外文資料翻譯1Crankshaftthreedegreesoffreedomusethesameparallelmicro-mechanicalstructureoftheexperimentaldesign利用曲臂3個(gè)自由度的相同并列式微型機(jī)械結(jié)構(gòu)的實(shí)驗(yàn)設(shè)計(jì)Abstract:Crankshaftinmechanicalstructuredesignofthesmallgeneralhasbeenreplacedmechanicalconnectionandextensiveuse.However,thewrongmodelwillbereducedCrankshaftprecisionmechanicalstructure.Inthispaper,inordertogetthecorrectmodelCrankshaftanddesignofa3-DOFplanarthesametypeofmicro-mechanicalstructure.Tothatend,aninitialanalysisofkinematicsincludinginversekinematics,internalkinematicsandcoordinationoftheworkofafixedmodelhasbeenraised.Firstofall,takeintoaccountafreedomCrankshaftcycletype,butFEMbasedonthesimulationresultsisinconsistentwiththeanalysisoftheresults.Thisisbecausesmallaxialdirectionalongtheconnectingrodextendedtohindertheaccuracyofthemechanicalconnection.Toaddressthisproblem,includinganadditionalsportsbodiessuchastheprismconnectingthetwodegreeoffreedommodelCrankshafthasalreadybeguntousesome.Accordingtothismodel,ensuretheaccuracyofthemechanicalstructure.Throughsimulationandtestshowedthattheaccuracyofthismodeliseffective.ThisworkemphasizedthemodelCrankshaftCrankshaftguaranteetheaccuracyofthemicro-mechanicalstructuretiedtotheuseofgreatsignificance.摘要：曲臂在機(jī)械的微小結(jié)構(gòu)設(shè)計(jì)中已經(jīng)代替普通機(jī)械連接而廣泛地使用。然而，錯(cuò)誤的曲臂模型會(huì)降低機(jī)械結(jié)構(gòu)的精密度。在這篇論文中，為了得到正確的曲臂模型而設(shè)計(jì)了一種平面3個(gè)自由度相同型式的微型機(jī)械結(jié)構(gòu)。為此，一種初步的運(yùn)動(dòng)學(xué)分析包括逆運(yùn)動(dòng)學(xué)，內(nèi)部運(yùn)動(dòng)學(xué)以及有關(guān)工作協(xié)調(diào)的分析固定模型已經(jīng)被提出來(lái)了。首先，考慮到了1個(gè)自由度曲臂的循環(huán)類(lèi)型，但是基于FEM的模擬結(jié)果卻與分析的結(jié)果不一致。這是因?yàn)樾≥S沿著連桿方向延伸從而阻礙了機(jī)械的準(zhǔn)確連接。為了解決這個(gè)問(wèn)題，一種包括這種額外的運(yùn)動(dòng)機(jī)構(gòu)作為三棱鏡連接的2個(gè)自由度的曲臂模型已經(jīng)開(kāi)始部分地使用了。根據(jù)這種模型，確保了機(jī)械結(jié)構(gòu)的精確性。通過(guò)模擬和試驗(yàn)顯示了這種準(zhǔn)確模型的有效性。這項(xiàng)工作強(qiáng)調(diào)了曲臂模型的準(zhǔn)確性對(duì)保證曲臂在并列微型機(jī)械結(jié)構(gòu)中的使用具有重要意義。外文資料翻譯2、Introduction、介紹Micro-mechanicaldevicesinmanyareasisakeyandessentialtechniques,suchasscanningelectronmicroscopy,X-raylithography,maskalignmentandmicro-machinery.Recently,alotofCrankshaftontheuseofmicro-mechanicalstructureoftheanalysisandexperimentalresearch.Themajorityofpreviousstudies(Moriyama1,2,suchasTaniguchi,Tomita,etc.3,4,suchasRyu,Chang,etc.5,6Peng,etc.,etc.10-13)isthefreedomtouseanarmforrecyclingCrankshaft,threedegreesoffreedomforCrankshaftsphericalarm,andthustheproductionmodel.However,sometimesevenasmalltotal,willdoCrankshaftlinearmotion.SomeresearchersbelievethatthereisaCrankshaftadditionaldegreeoffreedom.However,theyignoredthemodelintheprocessofeasymobility,butalsonottomicro-mechanicalstructureinthecorrectuseofthefixedmodel.Thisledtothefailureoftheimplementationofmicro-systems.Therefore,thefocusofthisworkwillbeeasymobilityisbasedontheanalysisoftheaccuracyofmodelCrankshaft.微型機(jī)械裝置在許多領(lǐng)域是一項(xiàng)關(guān)鍵且必不可少的技術(shù)，例如電子顯微掃描，X射線石版印刷術(shù)，maskalignment和微型機(jī)械。最近，出現(xiàn)了很多有關(guān)利用曲臂的微型機(jī)械結(jié)構(gòu)的分析和實(shí)驗(yàn)研究。以前的大多數(shù)研究（Moriyama等1,Taniguchi等2,Tomita等3,Ryu等4,Chang等5,Peng等6，等等10-13）是使用1個(gè)自由度的曲臂作循環(huán)臂，3個(gè)自由度的曲臂作球形臂，并以此制作模型。然而，有時(shí)就算總量很小，曲臂也會(huì)做直線運(yùn)動(dòng)。一些研究者認(rèn)為曲臂有一種額外的自由度。但是，他們忽略了模型程序中的易動(dòng)性分析，而且也沒(méi)有提出在微型機(jī)械結(jié)構(gòu)中使用正確的固定模型。這就導(dǎo)致了微系統(tǒng)執(zhí)行的失敗。因此，這項(xiàng)工作的焦點(diǎn)將會(huì)是基于易動(dòng)性分析的曲臂模型的準(zhǔn)確性。Introductionofthecampaignbecauseofthenumberofindependentvariableswereconstrained,andtheseindependentvariables,inordertofindtherelevantlinksbetweenobjectsmustbeclearlydefined.Aboveformulacanbeadopted(1)todescribethetypeofM,N,L,respectivelyFijandthatmovement,freedomofspaceoperations,thenumberoflinks,aswellaslinkingofthenumberofmobileconnectionsifreedom.Exercisealsoshowsthattheminimumfunctioningofthesystem.WhenMNbiggerthanthesportbecomeredundantsystem.外文資料翻譯3運(yùn)動(dòng)性因獨(dú)立變量的數(shù)目而被限制，而這些獨(dú)立的變量為了尋找物體之間的相關(guān)聯(lián)系必須明確說(shuō)明。以上可以通過(guò)公式（1）來(lái)進(jìn)行描述，式中M、N、L、j和Fi分別表示運(yùn)動(dòng)性，操作空間自由度，連桿數(shù)目，連接物數(shù)目以及第i個(gè)連接物移動(dòng)的自由度。運(yùn)動(dòng)性也表明了系統(tǒng)運(yùn)轉(zhuǎn)的最小值。當(dāng)M比N大時(shí)，就成為冗余運(yùn)動(dòng)系統(tǒng)。Figure1showsaCrankshafthavefreedomofthethreemicro-mechanicalstructure.Usually,thesesystemscanbeCrankshaftrotaryconnectorofthemodel.OutlinedinFigure2ofthemodelCrankshaft.IfallCrankshafthaveadegreeoffreedom,thenthemovementofthesystemarethreedegreesoffreedom.However,inthepast,basedonsuchassumptionsaretheresultofthefailureofthismodelbecauseoftheinaccuracyofCrankshaft.Ontheotherhand,ifallareCrankshaftmodeloftherotaryconnectorandprismofconnections,thenthecampaignstructurereached12