附錄光流控技術(shù)綜述報告1.1.1光流控技術(shù)簡介光流控技術(shù)是一門結(jié)合微流控和光學(xué)的交叉學(xué)科，通過將微流控技術(shù)和微光子元件有機(jī)結(jié)合，使流體與光發(fā)生相互作用。自2003年被提出至今，得到了人們的廣泛關(guān)注ADDINEN.CITEADDINEN.CITE.DATA[\o"Helbo,2003#40"9-15]。光流控技術(shù)主要是研究如何在微納尺度上控制光和流體，并利用光和流體之間的相互作用開發(fā)小型化且高度集成的光學(xué)器件及儀器。即通過微流通道和表面結(jié)構(gòu)對特定限域尺度范圍內(nèi)的流體進(jìn)行精確操控，實現(xiàn)光對流體物質(zhì)性能的控制或者通過流體介質(zhì)調(diào)控光子的產(chǎn)生和傳播。基于光流控技術(shù)的主要應(yīng)用包括：光流控光源、可調(diào)光學(xué)微器件、生化傳感器及光操控。光流控光源實現(xiàn)光源的集成化，在生化物分析系統(tǒng)中至關(guān)重要ADDINEN.CITEADDINEN.CITE.DATA[\o"Pollnau,2016#52"16-18]，因為目前大多數(shù)的微全分析系統(tǒng)，光源是獨(dú)立于微流控芯片之外的，導(dǎo)致微型分析芯片系統(tǒng)的整體結(jié)構(gòu)較復(fù)雜，不便攜帶。為“芯片實驗室”提供光子集成光源，能夠解決微全分析系統(tǒng)中光源笨重、價格昂貴、高損耗的缺陷，使得微全分析系統(tǒng)的整體結(jié)構(gòu)更輕薄。隨著激光技術(shù)、精密加工及軟光刻等技術(shù)的提出和迅速發(fā)展，在芯片上集成微流體通道、微型光學(xué)諧振腔和增益介質(zhì)形成光流控光源成為了可能。光流控光源的實現(xiàn)為研究人員提供了將光源集成到微流體系統(tǒng)中的方法，將發(fā)光物質(zhì)或生物活性物質(zhì)等溶解于液態(tài)溶液中，以流體的形式作為光流控光源的增益介質(zhì)，在激發(fā)光的作用下為生化物分析系統(tǒng)提供光學(xué)增益。在采用流體形式為系統(tǒng)提供光學(xué)增益時，有諸多優(yōu)勢，比如：可通過微流體通道將含增益介質(zhì)的溶液傳送到系統(tǒng)中特定的位置，使生物活性物質(zhì)能夠與光學(xué)模式發(fā)生高效的相互作用；發(fā)光染料存在光學(xué)漂白效應(yīng)，當(dāng)以流體形式在微流體通道流動時，能夠帶走系統(tǒng)中所產(chǎn)生的熱量，在一定程度上減弱了或避免了光學(xué)漂白效應(yīng)，進(jìn)而消除了染料漂白所帶來的不利影響；最重要的是液態(tài)增益介質(zhì)本身可調(diào)，不像固態(tài)增益介質(zhì)那樣難以改變，不同的染料溶液有不同的發(fā)光波長，更換增益介質(zhì)溶液，便可實現(xiàn)波長調(diào)諧。光流控光源是自2003年光流控技術(shù)被首次提出以來研究人員的重要研究方向之一，也是光流控技術(shù)的重要應(yīng)用方向之一。最早的光流控光源是由丹麥理工大學(xué)的研究人員在2003年提出的ADDINEN.CITE<EndNote><Cite><Author>Helbo</Author><Year>2003</Year><RecNum>40</RecNum><DisplayText><styleface="superscript">[9]</style></DisplayText><record><rec-number>40</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611647501">40</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Helbo,B.</author><author>Kristensen,A.</author><author>Menon,A.</author></authors></contributors><titles><title>Amicro-cavityfluidicdyelaser</title><secondary-title>JournalofMicromechanicsandMicroengineering</secondary-title></titles><periodical><full-title>JournalofMicromechanicsandMicroengineering</full-title></periodical><pages>307-311</pages><volume>13</volume><number>2</number><dates><year>2003</year><pub-dates><date>2003/01/28</date></pub-dates></dates><publisher>IOPPublishing</publisher><isbn>0960-1317</isbn><urls><related-urls><url>/10.1088/0960-1317/13/2/320</url></related-urls></urls><electronic-resource-num>10.1088/0960-1317/13/2/320</electronic-resource-num></record></Cite></EndNote>[\o"Helbo,2003#40"9]，采用溶解于無水乙醇中的羅丹明6G溶液作為增益介質(zhì)注入到微流體通道中，由一對上下放置的金屬反射鏡構(gòu)成法布里-珀羅諧振腔增強(qiáng)光與物質(zhì)之間的相互作用，在波長為532nm泵浦光的作用下，實現(xiàn)了570nm波長處的激光發(fā)射。在此之后，光流控光源在功能性、低閾值性、方向性、緊湊性及可制造性等方面都有了不斷的發(fā)展，被應(yīng)用于有源生化傳感中，促進(jìn)了生物化學(xué)傳感的進(jìn)步。