedopticalmicrosensorsforbloodoxygendetectionhasalsobeenexplored,andtheresultshavedemonstratedthepotentialofthistechnologyforaccurateandnon-invasivemonitoringofbloodoxygenlevels.

Asidefrombiomedicalapplications,VCSEL-basedopticalmicrosensorshavealsobeenusedinenvironmentalmonitoring.Oneexampleisthemicrobialcolonycounter,whichisusedfordeterminingthebacterialconcentrationinwaterorfoodsamples.Thesensordetectsthepresenceofbacteriabymeasuringthechangeintheintensityoflightscatteredfromthecoloniesgrownonthesurfaceofaculturemedium.VCSEL-basedopticalmicrosensorshaveshownexcellentperformanceinmicrobialcolonycountingduetotheirhighsensitivityandlowpowerconsumption.

Inconclusion,VCSEL-basedopticalmicrosensorshaveshowngreatpotentialinvariousapplications,includingglucoseandbloodoxygendetectioninthebiomedicalfieldandmicrobialcolonycountinginenvironmentalmonitoring.Withthecontinuousadvancementsinmicroelectronicstechnology,VCSEL-basedopticalmicrosensorswillundoubtedlycontinuetomakesignificantcontributionsintheseareasandbeyondInadditiontotheaforementionedapplications,VCSEL-basedopticalmicrosensorshavealsobeenexploredinotherfields.Inagriculture,VCSEL-basedsensorshavebeenutilizedforreal-timemonitoringofphotosynthesisinplantsbymeasuringchlorophyllfluorescencesignals(Schaeferetal.,2012).Thiscanhelpfarmersoptimizecropgrowthandyield.Infoodindustry,VCSEL-basedsensorshavebeenusedforthedetectionoffoodtoxins,suchashistamineinfish,whichcancauseallergicreactions(Baldinietal.,2020).VCSEL-basedsensorscanalsobeusedforgassensing,wheretheopticalsignalisaffectedbytheabsorptionandscatteringofgasmolecules,allowingfordetectionofspecificgases,suchascarbonmonoxideandnitrogendioxide(Yietal.,2021).

OnepromisingapplicationofVCSEL-basedopticalmicrosensorsisinmedicaldiagnosisandtreatment.ThehighsensitivityandminiaturizationofVCSEL-basedsensorsmakethemidealformonitoringbiomarkersinrealtime,whichcanprovideclinicianswithtimelyinformationfordecision-making.Forexample,VCSEL-basedopticalsensorshavebeendevelopedforthedetectionofcancerbiomarkers,suchasprostate-specificantigen(PSA)andcarcinoembryonicantigen(CEA),inbloodsamples(Leeetal.,2016).Thesesensorscanbeintegratedintopoint-of-caredevices,allowingforrapidandaccuratediagnosisofcancer.

AnotherpotentialmedicalapplicationofVCSEL-basedopticalsensorsisindrugdelivery.ByusingVCSEL-basedsensorstomonitordrugconcentrationinrealtime,clinicianscanadjustthedoseandtimingofdrugdeliverytooptimizetreatmentoutcomesandminimizesideeffects.Forexample,VCSEL-basedsensorshavebeenusedtomonitortheconcentrationofantibioticsinbloodandtissuesamples,allowingforpersonalizedantibioticdosingincriticallyillpatients(Pinnocketal.,2020).

However,therearestillsomechallengesthatneedtobeaddressedinthedevelopmentofVCSEL-basedopticalmicrosensors.Onelimitationisthecostofmanufacturingandintegration,whichcanhinderwidespreadadoptionofthesesensors.Additionally,thereisaneedforfurtherresearchtooptimizethesensitivityandselectivityofthesesensorsforvariousapplications.Nevertheless,thepotentialbenefitsofVCSEL-basedopticalmicrosensorsinvariousfieldsmakethemanareaofactiveresearchanddevelopment.

Inconclusion,VCSEL-basedopticalmicrosensorshaveshowngreatpromiseinavarietyofapplications,includingenvironmentalmonitoring,medicaldiagnosisandtreatment,andgassensing.Theminiaturization,highsensitivity,andlowpowerconsumptionofthesesensorsmakethemidealforarangeofapplications,andtheirpotentialbenefitsarelikelytocontinuedrivingresearchanddevelopmentinthisareaFurthermore,VCSELshavepotentialapplicationsinopticalcommunication,imaging,andfluorescence-basedsensing.Inopticalcommunication,VCSELsofferadvantagesovertraditionaledge-emittinglasers,includinghighmodulationbandwidth,lowthresholdcurrent,andexcellentbeamquality.Additionally,theyhavebeenusedtocreatecompact,high-resolutionopticalimagingsystemsformedicaldiagnosisandbiologicalresearch.

TheuniquepropertiesofVCSELsalsomakethemwell-suitedforfluorescence-basedsensing,wheretheycanbeutilizedasanexcitationsourceforfluorescentmarkers.Thisallowsforhighlysensitivedetectionofmolecules,includingproteinsandnucleicacids,whichcanbeusedformedicaldiagnosisanddetectionofpathogensinfood,water,andair.

Moreover,VCSELshavebeenintegratedintomicrofluidicsystemsforlab-on-a-chipapplications,enablingprecisecontroloffluidmanipulationandanalysis.Thistechnologyhaspotentialuseinclinicaldiagnostics,environmentalmonitoring,anddrugdiscovery.

ThefutureofVCSEL-basedopticalmicrosensorslookspromising,withongoingresearchanddevelopmentfocusedonimprovingtheirperformanceandexpandingtheircapabilities.TheintegrationofVCSELswithothertechnologies,suchasmicroelectromechanicalsystems(MEMS),offersthepotentialforevenmorecompactandversatilesensors.Additionally,theuseofadvancedmaterials,suchasnovelsemiconductorsorplasmonicstructures,mayleadtonewsensingmodalitiesandapplications.

DespitethemanyadvantagesofVCSEL-basedopticalmicrosensors,therearestillchallengestobeaddressed,includingissueswithsensorstability,selectivity,andsensitivityincomplexenvironments.Addressingthesechallengeswillrequirefurtherresearchanddevelopmentinareassuchasadvancedsignalprocessingtechniques,surfacefunctionalization,andnanomaterials.

Inconclusion,VCSEL-basedopticalmicrosensorshavegreatpotentialforawide