ESDBestPracticalSharingTITLQRA12IndexESDHistoryDefinitionofESDMaterialReduceESDDamagedMethodologyESDChecklist3~1314~1718~4647~52Page2ReminderthatESDisaseriousproblemintheentireelectronicsindustry.

提醒所有員工“靜電”對(duì)IC材料的破壞是一個(gè)非常嚴(yán)重的問題,它是整個(gè)半導(dǎo)體所面臨的一項(xiàng)挑戰(zhàn).WhyDoWeNeedESDTraining?為何需要此ESD訓(xùn)練課程?Itisbelievedthat25%ofallcomponentfailures

arearesultofESD.

相信有大約25%的IC材料是因靜電(ESD)的影響而遭破壞33ElectricalOverStress(EOS)-Theexposureofanitemtoa

currentorvoltagebeyonditsmaximumratings.

EOS-指一個(gè)IC材料受到超過其所能負(fù)荷的電壓,電流而遭受到破壞

的狀態(tài)Definitions

定義ElectrostaticDischarge(ESD)-Thetransferofelectrostatic

chargebetweenbodiesorsurfacesatdifferentelectrostatic

potential.ESDisasubsetofEOS.

ESD-即靜電放電之意.指不同電位的二個(gè)物體之間產(chǎn)生的電荷急驟流

動(dòng)的現(xiàn)象.44ConductorsvsInsulators帶靜電的絶緣體

ChargedInsulator帶靜電的導(dǎo)體

ChargedConductorConductorevenlydistributeschargeoverentiresurface

平均分佈於整個(gè)表面Oppositepolaritychargescanexistonthesameinsulator.

不同極性的電荷會(huì)同時(shí)存在絶緣體上Conductorcompletely

dischargeswhengrounded.Insulatoarsdonotallowchargetoflow.

Groundinganinsulatorneitherremoves

chargeorpreventssurfacecharges.5IC++++++++++++IC--++++++----ICIC------5

Staticelectricityhasbeenacuriosityformany

hundredsofyears.HistoryToday,specialprecautionsaretakenbyindustrieswhere

staticsparkscouldcauseanexplosion,e.g..,flour

mills,hospitaloperatingrooms,etc..

在今天,靜電所產(chǎn)生的破壞已引起工業(yè)界的注意.例如:麵粉廠的

塵爆,院的手術(shù)過程,IC製造工業(yè)等..AftertheinventionofgunpowderbytheChinese,it

wasnolongeracuriosityforanyonemanufacturing

thatproduct.

靜電現(xiàn)象一直存在於人類歷史中,以前則被認(rèn)為是一種奇特的異象66Strangefailuresoccurred,andthecauseofthe

problemwasnoteasilyseenwiththeoptical

microscopes-failureanalysisread:cause

unknown.

靜電造成一些奇特而不易察覺的破壞,F/A分析的結(jié)論往往是:原因

不明.

EOS/ESDisperhapsthemostsignificant

failuremechanismintheelectronicsindustry

today.

EOS/ESD對(duì)半導(dǎo)體之元件的破壞,可能是當(dāng)今半導(dǎo)體界最頭痛,也

是最嚴(yán)重的一個(gè)問題.History77FundamentalsofStatic-Tribocharging

磨擦產(chǎn)生靜電Thissituationoccurswhenoneorbothofthematerialsareinsulators.

但這種情況為發(fā)生在其中一種物質(zhì)為絕緣體Whenevertwodissimilarmaterialsmakecontactandthenareseparated,astaticchargeiscreated.

