VacuumFundamentalsBasicVacuumandLeakDetectionUsethebasicterminologyforvacuumtechnologyExplainwhatavacuumisExplainwhyavacuumisnecessaryforsomeprocess

VacuumFundamentalsDiscussthetwoimportanttypesofgasflowDescribetheeffectoftemperatureandpressureonavolumeofgasUsetheterm“throughput”todescribevacuumsystem,pumpoperationandgasloadBasicVacuumandLeakDetection

VacuumcomesfromtheLatin“vacua”Empty**Avacuumisonlyreally..onlypartiallyempty.BasicVacuumandLeakDetection?Vacuum!EvangelistaTorricelliBasicVacuumandLeakDetectionForceForceEqualizedBasicVacuumandLeakDetectionForceForceUnderPressure!BasicVacuumandLeakDetectionForceUnderVacuum!ForceForceBasicVacuumandLeakDetectionHowisavacuumproduced?BasicVacuumandLeakDetectionBasicVacuumandLeackDetectionVacuumPumpWorkChamberTypesofVacuumRoughVacuum(approx.759to1Torr)BasicVacuumandLeakDetectionTypesofVacuumHighVacuum(approx.1x10to1x10Torr)MediumVacuum(approx.1Torrto1x10Torr)BasicVacuumandLeakDetectionTypesofVacuumRoughtoMediumVacuum(approx.759to1x10Torr)UltrahighVacuum(Lessthan1x10Torr)HighVacuum(approx.1x10to1x10Torr)WHATISA"TORR"?BasicVacuumandLeakDetection76cm76cm=760mm760Torr(1mmofHg=1torr)1torr=1000milliTorr1millitorr=BasicVacuumandLeakDetection1x10TorrAtmosphericPressure(Standard)=PressureEquivalents0 psig(gaugepressure)14.7 poundspersquareinch(psia)29.92 inchesofHg760 mmofmercury760 torr760,000 milltorrormicrons101,325 pascal1.013 bar1013 millbarBasicVacuumandLeakDetectionRoughVacuum HighVacuum UltrahighVacuumWhereisVacuumUsedFoodprocessingEvaporationFreezedryingDistillationSputteringElectricalconductionTubeprocessingHeattreatingIntegratedcircuitmanufactureDecorativecoatingParticleaccelerationChemistryresearchE-beamweldingVapordepositionIonimplantationInsulation(thermal)SpaceresearchMaterialsresearchMetallurgyPhysicsresearchSurfaceanalysisMolecularbeamepitaxyBasicVacuumandLeakDetectionWhyaVacuum?OneWord:CLEAN!BasicVacuumandLeakDetectionWhatgasesarewetryingtoremove?Gas%byVolumeNitrogen 78.08Oxygen 20.08Argon 0.93CarbonDioxide 0.03Neon 0.0018Helium 0.0005Krypton 0.0001Hydrogen 0.00005Xenon 0.0000087BasicVacuumandLeakDetectionNote:WaterVaporis0.6to6%.BasicVacuumandLeakDetectionAGasesRFGeneratorBGasesBasicVacuumandLeakDetectionHOHOHOHOHOHOHOHOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOSiOBasicVacuumandLeakDetectionPlasmaGasFlowGasmoveslikeaafluidViscousFlow:Gasoccupyingaspaceat1x10torrormoreBasicVacuumandLeakDetectionVacuumPumpWorkChamber*ViscousFlow*BasicVacuumandLeakDetectionGasFlowMovementisunpredictable(random)MolecularFlow:MoleculesaresofarapartthattheynolongerhaveinfluenceoneachotherBasicVacuumandLeakDetectionVacuumPumpWorkChamber*MolecularFlow*BasicVacuumandLeakDetectionMeanFreePathDistanceincreasesasthepressuredecreases

TheaveragedistanceagasparticletravelsbeforestrikinganotherparticleBasicVacuumandLeakDetectionMeanFreePathMolecularDensityandMeanFreePath

7.6x10Torr(atm)3x10moleculespercm(30milliontrillion)2x10in.BasicVacuumandLeakDetectionMeanFreePath(cont.)MolecularDensityandMeanFreePath

