AdvancedPackagingTechAdvancedPackagingTech1OutlinePackageDevelopmentTrend3DPackageWLCSP&FlipChipPackageOutlinePackageDevelopmentTre2PackageDevelopmentTrendPackageDevelopmentTrend3SOFamilyQFPFamilyBGAFamilyPackageDevelopmentTrendSOFamilyQFPFamilyBGAFamilyP4CSPFamilyMemoryCardSiPModulePackageDevelopmentTrendCSPFamilyMemoryCardSiPModul53DPackage3DPackage3DPackage3DPackage3DPackageIntroductionetCSPStackFunctionalIntegrationHighLowTape-SCSP(orLGA)S-CSP(orLGA)S-PBGAS-M2CSPStacked-SiP2ChipStackWirebond2ChipStackFlipChip&WirebondMultiChipStackPackageonPackage(PoP)StackingSS-SCSP(film)FS-BGA3S-PBGAS-SBGAS-TSOP/S-QFP

3S-CSPS-etCSPetCSP+S-CSP

PS-fcCSP+SCSP

PoPwithinterposerFS-CSP2FS-CSP1PaperThinPS-vfBGA+SCSPPiP

5SCSPSS-SCSP(paste)UltrathinStackD2D3D4D2D2D3D4D2

PoPQFN4SS-SCSP3DPackageIntroductionetCSPSStackedDieTopdieBottomdieFOWmaterilWireStackedDieTopdieBottomdieFOTSVTSV(ThroughSiliconVia)

Athrough-siliconvia(TSV)isaverticalelectricalconnection(via)passingcompletelythroughasiliconwaferordie.TSVtechnologyisimportantincreating3Dpackagesand3Dintegratedcircuits.

A3Dpackage(SysteminPackage,ChipStackMCM,etc.)containstwoormorechips(integratedcircuits)stackedverticallysothattheyoccupylessspace. Inmost3Dpackages,thestackedchipsarewiredtogetheralongtheiredges.Thisedgewiringslightlyincreasesthelengthandwidthofthepackageandusuallyrequiresanextra“interposer”layerbetweenthechips. Insomenew3Dpackages,through-siliconviareplaceedgewiringbycreatingverticalconnectionsthroughthebodyofthechips.Theresultingpackagehasnoaddedlengthorthickness.WireBondingStackedDieTSVTSVTSV(ThroughSiliconVia)WiWhat’sPoP?PoPisPackageonPackageTopandbottompackagesaretestedseparatelybydevicemanufacturerorsubcon.

PoPWhat’sPoP?PoPPoPPS-vfBGAPS-etCSPLowLoopWirePinGateMoldPackageStackingWaferThinningPoPCoreTechnologyPoPPS-vfBGAPS-etCSPLowLoopWiPoPAllowsforwarpagereductionbyutilizingfully-moldedstructureMorecompatiblewithsubstratethicknessreductionProvidesfinepitchtoppackageinterfacewiththrumoldviaImprovedboardlevelreliabilityLargerdiesize/packagesizeratioCompatiblewithflipchip,wirebond,orstackeddieconfigurationsCosteffectivecomparedtoalternativenextgenerationsolutionsAmkor’sTMV?PoPTopviewBottomviewThroughMoldViaPoPAllowsforwarpagereductioPoP

BallPlacementontopsurfaceBallPlacementonbottomDieBondMold(UnderFulloptional)LaserdrillingSingulationFinalVisualInspectionBaseM’tlThermaleffectProcessFlowofTMVPoPPoPBallPlacementontopsurfDigital(Btmdie)+Analog(Middledie)+Memory(Toppkg)PotableDigitalGadgetCellularPhone,DigitalStillCamera,PotableGameUnitMemorydieAnalogdieDigitaldiespacerEpoxyPiPDigital(Btmdie)+Analog(Midd14EasysystemintegrationFlexiblememoryconfiguration100%memoryKGDThinnerpackagethanPOPHighIOinterconnectionthanPOPSmallfootprintinCSPformatIthasstandardballsizeandpitchConstructedwith:FilmAdhesivedieattachEpoxypasteforTopPKGAuwirebondingforinterconnectionMoldencapsulationWhyPiP?

PiPEasysystemintegrationIthas15MaterialforHighReliabilityBasedonLowWarpageWaferThinningFineProcessControlTopPackageAttachDieAttachetcOptimizedPackageDesignFlipChipUnder-fillTopepoxyISMPiPCoreTechnology

PiPMaterialforHighReliability16MemoryPKGSubstrateFlipchipMemoryPKGFlipchipInnerPKGAnalogAnalogSpacerDigitalInnerPKGWBPIPFCPIPPiPPiP–W/BPiPandFCPiP

MemoryPKGSubstrateFlipchipMe17WLCSP&FlipChipPackageWLCSP&FlipChipPackageWLCSPWhatisWLCSP? WLCSP(WaferLevelChipScalePackaging),isnotsameastraditionalpackagingmethod(dicingpackagingtesting,packagesizeisatleast20%increasedcomparedtodiesize). WLCSPispackagingandtestingonwaferbase,anddicinglater.Sothepackagesizeisexactlysameasbarediesize.