將在1.1.2和1.1.3小節(jié)中對光流控光源的研究現(xiàn)狀及其應(yīng)用進(jìn)行更加詳細(xì)的介紹?？烧{(diào)光學(xué)微器件流體不僅具有流動性，還具有固體難以實現(xiàn)的可調(diào)光學(xué)性質(zhì)，比如：通過液體的混合可以實現(xiàn)介質(zhì)折射率的調(diào)節(jié)；在兩個不相溶液體的交界處可以形成光滑的光學(xué)界面；還可以通過混合兩種相溶的液體形成折射率梯度。這些特性為研究可調(diào)光流控光學(xué)微器件提供了可能?？蒲腥藛T利用液體易流動的特點(diǎn)設(shè)計了光流控可變焦透鏡，通過光流控技術(shù)實現(xiàn)了光學(xué)成像設(shè)備的微小型化。光流控變焦液體透鏡一般由微透鏡液體腔和微流體注入通道共同組成，通過微細(xì)加工技術(shù)制作由有機(jī)聚合物構(gòu)成的彈性腔體，透明液體由微流體通道注入到腔體時，腔體因受到液體壓力而發(fā)生形變，進(jìn)而改變微透鏡的曲率半徑達(dá)到改變光學(xué)微透鏡焦距的目的ADDINEN.CITEADDINEN.CITE.DATA[\o"Lee,2013#60"19-22]。除可變焦透鏡外，科研人員還研究了多種多樣的可調(diào)控光流控光波導(dǎo)器件，主要有基于液-液界面的全流體光波導(dǎo)器件和基于固-液界面的微流體光波導(dǎo)器件兩類。在實現(xiàn)基于液-液界面的全流體光波導(dǎo)器件時，采用兩種不同折射率的液體并使其分別通入微流體管道中，因液體具有層流特性，通入的兩種液體可分別作為波導(dǎo)的芯層和包層，通控液體的流動速度或改變液體的折射率，可實現(xiàn)對波導(dǎo)內(nèi)傳輸光的調(diào)控?；谝?液界面的可調(diào)控光波導(dǎo)器件的種類繁多，較為典型的光波導(dǎo)器件有光開關(guān)ADDINEN.CITEADDINEN.CITE.DATA[\o"Campbell,2004#62"23-26]、光功率分束器ADDINEN.CITEADDINEN.CITE.DATA[\o"Wolfe,2005#69"27-30]等。在實現(xiàn)基于固-液界面的微流體光波導(dǎo)器件時，通常采用有機(jī)聚合物材料設(shè)計及制作微流體通道，將所調(diào)控的流體注入，使其在微流體通道內(nèi)流動，和有機(jī)聚合物通道作為光波導(dǎo)器件的芯層或包層，改變液體的折射率，可實現(xiàn)對波導(dǎo)內(nèi)光子產(chǎn)生或光學(xué)模式的調(diào)控?；诠?液界面的微流控光波導(dǎo)器件主要包括光探測器ADDINEN.CITEADDINEN.CITE.DATA[\o"Wu,2008#72"31,\o"Ramezannezhad,2020#73"32]、可調(diào)光衰減器ADDINEN.CITEADDINEN.CITE.DATA[\o"Zhu,2005#74"33-36]、可調(diào)濾波器ADDINEN.CITEADDINEN.CITE.DATA[\o"Fang,2017#77"37-39]、可調(diào)偏振分束器ADDINEN.CITE<EndNote><Cite><Author>Zhu</Author><Year>2016</Year><RecNum>81</RecNum><DisplayText><styleface="superscript">[40]</style></DisplayText><record><rec-number>81</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611835867">81</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Zhu,Song</author><author>Liu,Yang</author><author>Shi,Lei</author><author>Xu,Xinbiao</author><author>Yuan,Shixing</author><author>Liu,Ningyu</author><author>Zhang,Xinliang</author></authors></contributors><titles><title>Tunablepolarizationbeamsplitterbasedonoptofluidicringresonator</title><secondary-title>OpticsExpress</secondary-title></titles><periodical><full-title>OpticsExpress</full-title></periodical><pages>17511-17521</pages><volume>24</volume><number>15</number><dates><year>2016</year></dates><urls></urls></record></Cite></EndNote>[\o"Zhu,2016#81"40]等。典型的可調(diào)光學(xué)微器件如圖1.2所示。圖1.2典型的可調(diào)光學(xué)微器件。