二種不同性質(zhì)的物質(zhì)碰在一起再分離也會(huì)產(chǎn)生靜電.88TriboelectricSeriesFactorstoconsider:Humidity:濕度Speedofseparation:分離速度Typeofmaterial:材料性質(zhì)Contactarea:接觸面積IncreasingPositiveAir:空氣HumanHand:手RabbitFur:兔毛Glass:玻璃Mica:humanhair:頭髮Nylon:尼龍Wool:毛Silk:絲Aluminum:錫Paper:紙Cotton:棉Steel:銅鐵Wood:木頭Amber:HardRubber:橡膠Nickel,Copper,Brass,SilverPolyester:聚醋棉PolyethylenePolypropylene:軟片PVC(Vinyl)IncreasingNegative99靜電放電的模型Human-BodyModel,HBM)人體放電模型MachineModel,MM)機(jī)器放電模型Charged–DeviceModel,CDM)元件充電模型模擬由個(gè)人之手指尖端放電至元件的現(xiàn)像GroundedSurface10HBM波波形形C=100PFR=1.5KStandard資料料來來源源:工工研研院院電電子子所所11自動(dòng)動(dòng)組組裝裝之之製製造造環(huán)環(huán)境境ESD模模型型電感感I(A)Time(ns)MM12CDMEvent的的來來源源CDM測(cè)試試機(jī)機(jī)臺(tái)臺(tái)自動(dòng)動(dòng)插插件件IC的的包包裝裝(Tube)13Definition定義義(1)1.Conductivematerial-ESDprotectivematerialhavingasurfaceresistivitylessthan1xE5ohms/squareoravolumeresistivitylessthan1x10E4ohm-cm.導(dǎo)體體-ESD保保護(hù)護(hù)物物質(zhì)質(zhì)其其表表面面電電阻阻系系數(shù)數(shù)小小於於1x10E5歐姆姆/單單位位面面積積或或容容積積電電阻阻係係數(shù)數(shù)小小於於1x10E4歐歐姆姆-公分分者者.14Staticdissipativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E5ohms/squareor1x10E4ohm-cmvolumeresistivity,butlessthan1x10E12ohm/squaresurfaceresistivityor1x10E11ohm-cmvolumeresistivity.靜電電傳傳導(dǎo)導(dǎo)物物質(zhì)質(zhì)-表表面面電電阻阻系系數(shù)數(shù)介介於於1x10E5與與1x10E12歐歐姆姆/單單位位面面積積,或或容容積積電電阻阻係係數(shù)數(shù)介介於於1x10E4與與1x10E11歐歐姆姆-公公分分者者.Definition定義義(2)153.Insulativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E12ohms/squareor1x10E11ohm-cmvolumeresistivity.絕緣緣物物質(zhì)質(zhì)-物物質(zhì)質(zhì)它它的的表表面面電電阻阻係係數(shù)數(shù)大大於於1x10E12歐歐姆/單單位位面面積積或或容容積積電電阻阻係係數(shù)數(shù)大大於於1x10E11歐歐姆姆-公公分者者.Definition定義義(3)16InsutaticMaterial-Materialthatminimizesthegenerationofstaticchargelessthan+/-200(TCP100V)voltswhenrubbedagainstitself,orwhenseparatedfromitselforothersimilarmaterials.抗靜電物質(zhì)-物質(zhì)若若經(jīng)自己相互互磨擦或相互互分開或與其其它類似物質(zhì)質(zhì)分開時(shí)不產(chǎn)產(chǎn)生大於+/-200(TCP100V)伏特的靜靜電壓者.Definition定義(4)17SafetyArea

