本科生畢業(yè)設計（論文）翻譯資料中文題目：以微型機器人為基礎的自動化顯微操作裝置為微系統(tǒng)裝配英文題目：Amicrobot-basedautomatedmicromanipulationstationforassemblyofmicrosystems1Amicrorobot-basedautomatedmicromanipulationstationforassemblyofmicrosystemsSergejFatikowMirkoBenzAbstract：Thedevelopmentofnewtypesofminiaturizedandmicrorobotswithhuman-likecapabilitiesplayanimportantroleindifferentapplicationtasks.Oneofthemainproblemofpresent-dayresearchis,forexample,toassembleawholemicrosystemfromdifferentmicrocomponents.Thispaperpresentsanautomatedmicromanipulationdesktopstationincludingapiezoelectricallydrivenmicrorobotplacedonthehighly-precisexystageofalightmicroscope,aCCD-cameraasalocalsensorsubsystem,alasersensorunitasaglobalsensorsubsystem,andaPentiumPCequippedadditionallywithanopticalgrabber.Themicrorobothasthreepiezoelectricallydrivenlegsandtwoautonomousmanipulatorsasendeffectors；itcanperformhighly-precisemanipulations（withanaccuracyofupto10nm）andanondestructivetransport（ataspeedofseveralmm/s）ofverysmallobjectsunderamicroscope.Toperformmanipulationsautomatically,acontrolsystem,includingataskplanninglevelandareal-timeexecutionlevel,isbeingdeveloped.（C）1998ElsevierScienceB.V.Allrightsreserved.Keywords：Microrobots；Microassembly；Automateddesktopstation；Assemblyplanning；Piezoactuators1.Introduction：Thereisagrowingneedforminiaturizedandmicrorobotsworldwide.Duetotheenormousbreakthroughsinconventionalroboticsandinthemicrosystemtechnology(MST),everyoneisconvincedthatthedevelopmentofremote-controlledorautonomousmicrorobotswillleadtoimprovementsinmanyareas.Aboveall,positiveresultsareexpectedinmedicine(microsurgery),manufacturing(microassembly,inspectionandmaintenance),biology(manipulationofcells)andtesting/measuringtechnique(VLSI).Medicineisoneoftheapplicationfieldswhichwouldprofitbythemicroroboticsthemost.Theattentionliesonartificialorgans(prosthetics),laparoscopy,implantabledrugdeliverysystems(diagnosisandtherapysystems),telemicrosurgery,etc.Theminimal-invasivesurgerydevelopedintoanimportantfieldofmedicineduringthelastyears.Smallerandmoreflexibleactiveendoscopesareneededinordertoreplacehumanhands,respondtoouterincidents,penetrateintoabodyoravesselthroughnaturalbodilyorificeorasmallincisionby2remotecontrol,wheretheyperformcomplexin-situmeasurementsandmanipulations.Inordertomeettheserequirements,microprocessors,severalsensorsandactuators,alightsourceandpossiblyanimageprocessingunitshouldbeintegratedintoanintelligentendoscope.Biotechnologyrequiresspecialmicrostructuredactivetoolswhichareabletoperformmicromanipulationslikethesortingorreunionofcellsortheinjectionofaforeignbodyintoacellunderamicroscope.Inthegeneresearchandtheenvironmenttechnique（cellsasindicatorsforharmfulsubstances）,preciseandgentlemanipulationofsinglecellsarealsorequired.Industryandespeciallymanufacturingandmeasuringtechniquesneedhighlysensitivetestingmethodsinthem-range.Animportanttaskrepresents,forexample,theinspectionofwafers,whereseveralcheckpointshavetobecontactedbyatemperatureorvoltageprobe.Thesameisvalidforinspectionrobotswhichareusedininaccessibleordangerousterraininordertodetectleaksorflawsandmakerepairs（e.g.,inpipelines）。TheadoptionofMST-relateddevelopmentsbytheindustryhasalreadydemonstratedwhichkindofproblemsoccurwiththemassproductionofmicrosystems.Thesesystemsusuallyconsistofmicrocomponentsofdifferentmaterialswhichareproducedwithvariousmicrotechniques；thisleadstooneorseveralverypreciseassemblystep（s）oftheindividualcomponents.Theassemblyofmicrosystems,i.e.,thenon-destructibletransport,precisemanipulationorexactpositioningofmicrocomponentsisbecomingoneofthemostimportantapplicationsinmicrorobotics.2.Manipulationofmicroobjects：Theavailabilityofhighlypreciseassemblyprocesseswillmakeiteasiertoeconomicallyrealizeoperablemicrosystems.Inordertoefficientlyproducemicrosystemsandcomponentsinlotsizesorbymass-productiontechniques,itisabsolutelynecessarytointroduceflexible,automated,preciseandfastmicroassemblystations.Differentconceptsarebeingfollowedtodomicromanipulationforparticularclassesofapplication.Purelymanualmicromanipulationisthemostoftenusedmethodtoday.Inmedicineandbiologicalresearch,itisusedexclusively.Eveninindustry,microassemblytasksareveryoftencarriedoutbyspeciallytrainedtechnicians,who,forexample,prepositionassemblypartsusingscrewsandsprings,thenpositionthepartswithtinyhammersandtweezers,andfinallyfastentheminthedesiredposition.However,withincreasingcomponentminiaturization,thetolerancesbecomesmallerandsmaller,andthecapabilitiesofthehumanhandarenolongeradequate.3Theapplicationofpartiallyautomaticmicromanipulationsystemsofconventionalsize,whichareteleoperated；thereby,thehandmotionsofthehumanoperatoraretranslatedintofiner3Dmotionsforthemanipulatorsofthemanipulationsystembymeansofajoystickormouse.Here,thedexterityofthehumanhandissupportedbysophisticatedtechniques.However,thefundamentalproblemoftheresolutionofthefinemotionandofthespeedremain,sincethemotionofthetoolisadirectimitationofthatoftheoperatorshand.TheuseofautomatedmultifunctionalmicromanipulationdesktopstationssupportedbyminiaturizedflexiblerobotswhichemployMST-specificdirect-driveprinciples.Theserobotscouldbemobileandareableperformmanipulationsindifferentworkareas.Thetransportandmicromanipulationunitsperformingtheassemblymaybeintegratedontoonechip.Asopposedtotheaforementionedmicromanipulationtechnique,thereisnodirectconnectionbetweentheoperatorshandsandtherobot.Theassemblystepsmaybecarriedoutwiththehelpofclosedloopcontrolalgorithms.Thehumanassignsalltaskstominiaturizedassemblymechanismsand,bydoingso,triestocompensateforhislimitedmicromanipulationcapabilities.Manymicrorobotscanbeactiveatthesametimeinadesktopstation.Theuseofmanyflexiblenanorobotsystemswhichsolvethemanipulationtasksinclosecooperation.Here,therobotsizeiscomparabletothatofthemanipulatedobject.Thisconceptcouldbebasedonthehumanbehavior,butitsrealizationliesinthedistantfuture.Ingeneral,manipulationsvaryfromanapplicationtoanother.However,approximatelythesameoperationsequencesareusedineverycase.Theyare:grip,transport,position,release,adjust,fixinplaceandprocessingstepslikecutting,soldering,gluing,removalofimpurities,etc.Inordertobeabletocarryouttheseoperations,correspondingtoolsareneeded,suchasmicroknives,microneedlestoaffixobjects,microdosingjetsforgluing,microlaserdevicesforsoldering,weldingorcutting,differ