degreesoffreedom.EvenifthelimitofprogramanalysisandtheoreticalanalysiswillenablethetwodegreeoffreedommodelCrankshaftthanonedegreeoffreedommodelCrankshaftmoreaccurateresults,butneed12tocontroltheoperationofthreedegreesoffreedomratherexpensive.Therefore,notonlythedesignofCrankshafttocampaignstructuretoaminimum,butalsotoensurethatthestructureofprecisionmachineryandsufficientworkingspace.圖1顯示了一個(gè)擁有曲臂的3個(gè)自由度的微型機(jī)械結(jié)構(gòu)。通常，在這些系統(tǒng)中曲臂可以作旋轉(zhuǎn)連接物的模型。在圖2中描畫(huà)了曲臂的模型。如果所有的曲臂都有1個(gè)自由度，那么系統(tǒng)的運(yùn)動(dòng)性就有3個(gè)自由度。然而，以前一些基于這種假設(shè)的結(jié)果都是失敗的，這是因?yàn)榍勰Ｐ偷牟粶?zhǔn)確性。另一方面，如果所有的曲臂模型都有旋轉(zhuǎn)連接物和三棱鏡連接物，那么系統(tǒng)的運(yùn)動(dòng)結(jié)構(gòu)就達(dá)到12個(gè)自由度。即使限定結(jié)構(gòu)程序分析和理論分析能夠使2個(gè)自由度的曲臂模型比1個(gè)自由度的曲臂模型有更準(zhǔn)確的結(jié)果，但需12個(gè)運(yùn)轉(zhuǎn)結(jié)構(gòu)來(lái)控制3個(gè)自由度比較昂貴。因此，曲臂的設(shè)計(jì)不僅要將運(yùn)動(dòng)結(jié)構(gòu)減至最少，而且還要確保機(jī)械結(jié)構(gòu)的精密度及充分的工作空間。Inthispaper,wedesignedtwotypesofCrankshaft.Thefirsttypeusedonlyarelativedegreeoffreedomtoproducethickerneckparts,asshowninFigure2,thisshowsthatthethicknessofthehinge.Thesecondtypeisusedtoproducetwo-DOFrelativelythinneckparts.Therefore,thesecondCrankshaftisafreedomwiththe外文資料翻譯4rotaryconnectorandafreedomconnectedtotheprismproductionmodel.Ifthesystemofeachchainaretwodegreesoffreedombyahingeandatwodegreeoffreedomofthehinge,thenthecampaignstructureis6.Therefore,thisCrankshaftthroughsixoperatingstructuretooperate.在這篇論文中，我們?cè)O(shè)計(jì)了兩種類(lèi)型的曲臂。第一種類(lèi)型只用了1個(gè)自由度來(lái)制作相對(duì)較厚的頸下部分，如圖2所示，這部分顯示了鉸鏈的厚度。第二種類(lèi)型是用了2個(gè)自由度來(lái)制作相對(duì)較薄的頸下部分。因此，第二種曲臂是以擁有1個(gè)自由度的旋轉(zhuǎn)連接和1個(gè)自由度的三棱鏡連接來(lái)制作模型的。如果系統(tǒng)的每一個(gè)鏈條都是由一個(gè)2個(gè)自由度的鉸鏈和兩個(gè)1個(gè)自由度的鉸鏈組成，那么系統(tǒng)的運(yùn)動(dòng)結(jié)構(gòu)就是6。所以說(shuō)，這種曲臂可以通過(guò)6個(gè)運(yùn)轉(zhuǎn)結(jié)構(gòu)來(lái)操作。Paperscontentinthenexttherewillbefurtherdevelopment.Thesecondpartdescribesthestructureofthesystem.Kinematicanalysisandthreecampaignscampaignstructureandsixfixedstructuralsystemanalysismodelrespectivelyinthethirdandfourthpartofademonstration.PartVdescribesthetwocomparativefreedomandfreedomofaCrankshaftprecisionsimulationresults,butalsoembodiesthesixrecommendedbythemovementofthesystemsbenefits.Correcttheeffectivenessofthismodelcanbereflectedthroughexperiments.論文中接下來(lái)的內(nèi)容將