1x10Torr4x10moleculespercm(40trillion)2in.BasicVacuumandLeakDetectionMeanFreePath(cont.)MolecularDensityandMeanFreePath

1x10Torr3x10moleculespercm(30million)30miBasicVacuumandLeakDetectionBasicVacuumandLeakDetectionVacuumGauges

VacuumGagesBasicVacuumandLeakDetectionListthecommonlyusedvacuumgaugesGivethepressurerangeinwhicheachofthesegaugesoperatesExplainhowthesesgagesworkDescribehowthesegagesaremaintainedBasicVacuumandLeakDetectionBOURDONGAUGEPIRANIGAUGECOLDCATHODEGAUGERESIDALNITROGENANALYZERIONIZATIONGAUGERESIDUALGASANALYZERCAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesBasicVacuumandLeakDetectionBOURDONGAUGETORR101010101010101010VacuumGaugesBasicVacuumandLeakDetectionVacuumGaugesBOURDONGAUGEBasicVacuumandLeakDetectionVacuumGaugesVACUUMBOURDONGAUGEBasicVacuumandLeakDetectionBOURDONGAUGECAPACITANCEMANOMETERTORR101010101010101010VacuumGaugesBasicVacuumandLeakDetectionVacuumGaugesBasicVacuumandLeakDetectionSENSORBODYANDDIAPHRAGMASSEMBLYELECTRODECONNECTIONSCAPACITORELECTRODEPPORTPRPORT(DIFFERENTIALONLY)VacuumGaugesBasicVacuumandLeakDetectionVacuumGaugesABSOLUTEEVACUATEDANDSEALEDDIFFERENTIALELECTRODESPRPXPPXPBasicVacuumandLeakDetectionDEMODULATORSENSORPREAMP15VSUPPLYAMPLIFIER(DC)AMPLIFIERS(AC)58VSUPPLYOSCILLATOR10kHz0-10VOUTPUTCONNECTOR0-10VVacuumGaugesBasicVacuumandLeakDetectionBOURDONGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesBasicVacuumandLeakDetectionVacuumGauges(+)(-)ControlUnitBasicVacuumandLeakDetectionVacuumGauges(+)(-)FILAMENTTHERMOCOUPLEMETERBasicVacuumandLeakDetectionBOURDONGAUGEPIRANIGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesBasicVacuumandLeakDetection(+)(-)FILAMENTVacuumGaugesBasicVacuumandLeakDetectionVacuumGaugesPOWERSUPPLYMCOMPENSATORTOSYSTEMREGULATESHEATTOTHELAMPSORRESISTORSBALANCESMETERTO0PATH1PATH2MBasicVacuumandLeakDetectionBOURDONGAUGEPIRANIGAUGEIONIZATIONGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesBasicVacuumandLeakDetectionVacuumGaugesBasicVacuumandLeakDetectionoooooooooooooooooo

oooooooooooooooooo

VacuumGaugesBasicVacuumandLeakDetectionBOURDONGAUGEPIRANIGAUGERESIDALNITROGENANALYZERIONIZATIONGAUGECAPACITANCEMANOMETERTHERMOCOUPLEGAUGETORR101010101010101010VacuumGaugesBasicVacuumandLeakDetectionVacuumGaugesBasicVacuumandLeakDetectionIONSOURCEQUADRUPOLEMASSFILTER(+)RF(-)RFCOLLECTORVacuumGaugesBasicVacuumandLeakDetectionVacuumGaugesBasicVacuumandLeakDetectionVacuumSystems

VacuumSystemsBasicVacuumandLeakDetectionEvaluatethemajortypesofvacuumsystemsDescribehowtobuildthemajortypesofoperatingsystemsDiscusstheproperstepstooperateavacuumsystemRecognizenormalandabnormaloperationofavacuumsystemBooster/BlowerSystemsHighPumpSpeedHighThroughputUpperLimit10torrLowOperatingCostModerateInitialCostSmalltoVeryLargeSizeNoOilSealingToleratesParticulates,Oxygen,EtchantsRequiresMechanicalPumpCriticalMechanicalToleranceBearingRequireCoolingandLubricationLowerlimit10torrNoisy

