1、a,1,centrotherm擴散爐設備培訓 equipment training of centrotherm Diffusion furnace,a,2,Centrotherm擴散爐的組成,ALoading box 推舟部分 B. TGA 有毒氣體排放 C. Heating furnace 加熱部分 D. Gas cabinet 氣柜,a,3,設備 平面結(jié)構(gòu)Equipment plane structure,1、CMI電腦 2、Loading box上料箱 3、Toxic gases 有毒氣體排放 4、Furnace 爐體 5、Gas box 氣源柜,a,4,Loading box上料箱,

2、Baddle head 舟頭,Loading wafer 加栽的硅片,a,5,Loading box上料箱,Mechanical arm 機械臂,a,6,Loading box 上料箱,Storage rack 1，2 存儲位1、2,Paddle bearing, adjustable paddle position 碳化硅槳支座，調(diào)節(jié)槳位置,a,7,TGA有毒氣體排放,quartz door 石英門,Door cylinder爐門氣缸,a,8,Heating furnace爐膛,1、CMS module 3、Power connection cover 2、Thermocouple conn

3、ection 4、Temperature sensor module,a,9,Gas cabinet氣源柜,1、 Flow meter 氣體流量計 2、 Pneumatic valve 氣動閥,1,2,a,10,Cooling water inlet and water system冷卻水系統(tǒng),Cooling to the top of the furnace body and furnace 對爐膛頂部和爐體進行冷卻,a,11,Thermostatic bath恒溫槽,On the POCL3 constant temperature process, normal temperature

4、20 degrees 對POCL3進行恒溫作用，正常工藝溫度20度,a,12,Silicon carbide paddle碳化硅槳,Bearing quartz and silicon, and out of the carrier ship 承載石英舟和硅片 石英舟進出的載體,a,13,Range detection alarm 范圍檢測報警器,Detection of a range of whether object, avoid hit boat phenomenon, this range can be adjusted 檢測某個范圍內(nèi)是否有物體，避免出現(xiàn)撞舟現(xiàn)象，些范圍可進行調(diào)節(jié),

5、a,14,Communication Network Overview通信網(wǎng)絡總覽,a,15,Heating system加熱系統(tǒng),a,16,Cooling system冷卻系統(tǒng),1、Heat exchanger 2、Cooling 3、Shutoff valve,1、Cooling 4、Heat exchanger 2、The main fan 5、Electronic devices 3、Cooling the air passage,a,17,Alarm lamp information,a,18,Operation panel操作面板,operation panel 4 keyboar

6、d Touch screen 5 touch screen button USB socket,a,19,Operation panel操作面板,The equipment has the following button Stop action -All the mechanical action of loading box are stop Loading box lighting-openclose the lamp of the loading box Autohand manual switch-Loading and unloading of the operating syst

7、em can manual operation in an open feeding box 4 Allows to unlock- Press this button ,to unlock the car,a,20,Operation panel操作面板,1 pushbutton ABC keyboard call 4 pushbutton right mouse button Pushbutton task change 5 pushbutton shift Pushbutton brightness ABC keyboard call-calls upclosses the keyboa

8、rd on the touchscreen, keyboard entries can be carried out directly on the touchsceen. Pushbutton task change-changes a task windows Pushbutton brightness-press this button together with the shife button to increase the brightness of the touchscress. Pushbutton right mouse buttonopens right mouse bu

9、tton context menu,press this button together with the shift button to reduce the touchscreen. Pushbutton shiftcalls up the second keyboard level,push this bushbutton together with the required function button.,a,21,CMI interface CMI桌面信息,System name 7 alarm close Date time 8 notes Centrotherm logo an

10、d system 9 additional information Information button Current display area in the 10 system mode Information field 11 connection state with CECGEM System status Loginlogout button,a,22,CMI interface CMI桌面信息,Jobs 4 setup System 5 alarms Datslog 6 help(online help),a,23,The CMI user interface CMI使用者桌面,

11、Title bar 3 navigation bar Command bar 4 information field with variable field areas,a,24,簡單介紹CESAR界面 A brief introduction to CESAR interface,上圖是CESAR的界面：1.系統(tǒng)工藝狀態(tài) 2.工藝時間狀態(tài) 3.時間日期 4.氣體流量狀態(tài) 5.系統(tǒng)準備狀態(tài) 6. 溫度檢測顯示 This is a CESAR interface： 1. System process 2. Process time 3. Time and date 4. Gas flow sta

12、te 5. System readiness 6. Temperature detection and display,a,25,CT操作注意事項 CT operation matters needing attention,1.SLS處于“UP”位置時，管內(nèi)有舟時不可手動進槳 SLS in the UP position, the inner tube has a boat can not be manually into the paddle. 2.SLS處于“DOWN”位置時，槳上有舟時不得手動進舟。 SLS in the DOWN position, the paddle is not