安全區(qū)域域Theoperationwhereallleadsareatcommonvoltagepotential.(Wiresarebondedandtiebarisnotseparatedsuchassealing,molding,PMIandsoon.)材料所有的腳腳都在等電位位.(已已接線,且且腳尚未分離離.如過爐,壓模,壓壓模前檢查查等區(qū)域).18Equipment設(shè)設(shè)備a)ElectrostaticVoltmeters/fieldmeters:靜電表表b)DigitalOHMMeter:數(shù)位位歐姆表c)AirIonizer:離子風(fēng)風(fēng)扇d)WriststraporFootStrap(Optional):靜電手手環(huán)或腳環(huán)e)ConductiveBag&AntistaticMagazine:導(dǎo)電袋袋及抗靜電管管f)CautionLabel:提提醒標(biāo)籤g)Anti-StaticVoidFiller:抗抗靜電泡墊h)DissipativeTable/FloorMAT(Optional):靜靜電地氈或桌桌墊i)Esdprotectedworkstation:無靜電電工作桌j)CautionSign:提醒醒看板k)ESDProtectiveShoesTester:靜靜電鞋鞋測(cè)試試器19DigitalOHMMeter數(shù)數(shù)位位歐姆姆表Shallbecapableofmeasuringadcresistanceof0.1ohmthrough1megohm+/-10%withanopencircuitvoltagegreaterthan1.5V.三用電電錶或或直流流電阻阻表應(yīng)應(yīng)可量量測(cè)0.1歐歐姆姆到1M歐歐姆姆+/-10%範(fàn)範(fàn)圍的的電阻阻,且且開路路電壓壓應(yīng)大大於於1.5V以以上上.20AirIonizer離離子子風(fēng)扇扇(1)Thedevicesatworkstationmustbewithin4feetmaximumaremeasuredbyverticallinefromthefaceoftheionizersandaround45degreesoneachsideofthisline.switchedonandproperlydirectedacrosstheworksurface.工作時(shí)時(shí)必須須置於於距離離離子子風(fēng)扇扇4英英尺圓圓弧內(nèi)內(nèi),兩兩邊邊各近近似45度度角範(fàn)範(fàn)圍內(nèi)內(nèi).且且方向向正對(duì)對(duì)著工工作區(qū)區(qū)域任任何何靜電電敏感感的材材料放放於工工作臺(tái)臺(tái)之前前,必必須須把離離子風(fēng)風(fēng)扇先先打開開,而而且中中途不不可關(guān)關(guān)掉.211.IonizerBalance<+/-35V餘額額電電壓壓離離子子風(fēng)風(fēng)扇扇的的餘餘額額=30cm,<5min.小小於於+/-35V2.Ionizerchargedecaytime.來量量測(cè)測(cè)離離子子風(fēng)風(fēng)扇扇的的放放電電衰衰退退程程度度.<20sec,=30cm,1000Vreduceto100V3.Bluetapewillputunderionizerstreamaround5sec.thenputwaferonit.膠布布撕撕下下後後，，在在離離子子風(fēng)風(fēng)扇扇下下大大約約吹吹5秒秒鐘鐘,方方可可將將晶晶片片置置於於其上上AirIonizer離離子子風(fēng)風(fēng)扇扇(2)22WriststraporFootStrap(Optional)靜靜電電手手環(huán)環(huán)或或腳腳環(huán)環(huán)(1)Wriststrapconnectedtodissipativeorconductivetabletopthroughanintegral1Mohm+/-10%resistorshouldbewornbyoperators.Thiswayresultinthewriststrapbeing2Mohm+/-10%groundandisacceptable.靜電環(huán)環(huán)必須須有1M歐歐姆姆+/-10%的的電阻阻連接接到導(dǎo)導(dǎo)電或或靜電電傳導(dǎo)導(dǎo)的工工作桌桌面.若若因此此使得得靜電電環(huán)與與接地地間形形成2M歐歐姆姆+/-10%之之電阻阻是可可接受受的。。23Theworkingresistorofwriststripmustbecheckedshiftilyasfollowingpath,fromtheuser'shand,throughtheuser'sbody,thebody-to-strapcontact,theintegralresistor,thestrapwire,tothestrapgroundconnector.Anditshouldbeduring500k-10MEGAOHMS,recordisrequired.靜電環(huán)環(huán)的工工作電電阻必必須以以如下下的迴迴路每每班檢檢驗(yàn)並並做記記錄,而其其阻抗抗值需需介介於:或或500k到到10MEGA歐歐姆姆.迴路帶帶者的的手帶帶者的的身體體身身體體與手手環(huán)接接觸點(diǎn)點(diǎn)1M+/-10%歐姆的的靜電電環(huán)內(nèi)內(nèi)含電電阻手手環(huán)連連接線線接接地地點(diǎn)歐姆計(jì)計(jì)WriststraporFootStrap(Optional)靜靜電手手環(huán)或或腳環(huán)環(huán)(1)24ConductiveBag&AntistaticMagazine導(dǎo)導(dǎo)電電袋及及抗靜靜電管管(1)1.AllESDSdevicesshallbepackedinESDprotectivepackagingwhennotatanESDprotectedareaorwork-station.