AdvantagesDisadvantagesBasicVacuumandLeakDetectionArNVentValveSlowPumpValveForelineValveRoughingPumpw/BoosterSealedDoorArNeedleValveUPCSealedDoor

VacuumSystems-6-5-7-8-6mtorr-4-5-7-8-6mtorrConvectronGageBasicVacuumandLeakDetectionHi-VacValve(GateType)ThrottleValveRoughingPumpw/BoosterSlowPumpValveNVentValveSealedDoormTorrProcessGasMassFlowController-6-5-7-8-6mtorr-4-5-7-8-6mtorrConvectronGage

VacuumSystemsManometerGageTurbomolecularPumpsSystemsFastRecoveryfrom“Dumping”FastStart-upConstantSpeedClean(noOil)LowOperatingCostHighThrouputSmalltoLargeSizeSensitivetoParticulatesRequiresMechanical(Roughing)PumpHighRPM(Noise/Vibration)LowSpeedforHydrogenandHeliumHighMaintenanceCostHighInitialCostAdvantagesDisadvantagesBasicVacuumandLeakDetection

VacuumSystemsTurboPumpHi-VacValve(GateType)ThrottleValveChamberRoughingValveRoughingPumpw/BoosterTurboPumpRoughingValveNVentValveSealedDoormTorrProcessGasMassFlowControllerManometerGage-6-5-7-8-6mtorr-4-5-7-8-6mtorrConvectronGageCryopumpSystemsHighSpeedVeryHighThroughputCleanLowOperatingCostContinuousMechanicalPumpingNotrequiredSmalltoLargeSizeRequiresRegenerationRequiresPeriodicMaintenanceRequiresUltrapureHeliumHydrogenCanBeExplosiveLowFrequencyVibrationSomeapplicationLimitsAdvantagesDisadvantagesBasicVacuumandLeakDetection

VacuumSystemsCyroPumpHi-VacValve(GateType)ThrottleValveChamberRoughingValveRoughingPumpw/BoosterCryoPumpRoughingValveNVentValveSealedDoormTorrConvectronGage-6-5-7-8-6mtorr-4-5-7-8-6mtorrConvectronGageCompressorRFGeneratorBasicVacuumandLeakDetectionLeakDetectionBasicVacuumandLeakDetectionTelloutgassingandvirtualleakproblemsfromrealleaksBefamiliarwiththesizeofleaksthataffectvacuumsystemandproductlifeIdentifytheprinciplemethodsofleakdetectionBasicLeakDetectionBasicVacuumandLeakDetectionChemicalProcessEquipment 10stdcc/sec—1cc/10secTorqueConverter 10stdcc/sec—3cc/hourBeverageCanEnd 10stdcc/sec—1cc/dayVacuumProcessSystem 10stdcc/sec—1cc/2weeksICPackage 10stdcc/sec—3cc/yearPacemaker 10stdcc/sec—1cc/30yearsProductorsystemVacuumProcessSystem 10stdcc/sec—1cc/2weeks

Basic

LeakDetectionBasicVacuumandLeakDetection3/8IN.3/8IN.3/8IN.1CubicCentimeterBasicVacuumandLeakDetection10stdcc/sec—1cc/10sec10stdcc/sec—3cc/hour10stdcc/sec—1cc/day10stdcc/sec—1cc/2weeks10stdcc/sec—3cc/year10stdcc/sec—1cc/30yearsLeakRates

Basic

LeakDetectionBasicVacuumandLeakDetection"RealLeak""VirtualLeak"

Basic

LeakDetectionOutgassing"VirtualLeak"VacuumSideTrappedVolume"VirtualLeak"AtmosphereSideVacuumSideO-RingsTrappedVolume"VirtualLeak"HO"Kinda,SortaVirtualLeak"O-ringfailure"RealLeak"BasicVacuumandLeakDetectionNUMBEROFLEAKS