13、 manually into the boat boat. 3.槳上有舟時，舟不在正確位置，不準切換到自動運行模式。 Oars on a boat, the boat is not in the correct position, are not allowed to switch to automatic running mode.,a,26,CT操作注意事項 CT operation matters needing attention,4.進舟、退舟失敗報警時，一定要檢查舟的位置 是否在合理的位置，才可以對報警進行復位，自動/手動的切換要謹慎，若舟不在正確位置，請手動移至正確位置后再對報警

14、進行復位（爐門以槳的位置作為開閉標準） Into the boat, boat back failure alarm, be sure to check the boat position is in a reasonable position, can alarm reset, automatic / manual switch must be careful, if the ship is not in the correct position, please manually moved to the correct position after the alarm reset ( do

15、or to paddle position as opening and closing standard ),a,27,5.舟位于存儲架（storage2,3）時，一定要確認存儲架上 的感應器有沒有感應到，否則有可能導致撞舟。 When the boat is located on the storage rack (storage2, 3),make sure that the storage rack sensor is sensed, otherwise may cause the bumped boat. 6.從手動切換自動時，Grip一定要在Middle位置， 否則機械臂可能因無法

16、正常運行而報警。 From manual automatic, Grip must be in the Middle position, or mechanical arm may be due to normal operation and alarm.,a,28,7.進舟后，工藝無法運行，先確認舟在槳上的位置，以及 Tube=ready SLS=UP TGA=YES 然后進行操作。 In the boat, technology cannot run, make sure the boat on the oar position, as well as Tube = ready SLS =

17、 UP TGA = YES then operation.,8.機械臂運動時不要上料，以免上料時抖動機械臂撞到舟。,As mechanical arm movement not feeding,in order to avoid feeding time jitter mechanical arm hit the boat。,9.單一爐管有故障時，應該及時瑣閉并降溫，以節(jié)約能源。,Single tube has fault, should be timely and closed and cooling, in order to save energy.,a,29,常見故障,1. Proces

18、s recipe has terminated with error state AC 進行中的工藝以錯誤狀態(tài)結(jié) 束警報確認 To store 儲存 To store enable unload 儲存并缷下 Restart recipe 重新開始工藝 A用于選錯工藝號，手動結(jié)束工藝， 重新開始新的其他工藝時進行選擇 B多數(shù)情況下選擇此項 C工藝中斷需要重新進行時選擇，但不建議使用， 建議選擇（B） Process recipe has terminated with error state AC Ongoing process to end the error status Alarm con

19、firmation To store To store enable unload Restart recipe A Used the wrong process number ， Hand end of the process ， Start a new choice when other processes B In most cases, choice this one C Interrupts need to re-process the selection, but not recommended, recommended to choose (B) 。,a,30,Boat alre

20、ady in tube- Select:Process=0. Unload=1(.) 選擇0或1 說明：當管內(nèi)有舟存在時，異常排除 后手動運行工藝時會出現(xiàn)此提示 Boat already in tube- Select:Process=0. Unload=1(.) Description: When the tube has a boat there, the exception rule out runningprocess manually after this prompt will appear.,a,31,Lost homing check poti 失去引導，檢 查位置（一般此警報

21、會自動解除） 說明：此警報會自動解除，但需要 檢查一下槳是否在原點位置即可 Lost homing check poti Check the location (usually the alarm will be automatically lifted) Description: This alarm will be automatically lifted, but need Check whether the origin location to paddle,a,32,4. Recipe abort 2-process abort to continue : enter AB 工藝退出

22、運行終止！繼續(xù)，請輸入AB 說明：對工藝異常結(jié)束的手動確認，然后就會出現(xiàn)報警 Recipe abort 2-process abort to continue : enter AB Description: The manual confirmation process ends, 5. Recipe couldnt be started please check protocol for reason! 工藝不能運行，請檢查原因 Recipe couldnt be started please check protocol for reason!,a,33,. 6. Boat sensor

23、of grad has changed without permission 機械手上的傳感器被非允許的改動 說明：機械臂在上下移動的時候，前后不能移動， 若前后位置發(fā)生移動機械將被鎖定，出現(xiàn)報警， 此報警需設備人員的密碼登陸在Handing 對話框中的Tech模式下進行復位 Boat sensor of grad has changed without permission Description: The robotic arm to move up and down when you can notmove around,if the location is moved around t

24、he machine will be locked, an alarm, the alarmequipment, personnel need to log in a password dialog box in the Tech Handingreset mode,a,34,7.There is already an active recipe 工藝名 from local tisting 已有工藝在此管的工藝列表中 說明：這兩個報警經(jīng)常出現(xiàn)，若能夠確認此管未有 工藝在運行，就必須將此管重新啟動， 如果有工藝運行，可以將工藝手動停止， 或者等待工藝結(jié)束。 There is already an active recipe from lo