當(dāng)不在在靜電電防護(hù)護(hù)區(qū)域域或工工作站站時(shí)所所有的的靜電電敏感感材料料必須須裝在靜電電防護(hù)護(hù)包裝裝之內(nèi)內(nèi).2.Conductivemagazine,bagorcontainerwhichFaradaycagecontainersimulatedwillbeusedforalldevicetransportationandstorage.材料在在貯存存或運(yùn)運(yùn)送中中必須須以導(dǎo)導(dǎo)電管管子,袋子子或?qū)?dǎo)電容容器等等法拉第容容器包包裝.253.Tubewillbeanti-staticorconductive.管子要要用抗抗靜電電或?qū)?dǎo)電的的材質(zhì)質(zhì)．There-cycleperiodforanti-statictubeusedonlineshouldnotexceedoneyear.線上用用做循循環(huán)使使用之之管子子，使使用期期限不不得超超過一一年。。ConductiveBag&AntistaticMagazine導(dǎo)導(dǎo)電電袋及及抗靜靜電管管(2)26CautionLabel提提醒標(biāo)標(biāo)籤AyellowESDcautionlabelshallbeattachednoconductivebagandonesideofpackingbox.黃色的的ESD警警告告標(biāo)誌誌必須須貼在在導(dǎo)電電袋及及包裝裝箱上上.2.EachESDprotectivepackageshallhaveacontrastingESDcautionlabel.Thecautionlabelshallbelegibletonormalvisionatadistanceofthreefeet.每件靜靜電防防護(hù)包包裝物物必須須有明明顯的的靜電電警告告標(biāo)籤籤.這這靜電電警告告標(biāo)籤籤必須須能在在三英英尺外外以正正常目目視可可辨識(shí)識(shí)出.27Anti-StaticVoidFiller抗抗靜靜電泡泡墊PackingandfillermaterialsforESDsdevicesshallnotturboelectricchargetogreaterthan+/-200(TCP100V)voltsundernormal/intendeduse.靜電敏敏感材材料的的包裝裝及填填充物物當(dāng)使使用時(shí)時(shí)不得得因摩摩擦而而產(chǎn)生生大於於+/-200(TCP100V)伏伏特特之靜靜電壓壓.28DissipativeTable/FloorMAT(Optional)靜靜電電地氈氈或桌桌墊(1)1.ESDprotectivestatic>/=10E5to<10E9ohmdissipativeworksurfacetoESDgroundresistance.靜電防防護(hù)傳傳導(dǎo)物物表面面至靜靜電接接地之之電阻阻等於於或大大於10E5歐姆姆到10E9歐歐姆Therecommendedlowerlimitis10E5ohm.Howeveralowervaluemaybeusediflocalsafetyrequirementscanstillbemet.建議最低低的阻抗抗值是10E5歐姆姆.但但是如果果能夠符符合當(dāng)?shù)匕踩髣t低低於此建建議值的的阻抗可可以採用用.29Electrodes--Twocylindrical2.27kg(5pound)electrodeswithadiameterof63.5mm(2.5inches)eachhavingcontactsofelectricallyconductivematerialwithaShore-A(IRHD)udometerhardnessof50-70.Theresistancebetweenthetwoelectrodesshouldbelessthan1kilohmwhenmeasuredat10Vorlessonametallicsurface.電極-兩兩個(gè)重約約2.27公公斤(5磅磅),直直徑6.35公分分(2.5英英吋)的的圓柱柱型電極極,每每個(gè)都要要有硬度度在(IRHD)50-70間間的導(dǎo)導(dǎo)電物相相接觸.兩個(gè)個(gè)電極間間的電阻阻在金屬屬表面及及10伏伏特或或更低的的量測(cè)電電壓下時(shí)時(shí)不得大大於1k歐歐姆.DissipativeTable/FloorMAT(Optional)靜靜電地氈氈或桌墊墊(2)30Cleanelectrodewithaclean,low-liningcloth.orusingaminimumof70%isopodan-watertocleanit.Allowelectrodetoairdry.使用清潔潔且不會(huì)會(huì)脫纖維維的布料料來清潔潔電極.或用至至少含有有70%的異異丙醇水溶液液來清潔潔電極,並讓電電極在空空氣中乾乾燥.ConnectoneleadofthemetertoESDground,andtheotherleadtotheelectrode.Placeelectrodeonthesurfaceofthematerialbeingtested.Applytestvoltageandrecordtheresistanceafterthemeasurementhasstabilizedorafter15secondshaselapsed.Removetestvoltageandremoveelectrodefromsurface.連結(jié)儀表的一一端到接地點(diǎn)點(diǎn),另一端到到電極.將將電極置於待待量測(cè)物體表表面相距至少3英英尺.輸輸入測(cè)試電壓壓並在量度穩(wěn)穩(wěn)定或15秒後記錄阻阻抗值.停止測(cè)試電壓壓且將電極也也移開.DissipativeTable/FloorMAT(Optional)

