邵陽(yáng)學(xué)院畢業(yè)設(shè)計(jì)（論文）1附錄：Micro-machineFromthebeginning,mankindseemsinstinctivelytohavedesiredlargemachinesandsmallmachines.Thatis,large”and“small”incomparisonwithhuman-scale.Machinelargerthanhumanarepowerfulalliesinthebattleagainstthefuryofnature；roduceIfwecomparethefacilityandtechnologyofmanufacturinglargermachines,commonsensetellsusthatthesmallermachinesareeasiertomake.Nevertheless,throughoutthehistoryoftechnology,largermachineshavealwaysstoodout.Thesizeoftherestoredmodelsofthewater-millinventedbyVitruviusintheRomanEra,thewindmilloftheMiddleAges,andthesteamengineinventedbyWattisoverwhelming.Ontheotherhand,smallermachinesinhistoryoftechnologyaremostlytools.Ifsmallermachinesareeasiertomake,avarietyofsuchmachinesshouldexist,butuntilmoderntimes,nosignificantsmallmachinesexistedexceptforgunsandclocksThisfactmayimplythatsmallermachineswereactuallymoredifficulttomake.Ofcourse,thisdoesnotmeansimplythatitwasdifficulttomakeasmallmachine；Itmeansthatitwasdifficulttoinventasmallmachinethatwouldbesignificanttohumanbeings.Somepeoplemightsaythatmankindmaynothavewantedsmallermachines.Thistheory,however,diesnotexplaintherecentpopularityofpalm-sizemechatronicsproducts.Somepeoplemightsaythatmankindmaynothavewantedsmallermachines.Thistheory,however,doesnotexplaintherecentpopularityofpalm-sizemechatronicsproducts.Theabsenceofsmallmachinesinhistorymaybeduetotheextremedifficultyinmanufacturingsmallprecisionparts.2.Whymicromachinenow邵陽(yáng)學(xué)院畢業(yè)設(shè)計(jì)（論文）2Thedreamoftheultimatesmallmachine,ormicro-machine,wasfirstdepictedindetailabout30yearsagointhe1966movie“FantasticVoyage”.Atthattime,thestudyofmicro-machiningofsemiconductorshadalreadybegun.Therefore,manufacturingminutemechanismsthroughmicro-machiningofsemiconductorswouldhavebeenpossible,eventhattime,.Therewas,however,awaitofover20yearsbeforetheintroduction,about10yearsago,ofelectrostaticmotorsandgearsmadebysemiconductormicromachining.Whydidntthestudyofmicro-machiningandthedreamofmicro-machinesmeetearlier?Apossiblereasonforthisisasfollows.Inadditiontomicro-machining,thedevelopmentofmicromachinesrequiresanumberoftechnologiesincludingmaterials,instrumentations,control,energy,informationprocessing,anddesign.Beforemicro-machineresearchanddevelopmentcanbestarted,allofthesetechnologiesmustreachacertainlevel.Inotherwords,theoveralltechnologicallevel,asawhole,mustreachacertaincriticalpoint,butithadntreachedthatpoint30ago.Approximately20yearsafter“FantasticVoyage”.,thetechnologylevelformicromachinesfinallyreachedacriticalpoint.Micromotorsandgearsmadebysemiconductormicromachiningwereintroducedataboutthattime,triggeringtheresearchondevelopmentofmicromachines.Thebackgroudofthemicromachineboom,whichstartedabout10yearsago,canbeexplainedbytheabove.3.micromachineasgentlemachinesHowdomicromachinesofthefuturedifferfromconventionalmachines?Howwilltheychangetherelationshipbetweennatureandhumans?Themostuniquefeatureofmicro-machineis,ofcourse,itssmallsize.Utilizingitstinydimensions,amicromachinecanperformtasksinarevolutionarywaythatwouldbeimpossibleforconventionalmachines.Thatis,micro-machinesdonotaffecttheobjectortheenvironmentasmuchasconventionalmachinesdo.Micromachinesperformtheirtasksgently.This邵陽(yáng)學(xué)院畢業(yè)設(shè)計(jì)（論文）3isafundamentaldifferencebetweenmicromachinesandconventionalmachines.Themedicalfieldholdsthehighestexpectationsforbenefitsfromthisfeatureofmicromachines.Diadnosisandtreatmentwillchangedrasticallyfromconventionalmethods,and“FantasticVoyage”maynolongerbeafantasy.Ifamicromachinecangentlyenterahumanbodytotreatillness,humanswillbefreedfrompainfulsurgeryanduncomfortablegastro-cameratesting.Furtherore,ifmicro-machinescanhaltthetrendofever-increasingsizeinmedicalequipment,itcouldslowtheexcessgrowthandcomplexityofmedicaltechnology,contributingtothesolvingofseriousproblemswithhighmedicalcostsforcitizens.Micro-machinesaregentlealsointermsofmachinemaintenance,sincetheycanbeinspectedandrepairedwithoutdifficultyinreachingandoverhaulingtheengineorplant.Themorecomplexthemachine,themoresusceptibleitistomalfunctionduetooverhaulandassembly.Inaddition,therehavebeenmoreinstancesofhumanerrorsduringoverhaulandassembly.Itisgoodforthemachineifoverhaulisnotnecessary.Itisevenbetterifmaintenancecanbeperformedwithoutstoppingthemachine.Repeatedstop-and-gooperationwillacceleratedamageofthemachineduetoexcessstresscausedbythermalexpansion.Suchgentlenessofamocromachineisanadvantage,aswellasaweaknessinthatamicromachineistoofragiletoresisttheobjectortheenvironment；thisisthedrawbackofthemicro-scaleobjects.Forexample,afishcanswimfreelyagainstthecurrent,butasmallplanktoncannot.Thisisresultofphysicallawsandnothingcanchangeit.Still,theplanktoncanliveandgrowinthenaturalenvironmentbyconformingtotheenvironment.Unlikeconventionalmachineswhichfightandcontrolnatural,micromachineswillprobablyadapttoandutilizenature.Ifamicromachinecannotproceedagainstthecurrent,awaywillbefoundtoproceedwiththeflow,naturallyavoidingcollisionswithobstacles.邵陽(yáng)學(xué)院畢業(yè)設(shè)計(jì)（論文）44.Micro-electronicsandmechatronicsTheconceptofmicromachinesandrelatedtechnologiesisstillnotadequatelyunified,asthesearestillatthedevelopmentstage.Themicromachinesandrelatedtechnologiesarecurrentlyreferredtobyavarietyofdifferentterms.IntheUnitedStates,theacceptedtermis“microelectromechanicalsystems”(MEMS)；inEurope,Theterm“Microsystemstechnology”(MST)iscommon,whiletheterm“micro-engineering”issometimesusedinBritain.MeanwhileinAustralia“micro-machine”.ThemostcommontermifitistranslatedintoEnglishis“micromachine”.ThemostcommontermifitistranslatedintoEnglishis“micromachine”inJapan.However“micro-robot”and“micro-mechanism”arealsoavailablecasebycase.Theappearanceofthesevarioustermsshouldbeitemstakenasreflectingnotmerelydiversityofexpression,butdiversityoftheitemsreferredto.Dependingonwhethertheitemreferredtoisanobjectoratechnology,theterminologymaybesummedupasfollows:Object:micro-robot,micro-mechanismTechnology:micro-engineering,MSTObject&technology:MEMS,micro-machineWithregardtotechnology,ifwesummarizethe