WLCSPcanmakeultrasmallpackagesize,andhighelectricalperformancebecauseoftheshortinterconnection.WLCSPWhatisWLCSP?19WLCSPWhyWLCSP?Smallestpackagesize:WLCSPhavethesmallestpackagesizeagainstdiesize.Soithaswidelyuseinmobiledevices.Highelectricalperformance:becauseoftheshortandthicktraceroutinginRDL,itgiveshighSIandreducedIRdrop.Highthermalperformance:sincethereisnoplasticorceramicmoldingcap,heatfromdiecaneasilyspreadout.Lowcost:noneedsubstrate,onlyonetimetesting.WLCSP’sdisadvantageBecauseofthediesizeandpinpitchlimitation,IOquantityislimited(usuallylessthan50pins).BecauseoftheRDL,staggerIOisnotallowedforWLCSP.WLCSPWhyWLCSP?20RDLRDL:RedistributionLayerAredistributionlayer(RDL)isasetoftracesbuiltuponawafer’sactivesurfacetore-routethebondpads.

Thisisdonetoincreasethespacingbetweeneachinterconnection(bump).RDLRDL:RedistributionLayerWLCSPProcessFlowofWLCSPWLCSPProcessFlowofWLCSP22WLCSPProcessFlowofWLCSPWLCSPProcessFlowofWLCSP23FlipChipPackageFCBGA(PassiveIntegratedFlipChipBGA)(PI)-EHS-FCBGA(PassiveIntegratedExposedHeatSinkFlipChipBGA)(PI)-EHS2-FCBGA(PassiveIntegratedExposed2piecesofHeatSinkFlipChipBGA)MCM-FCBGA(Multi-Chip-ModuleFCBGA)PI-EHS-MP-FCBGA(PassiveIntegratedExposedHeatSinkMultiPackageFlipChip)FlipChipPackageFCBGA(PI)-EHS24BumpBump25BumpDevelopmentBumpDevelopmentBumpDevelopmentBumpDevelopmentBumpDevelopmentBumpDevelopmentC4FlipChipWhat’sC4FlipChip?C4is:ControlledCollapsedChipConnectionChipisconnectedtosubstratebyRDLandBumpBumpmaterialtype:solder,goldC4FlipChipWhat’sC4FlipChiC4FlipChipBGAMainFeaturesBallPitch:0.4mm-

1.27mmPackagesize:upto55mmx55mmSubstratelayer:4-16LayersBallCount:upto2912

TargetMarket:

CPU、FPGA、Processor、Chipset、Memory、Router、Switches、andDSPetc.MainBenefits

ReducedSignalInductanceReducedPower/GroundInductanceHigherSignalDensityDieShrink&ReducedPackageFootprintHighSpeedandHighthermalsupportC4FlipChipBGAMainFeatures30C2FlipChipWhat’sC2FlipChip?C2is:ChipConnectionChipisconnectedtosubstratebycopperpostBumpmaterialtype:copperpostwithsolderplatingSiliconDieCopperpostSolderC2FlipChipWhat’sC2FlipChiC2FlipChipProcessFlowofC2C2FlipChipProcessFlowofC2C2FlipChipComparison:C2VsC4 Insomecases,C2canreplaceC4orwirebondingpackage.C2FlipChipComparison:C2VsThanks!Thanks!34AdvancedPackagingTechAdvancedPackagingTech35OutlinePackageDevelopmentTrend3DPackageWLCSP&FlipChipPackageOutlinePackageDevelopmentTre36PackageDevelopmentTrendPackageDevelopmentTrend37SOFamilyQFPFamilyBGAFamilyPackageDevelopmentTrendSOFamilyQFPFamilyBGAFamilyP38CSPFamilyMemoryCardSiPModulePackageDevelopmentTrendCSPFamilyMemoryCardSiPModul393DPackage3DPackage3DPackage3DPackage3DPackageIntroductionetCSPStackFunctionalIntegrationHighLowTape-SCSP(orLGA)S-CSP(orLGA)S-PBGAS-M2CSPStacked-SiP2ChipStackWirebond2ChipStackFlipChip&WirebondMultiChipStackPackageonPackage(PoP)StackingSS-SCSP(film)FS-BGA3S-PBGAS-SBGAS-TSOP/S-QFP

3S-CSPS-etCSPetCSP+S-CSP

PS-fcCSP+SCSP

PoPwithinterposerFS-CSP2FS-CSP1PaperThinPS-vfBGA+SCSPPiP

5SCSPSS-SCSP(paste)UltrathinStackD2D3D4D2D2D3D4D2

PoPQFN4SS-SCSP3DPackageIntroductionetCSPSStackedDieTopdieBottomdieFOWmaterilWireStackedDieTopdieBottomdieFOTSVTSV(ThroughSiliconVia)

Athrough-siliconvia(TSV)isaverticalelectricalconnection(via)passingcompletelythroughasiliconwaferordie.TSVtechnologyisimportantincreating3Dpackagesand3Dintegratedcircuits.