靜電電地氈或桌墊墊(3)31PerformaminimumoffivetestspercontiguousFloorsurfacematerialoraminimumoffivetestsper5,000Squarefeetoffloormaterial,whicheverisgreater.AMinimumofthreeofthefivetestsshouldbeconductedinThoseareasthataresubjecttowearorthathavechemicalorWaterspillageorthatarevisiblydirty.在連續(xù)的地板板面至少要做做5次測(cè)試試或每5000平方英英尺要做5次次測(cè)試,那那種次數(shù)多就採採用那種.5次中至少少有3次要在在有受磨損,或受化學(xué)物物,水污染或看起有些些髒的地方DissipativeTable/FloorMAT(Optional)

靜電電地氈或桌墊墊(4)32ESDProtectedWorkStation

無靜電工工作桌(1)1.StaticdissipativeESDprotectiveworksurfacesarepreferred.Adirectconnectiontogroundisrecommended.Aresistorof1Mohm+/-10%inthegroundingwireisoptional.建議最好使用用靜電傳導(dǎo)防防護(hù)工作面,且直接連結(jié)結(jié)到接地.接接地線可可加或不加1M+/-10%電電阻.WhenhighlyconductiveESDprotectiveworksurfacesarerequiredduetothemanufacturingprocessneeds(e.g.,stainlesssteel),theyshallbeconnecteddirectlytoESDgroundwithoutaseriesresistortoensuretheyarecontinuouslyatgroundpotential.InthiscaseGroundfaultcircuitinterrupters(GFCI)isarecommendation.當(dāng)高導(dǎo)電性靜靜電防護(hù)工作作面(如:不不銹鋼工作面面)因製造部部需要而設(shè)置置時(shí),它們需直接連連結(jié)到靜電接接地而不須外外加一串連電電阻以確定它它們持續(xù)的維持接地電位位;此時(shí)每一一電源插座建建議需有漏電電斷路器(GFCI).33WhenunprotectedESDSdevicesorassembliesarecandledonconductive/highlyconductiveworksurfaces,theworksurfaceshallbecoveredwithagroundedstaticdissipativeworksurfaceormeettheresistancerequirementofstaticdissipativeworksurface,10E5to10E9ohms.當(dāng)使用不銹鋼鋼工作桌面處處理材料時(shí),必需在其上上覆蓋一層已已接地的靜電電傳導(dǎo)性桌面或其其桌面電阻要要符合靜電傳傳導(dǎo)性桌面電電阻的要求,10E5到到10E9ohms.ESDProtectedWorkStation

無靜電工工作桌(2)34CautionSign

提醒醒看板SDcautionsignsshallbepostedateachESDprotectedworkstationand/orattheentrancesofdefinedESDprotectedareas.靜電警告標(biāo)誌誌必須置於每每一個(gè)無靜電電工作桌,且且或在每個(gè)靜靜電防護(hù)區(qū)域域的入口處.警告標(biāo)誌可可如下或類似似者:Caution注意StaticCanDamageComponents靜電會(huì)破壞材料HandleItemsonlyinAccordancewithESDspecification處理材料必須依照靜電規(guī)格行之35ESDProtectiveShoesTester

靜電電鞋測(cè)試器ESDprotectiveshoes>/=1Mohmto=/<450Mohm靜電防護(hù)鞋迴迴路1M歐姆到450M歐姆間.36ESDProtectiveSmocks

