微專業(yè)---半導(dǎo)體制造技術(shù)課程：半導(dǎo)體工程專業(yè)英語ContentsSemiconductorProperties半導(dǎo)體特性01SemiconductorMaterials半導(dǎo)體材料02SemiconductorDeviceandHowTheyareUsed半導(dǎo)體器件及其使用03ProcessTechnology工藝技術(shù)04FabricationProcesses制造工藝05SemiconductorMaterialsandProcessCharacterization半導(dǎo)體材料與工藝表征06ProcessTechnology4.1SubstratesfromtheProcessPerspective4.2Liquid-Phase(Wet)Processes4.3Gas-Phase(Dry)Processes4.4ProcessesinSemiconductorManufacturing4.5ContaminationControl4.6ProcessIntegration0416Introduction

Innoothertechnicaldomaincontaminationoftheproductionenvironment,

includingtoolsandmediaused,hassuchaprofoundadverseeffectonthe

manufacturingyieldandproductperformanceasinsemiconductordevice

fabrication./

do??me?n/領(lǐng)域4.5ContaminationControl4ProcessTechnology/pr??fa?nd/深遠的17Particles

Thecontaminantswhichhaveanunquestionableadverseeffect

acrossallsemiconductorprocesstechnologiesareparticlesandparticulates

(groupsofparticles)adsorbedatthesurfaceofthesubstratesbeingprocessed.Organiccontaminants

Organicsarecompoundsofcarbonwithother

elementsmostoftenwithhydrogen.Insomesituation,anaccumulationoforganiccontaminantsadsorbedontheprocessedsurfacemayleadtoprocessmalfunction.MetalliccontaminantsThesourcesofmetalliccontaminationinsemiconductorprocessingincludeprimarilyliquidprocesschemicalsandwater.4ProcessTechnology4.5.1

ContaminantsText/?m?l?f??k?(?)n/故障/?d?v??rs/有害的4.5ContaminationControl18

Consideringsensitivityofsemiconductormaterialsanddevicestocontamination,anultra-cleanprocessenvironmentneedstobeassuredinorderto

accomplisheconomicallyviablemanufacturingyield.Theconceptof“clean

environment”encompassesbothmedia(gases,chemicals,water),aswellas

facilitiesinwhichsemiconductormanufacturingistakingplace.4ProcessTechnology4.5.2

CleanenvironmentText/?va??b(?)l/可行的4.5ContaminationCon