A3Dpackage(SysteminPackage,ChipStackMCM,etc.)containstwoormorechips(integratedcircuits)stackedverticallysothattheyoccupylessspace. Inmost3Dpackages,thestackedchipsarewiredtogetheralongtheiredges.Thisedgewiringslightlyincreasesthelengthandwidthofthepackageandusuallyrequiresanextra“interposer”layerbetweenthechips. Insomenew3Dpackages,through-siliconviareplaceedgewiringbycreatingverticalconnectionsthroughthebodyofthechips.Theresultingpackagehasnoaddedlengthorthickness.WireBondingStackedDieTSVTSVTSV(ThroughSiliconVia)WiWhat’sPoP?PoPisPackageonPackageTopandbottompackagesaretestedseparatelybydevicemanufacturerorsubcon.

PoPWhat’sPoP?PoPPoPPS-vfBGAPS-etCSPLowLoopWirePinGateMoldPackageStackingWaferThinningPoPCoreTechnologyPoPPS-vfBGAPS-etCSPLowLoopWiPoPAllowsforwarpagereductionbyutilizingfully-moldedstructureMorecompatiblewithsubstratethicknessreductionProvidesfinepitchtoppackageinterfacewiththrumoldviaImprovedboardlevelreliabilityLargerdiesize/packagesizeratioCompatiblewithflipchip,wirebond,orstackeddieconfigurationsCosteffectivecomparedtoalternativenextgenerationsolutionsAmkor’sTMV?PoPTopviewBottomviewThroughMoldViaPoPAllowsforwarpagereductioPoP

BallPlacementontopsurfaceBallPlacementonbottomDieBondMold(UnderFulloptional)LaserdrillingSingulationFinalVisualInspectionBaseM’tlThermaleffectProcessFlowofTMVPoPPoPBallPlacementontopsurfDigital(Btmdie)+Analog(Middledie)+Memory(Toppkg)PotableDigitalGadgetCellularPhone,DigitalStillCamera,PotableGameUnitMemorydieAnalogdieDigitaldiespacerEpoxyPiPDigital(Btmdie)+Analog(Midd48EasysystemintegrationFlexiblememoryconfiguration100%memoryKGDThinnerpackagethanPOPHighIOinterconnectionthanPOPSmallfootprintinCSPformatIthasstandardballsizeandpitchConstructedwith:FilmAdhesivedieattachEpoxypasteforTopPKGAuwirebondingforinterconnectionMoldencapsulationWhyPiP?

PiPEasysystemintegrationIthas49MaterialforHighReliabilityBasedonLowWarpageWaferThinningFineProcessControlTopPackageAttachDieAttachetcOptimizedPackageDesignFlipChipUnder-fillTopepoxyISMPiPCoreTechnology

PiPMaterialforHighReliability50MemoryPKGSubstrateFlipchipMemoryPKGFlipchipInnerPKGAnalogAnalogSpacerDigitalInnerPKGWBPIPFCPIPPiPPiP–W/BPiPandFCPiP

MemoryPKGSubstrateFlipchipMe51WLCSP&FlipChipPackageWLCSP&FlipChipPackageWLCSPWhatisWLCSP? WLCSP(WaferLevelChipScalePackaging),isnotsameastraditionalpackagingmethod(dicingpackagingtesting,packagesizeisatleast20%increasedcomparedtodiesize). WLCSPispackagingandtestingonwaferbase,anddicinglater.Sothepackagesizeisexactlysameasbarediesize.

WLCSPcanmakeultrasmallpackagesize,andhighelectricalperformancebecauseoftheshortinterconnection.WLCSPWhatisWLCSP?53WLCSPWhyWLCSP?Smallestpackagesize:WLCSPhavethesmallestpackagesizeagainstdiesize.Soithaswidelyuseinmobiledevices.Highelectricalperformance:becauseoftheshortandthicktraceroutinginRDL,itgiveshighSIandreducedIRdrop.Highthermalperformance:sincethereisnoplasticorceramicmoldingcap,heatfromdiecaneasilyspreadout.Lowcost:noneedsubstrate,onlyonetimetesting.WLCSP’sdisadvantageBecauseofthediesizeandpinpitchlimitation,IOquantityislimited(usuallylessthan50pins).BecauseoftheRDL,staggerIOisnotallowedforWLCSP.WLCSPWhyWLCSP?54RDLRDL:RedistributionLayerAredistributionlayer(RDL)isasetoftracesbuiltuponawafer’sactivesurfacetore-routethebondpads.

Thisisdonetoincreasethespacingbetweeneachinterconnection(bump).RDLRDL:RedistributionLayerWLCSPProcessFlowofWLCSPWLCSPProcessFlowofWLCSP56WLCSPProcessFlowofWLCSPWLCSPProcessFlowofWLCSP57FlipChipPackageFCBGA(PassiveIntegratedFlipChipBGA)(PI)-EHS-FCBGA(PassiveIntegratedExposedHeatSinkFlipChipBGA)(PI)-EHS2-FCBGA(PassiveIntegrated