靜電防護(hù)護(hù)衣1.ESDprotectivesmocks.</=+/-200V(TCP:100V)靜電防護(hù)護(hù)衣靜電電壓小於或等等於200伏特(TCP:100V)TheESDprotectivesmocksshallbebuttoned(exceptforthecollar)wheneverthewearerisatanESDprotectedworkstationorinadesignatedESDprotectedarea.當(dāng)穿者在靜電電防護(hù)工作站站或靜電保護(hù)護(hù)區(qū)內(nèi)時(shí),靜靜電防護(hù)衣的鈕扣(衣衣領(lǐng)上的除外外)或拉鍊需需要扣好,拉拉好37ESDGround靜靜電接地(1)TheESDgroundshallbetheequipmentgroundorearthground.Equipmentgroundistheelectricalground(green)wireatreceptaclesthathavebeentestedWhenbothequipmentandearthgroundsareusedatthesameESDprotectiveworkstationtheyshallbebondedtogetheratsomepointinthegroundsystem.靜電接地應(yīng)使使用設(shè)備接地地或大地接地地.設(shè)備接接地是電源插插中的電氣接地地(綠)線它它需經(jīng)過測(cè)試試.當(dāng)兩種接接地方式於同同一靜電防護(hù)工作作站均被採用用時(shí),在接地地系統(tǒng)上它們們必須被連結(jié)在一起.38EachESDworkstationshallbeindividuallyconnectedtotheESDground.Thegroundingshouldnotbehookedinseries.Thisistoavoidtheadditiveresultofresistiveandresultinginincreaseofdecaytime,alsotoavoidthegroundingdisconnectedsimultaneouslywhenanygroundingwirebecomeopen.每個(gè)靜電工作作站必須個(gè)別別的連結(jié)到靜靜電接地.當(dāng)當(dāng)一個(gè)靜電電工作站上有有很多靜電工工作面時(shí)則每每一個(gè)靜電工工作面需個(gè)別別的接到靜電電接地點(diǎn).接接地線也不可可串接,為為的是防止增增加衰減時(shí)間間,並防止止同時(shí)斷路的的發(fā)生.ESDGround靜靜電接地(2)39Anyinsulatormaterialswhichmakecontactwithorcomewithintwelve(12)inchesofthesemiconductordevicesastheypassthroughthetestequipmentshouldbereplaced(wherepractical)withantistaticorstaticdissipativematerials.Ifthisisnotfeasible,theinsulatormaterialsshouldbetreatedwithanantistaticsolution.Inaddition,anymetalpartsinthetestequipmentwhichcomeincontactwithsemiconductordevicesatanytimeshouldbegrounded.Thisisespeciallyimportanttoavoidthechargeddevicemodelfailuresinhighlysensitivesemiconductordevices.電性測(cè)測(cè)試設(shè)設(shè)備上上的任任何絕絕緣物物若會(huì)會(huì)接觸觸到或或靠近近半導(dǎo)導(dǎo)體材材料12英英吋吋以內(nèi)內(nèi)時(shí)應(yīng)應(yīng)以抗靜電電或靜靜電傳傳導(dǎo)物物取代代之.如果果不可可能的的話,則該該絕緣緣物必必須用用抗靜靜電溶溶液處處理過.此此外,測(cè)試試機(jī)臺(tái)臺(tái)上的的金屬屬零件件部份份若會(huì)會(huì)接觸觸到半半導(dǎo)材材料時(shí)時(shí)則該該金屬屬部份份無論論何時(shí)均均要接接地.是非非常重重要的的,可可以避避免高高敏感感的半半導(dǎo)體體材料料因靜靜電而而受損損傷.ESDGround靜靜電電接地地(3)40Impedanceofequipmentgroundingconductorislessthan1.0ohm.設(shè)備接接地導(dǎo)導(dǎo)線的的阻抗抗需小小於1歐歐姆姆.Note:Alligatorclipforwriststrapisnotallowedtouse.鱷魚夾夾頭禁禁止使使用.ESDGround靜靜電電接地地(4)41Gloves/Fingercoats手手套/手指指套Onlycottongloves,antistatic/conductivegloves,orantistatic/conductivefingercotsshouldbeusedforhandlingESDsdevices.當(dāng)需需要要用用手手套套或或手手指指套套時(shí)時(shí),只只有有棉棉手手套套,抗抗靜靜電電/導(dǎo)導(dǎo)電電手手套套或或抗抗靜電電/導(dǎo)導(dǎo)電電手手指指套套可可用用來來處處理理靜靜電電敏敏感感材材料料.PeoplehandlingESDSdevices.Theyshouldusethegloves,fingercotsorgloveswithfangcots.處理理靜靜電電敏敏感感材材料料時(shí)時(shí),可可只只用用手手套套,手手指指套套或或手手套套加加上上手手指指套套.42StorageAreas儲(chǔ)儲(chǔ)存存地地區(qū)區(qū)WhenthestorageshelvingisnotanESDprotectedareaorworkstation,theESDSdevicesshallbeinESDprotectivepackaging.若儲(chǔ)儲(chǔ)物物架架不不是是一一個(gè)個(gè)靜靜電電防防護(hù)護(hù)區(qū)區(qū)域域或或工工作作站站,則則靜靜電電敏敏感感材料料必必須須置置於於靜靜電電防防護(hù)護(hù)包包裝裝物物中中.2.Thegroundchainfortrailers(forWipe/finishgood)enoughtocompletelycontactwithgroundandkeepthechainclean,replacinganewoneifnecessary.裝載載材材料料成成品品的的推推車車必必須須要要有有接接地地鍊鍊條條,其其長(zhǎng)長(zhǎng)度度要要能能夠完完全全與與地地面面接接觸觸,並並保保持持乾乾淨(jìng)淨(jìng)整整潔潔,若若不不潔潔淨(jìng)淨(jìng)則則必必需需更換換之之.43MobileEquipment可可移移動(dòng)動(dòng)的的設(shè)設(shè)備備Mobileequipment(e.g.,carts,chairs,tablesshallnotgenerateelectrostaticvoltagesgreaterthan+/-200V(TCP100V)withintwelve(12)inchesofunprotectedESDSdevicesduringuse.可移動(dòng)的設(shè)設(shè)備(例如如:車子,椅子,桌桌子)在使使用時(shí)若接接近未受保保護(hù)的靜電電敏感材料料12英英吋以內(nèi)內(nèi)不得產(chǎn)生生大於+/-200(TCP100V)伏伏特之靜靜電壓.44MethodsforMinimizingStaticCharging

低靜靜電的方法法

AntistaticSolution

抗靜靜電液Antistaticchemicals(antistatsolutions)canbeusedtopreventstaticchargegenerationonstaticgenerating/chargingmaterialsintheworkorstorageareas.Duringapplicationofanyantistaticchemical,theusermustconsiderthefollowing:抗靜電化學(xué)學(xué)物(抗靜靜電液)可可以用來防防止在工作作或儲(chǔ)存區(qū)區(qū)的靜電產(chǎn)產(chǎn)生或充電電物發(fā)生靜靜電充電.在使用用任何抗靜靜電化學(xué)物物時(shí),使使用者應(yīng)考考慮下列:1.抗靜靜電液要選選擇不會(huì)污污染靜電敏敏感材料者者.2.抗靜靜電噴劑或或溶液不可可用於能夠夠產(chǎn)生能量量的電氣部部份或設(shè)備備上.3.當(dāng)裝裝置或包裝裝體直接暴暴露在噴霧霧下時(shí)不可可使用抗靜靜電溶液.4.靜電電溶液需要要的程度以以及使用頻頻率要根據(jù)據(jù)在正常作作業(yè)下使用靜電伏特特計(jì)來做靜靜電壓量測(cè)測(cè)的結(jié)果來來做決定.45MethodsforMinimizingStaticCharging低低靜電的的方法RelativeHumidityControl相相對(duì)濕度的的控制Relativehumidityhasasignificantimpactonthegenerationofstaticelectricityanditscontrolisrecommendedwherepracticable.相對(duì)濕度對(duì)對(duì)靜電產(chǎn)生生有很大的的影響如有有能力最好好要加以控控制.Note:Therecommendedminimumhumidityis40%R.H.註:建建議最小的的濕度為40%R.H.46MethodsforMinimizingStaticCharging低低靜電的的方法Training訓(xùn)訓(xùn)練It'stheresponsibilityofeachareasupervisortomakesurethathis/herpeoplereceiveESDcontroltraininginitiallyforworkinginhandlingESDSitems.每一區(qū)域的的主管必須須確定其操操作靜電敏敏感材料的的人員,須須受過ESD的訓(xùn)訓(xùn)練.Note:PersonnelenteringESDprotectedareasshouldreceiveESDawarenesstraining.註:進(jìn)進(jìn)入入靜電防護(hù)護(hù)區(qū)域之人人員必須受受過靜電認(rèn)認(rèn)知訓(xùn)練.47CheckList

檢查查表(1)1_____Doesthecalibrationsystemforallinspection,measuringandtestequipmentusedtoperformrequiredESDitemcheckslistedinTable1meettheTITLcalibrationrequirementsofTQ-General01002有ESD量量測(cè)儀器是是否都有校校正,且都都在有效期期內(nèi)?2_____AregroundedflooringorfloormatscoveringthefloorareaswherepersonnelormobileESDprotectiveworkstationsareusingfloorgroundingmethods?使用用靜靜電電防防護(hù)護(hù)鞋鞋的的工工作作區(qū)區(qū)域域是是否否配配合合有有接接地地良良好好之之靜靜電電防防護(hù)護(hù)地地板板?3_____Iseachpersonhandlingorwithintwelve(12)inchesofunprotectedESDSdevicesgroundedbyeitherawriststraporESDprotectivefootwear?在接近ESDS產(chǎn)品(即即IC材料)12英吋範(fàn)範(fàn)圍內(nèi)的人員員是否都有戴戴靜電手環(huán)或或穿靜電鞋?4_____Whenpersonnelfloorgroundingmethodsareused,istheESDprotectivefootwearwornonbothfeet?是否所有人兩兩隻腳都穿有有靜電鞋(不不能只穿一支支腳)?5_____ArenonessentialandpersonalitemskeptoffoftheESDprotectiveworksurfaces?靜電防護(hù)工作作桌面上是否否沒有不必要要的東西或私私人用品?6_____Arethestaticvoltagesgeneratedbyessentialmaterials/itemslessthan+/-200volts(top100V)withintwelve(12)inchesofunprotectedESDSdevices?在接近ESDS產(chǎn)品(即IC材料料)12英英吋範(fàn)圍內(nèi)是是否沒有會(huì)產(chǎn)產(chǎn)品大於+/-200V(TCP100V)靜電壓的任何何物品?7_____WhenESDprotectivesmocksareused,dothesmockscoverallpersonalgarmentsabovethewaistexceptattheneckarea?靜電服是否能能蓋到由腰部部以上(頸部部除外)的部部位?8_____WhereunprotectedESDSdevicesarehandled,aregroundedstaticdissipativeworksurfacesused?處理ESDS產(chǎn)品(即即IC材料)時(shí),是否在在接地良好的的靜電防護(hù)工工作桌面上處處理?489_____AreESDcautionsignspostedateachESDprotectedworkstationand/orattheentrancesofdefinedESDprotectedareas?是否在靜電防防護(hù)區(qū)域的入入口或工作桌桌區(qū)域有一靜靜電防護(hù)的””警式看板””?10_____Arethedailywriststrapchecksbeingperformedandrecordedtheresults?靜電手環(huán)是否否每班做檢查查及記錄檢查查結(jié)果呢?11_____Doesthewriststrapresistancemeasurementpathgofromthewearer'shand,throughtheuser'sbody,thebody-to-strapcontact,theintegralresistor,thestrapwire,tothestrapgroundconnector?靜電手環(huán)檢測(cè)測(cè)是否由穿戴戴者的手,使使用者的身體體,靜電環(huán)內(nèi)內(nèi)阻,一直直到靜電接地地做一迴路電電阻值量測(cè).12_____ArethedailyESDprotectivefootwearchecksbeingperformedandrecordedtheresults?靜電鞋是否每每班做量測(cè)與與記錄呢?13______AretheESDgroundconnectionvisualchecksbeingperformedweekly?所有靜電接地地,如靜電手手環(huán),桌墊.,靜電地板板的接地聯(lián)接接是否每週目目檢一次?14_____ArethemonthlyESDprotectivesmockstaticvoltagechecksbeingperformedandkeptrecord?靜電衣的靜電電壓是否每個(gè)個(gè)月偵測(cè)一次次並記錄其電電壓值?15_____AretheESDprotectedareaandworkstationstaticvoltagesurveysbeingperformed&recordmonthly?生產(chǎn)線上ESD保護(hù)區(qū)域域和工作桌區(qū)區(qū)域的靜電壓壓是否每個(gè)月月檢檢測(cè)一次次.並記記錄其電壓值值?16_____AretheESDprotectivestaticdissipativeworksurfacetoESDgroundresistancechecksbeingperformed&recordedquarterly?ESD防護(hù)工工作桌面(靜靜電消散桌面面)到其接地地的電阻是否否每季檢測(cè)一一次並記錄CheckList檢檢查表(2)4917_____AretheESDprotectivefloortoESDgroundresistancechecksbeingperformedper&recordedquarterly?ESD防護(hù)地地板到其接地地的電阻是否否每季檢測(cè)一一次並記錄其其電阻值?18_____AretheESDgroundcontinuitychecksbeingperformed&recordedquarterly?靜電接地,如如靜電手環(huán),工作桌面,地板等的接接地線是否每每季量測(cè)一次次並記錄其電電阻值?19_____Aretheionizebalancechecksbeingperformedper&recordedsemi-annual?離子風(fēng)扇的balance電壓和DecayTime是是否每半年校校正一次並有有記錄?20_____Whenused,aretheairionizesaimedatthedevicesandoperator'shandsratherthanattheoperator?離子風(fēng)扇是否否朝向處理材材料的雙手,而非朝向operator?21_____IsanannualESDsystemcompliancechecktotherequirementsofthisstandardbeingperformed?每一工作區(qū)域域是否每年做做一次檢查,看是否符合合此靜電管制制規(guī)格的要求求?22_____Whencompliancetothedaily,weekly,quarterly,semiannual,and/orannualchecksisnotcontinuouslymaintained,arethechecksperformedadoublefrequency?如果任何定期期的測(cè)量不通通過其量測(cè)頻頻率是否增加加一倍呢?23_____ArerecordsoftheESDitemchecksmaintainedatleast2yearsminimumrequirement.所有ESD量量測(cè)的記錄皆必須保存至至少二年的要求?24____DoeseachESDprotectivepackagehaveacontrastingESDcautionlabel?是否每一靜電電防護(hù)包裝都都有一明顯的的靜電警告標(biāo)標(biāo)示25_____AretheESDcautionlabelslegibletonormalvisionatadistanceofthreefeet?是否此靜電警警告標(biāo)示(籤籤)在3英英呎的距離即即可看得清楚楚?26_____WhenmorethanoneESDworksurfaceisusedataworkstation,iseachsurfaceindividuallyconnectedtotheESDground?是否每一工作作桌面或桌墊墊都有其個(gè)別別的靜電接地地?CheckList檢檢查表(3)5027____Whenconductive/highlyconductiveESDprotectiveworksurfacesareused(e.g.,stainlesssteel),aretheyconnecteddirectlytoESDgroundwithoutaseriesresistortoinsuretheyarecontinuouslyatgroundpotential?不鏽鋼工作桌桌面是否直接接接地,即不不需連接一一1Mega歐歐姆的電阻?28_____Whenafloorgroundingdevice(e.g.,dragchain,dragwire,conductivecastor)isusedtogroundmobileESDprotectedworkstations,isanESDprotectivefloorormatused?當(dāng)移動(dòng)性工作作桌,車子被被用來當(dāng)成處處理材料的