（a）可調(diào)焦透鏡ADDINEN.CITE<EndNote><Cite><Author>Mao</Author><Year>2009</Year><RecNum>85</RecNum><DisplayText><styleface="superscript">[22]</style></DisplayText><record><rec-number>85</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611840038">85</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Mao,Xiaole</author><author>Lin,Sz-ChinSteven</author><author>Lapsley,MichaelIan</author><author>Shi,Jinjie</author><author>Juluri,BalaKrishna</author><author>Huang,TonyJun</author></authors></contributors><titles><title>TunableLiquidGradientRefractiveIndex(L-GRIN)lenswithtwodegreesoffreedom</title><secondary-title>LabonaChip</secondary-title></titles><periodical><full-title>LabonaChip</full-title></periodical><pages>2050-2058</pages><volume>9</volume><number>14</number><dates><year>2009</year></dates><publisher>TheRoyalSocietyofChemistry</publisher><isbn>1473-0197</isbn><work-type>10.1039/B822982A</work-type><urls><related-urls><url>/10.1039/B822982A</url></related-urls></urls><electronic-resource-num>10.1039/B822982A</electronic-resource-num></record></Cite></EndNote>[\o"Mao,2009#85"22]；（b）2×2光開關(guān)ADDINEN.CITE<EndNote><Cite><Author>Xu</Author><Year>2019</Year><RecNum>61</RecNum><DisplayText><styleface="superscript">[25]</style></DisplayText><record><rec-number>61</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611823416">61</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Xu,Peng</author><author>Wan,Jing</author><author>Zhang,Simo</author><author>Duan,Yixin</author><author>Chen,Boyu</author><author>Zhang,Sheng</author></authors></contributors><titles><title>2?×?2optofluidicswitchchipwithanairshutter</title><secondary-title>AppliedOptics</secondary-title><alt-title>Appl.Opt.</alt-title></titles><periodical><full-title>AppliedOptics</full-title><abbr-1>Appl.Opt.</abbr-1></periodical><alt-periodical><full-title>AppliedOptics</full-title><abbr-1>Appl.Opt.</abbr-1></alt-periodical><pages>4637-4641</pages><volume>58</volume><number>17</number><keywords><keyword>Extinctionratios</keyword><keyword>Finiteelementmethod</keyword><keyword>Opticalsensing</keyword><keyword>Opticalsignals</keyword><keyword>Opticalswitchingdevices</keyword><keyword>Photoniccrystals</keyword></keywords><dates><year>2019</year><pub-dates><date>2019/06/10</date></pub-dates></dates><publisher>OSA</publisher><urls><related-urls><url>/abstract.cfm?URI=ao-58-17-4637</url></related-urls></urls><electronic-resource-num>10.1364/AO.58.004637</electronic-resource-num></record></Cite></EndNote>[\o"Xu,2019#61"25]；（c）光功率分束器ADDINEN.CITE<EndNote><Cite><Author>Tang</Author><Year>2016</Year><RecNum>70</RecNum><DisplayText><styleface="superscript">[29]</style></DisplayText><record><rec-number>70</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611832972">70</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Tang,Xionggui</author><author>Liang,Shan</author><author>Li,Rujian</author></authors></contributors><titles><title>Designforcontrollableoptofluidicbeamsplitter</title><secondary-title>PhotonicsandNanostructures-FundamentalsandApplications</secondary-title></titles><periodical><full-title>PhotonicsandNanostructures-FundamentalsandApplications</full-title></periodical><pages>23-30</pages><volume>18</volume><keywords><keyword>Optofluidicbeamsplitter</keyword><keyword>Tunability</keyword><keyword>Microfluidicchannel</keyword><keyword>Y-branchwaveguidestructure</keyword></keywords><dates><year>2016</year><pub-dates><date>2016/01/01/</date></pub-dates></dates><isbn>1569-4410</isbn><urls><related-urls><url>/science/article/pii/S1569441015000796</url></related-urls></urls><electronic-resource-num>/10.1016/j.photonics.2015.12.002</electronic-resource-num></record></Cite></EndNote>[\o"Tang,2016#70"29]；（d）可調(diào)濾波器ADDINEN.CITE<EndNote><Cite><Author>Yu</Author><Year>2012</Year><RecNum>84</RecNum><DisplayText><styleface="superscript">[39]</style></DisplayText><record><rec-number>84</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611836755">84</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Yu,Zhe</author><author>Liang,Ruisheng</author><author>Chen,Pixin</author><author>Huang,Qiaodong</author><author>Huang,Tingting</author><author>Xu,Xingkai</author></authors></contributors><titles><title>IntegratedTunableOptofluidicsOpticalFilterBasedonMIMSide-Coupled-CavityWaveguide</title><secondary-title>Plasmonics</secondary-title></titles><periodical><full-title>Plasmonics</full-title></periodical><pages>603-607</pages><volume>7</volume><number>4</number><dates><year>2012</year><pub-dates><date>2012/12/01</date></pub-dates></dates><isbn>1557-1963</isbn><urls><related-urls><url>/10.1007/s11468-012-9348-2</url></related-urls></urls><electronic-resource-num>10.1007/s11468-012-9348-2</electronic-resource-num></record></Cite></EndNote>[\o"Yu,2012#84"39]；（e）可調(diào)光衰減器ADDINEN.CITE<EndNote><Cite><Author>Wan</Author><Year>2018</Year><RecNum>78</RecNum><DisplayText><styleface="superscript">[34]</style></DisplayText><record><rec-number>78</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611835370">78</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Wan,Jing</author><author>Xue,Fenglan</author><author>Liu,Chengjie</author><author>Huang,Shaoqiang</author><author>Fan,Shuzheng</author><author>Hu,Fangren</author></authors></contributors><titles><title>Optofluidicvariableopticalattenuatorcontrolledbyelectricity</title><secondary-title>AppliedOptics</secondary-title><alt-title>Appl.Opt.</alt-title></titles><periodical><full-title>AppliedOptics</full-title><abbr-1>Appl.Opt.</abbr-1></periodical><alt-periodical><full-title>AppliedOptics</full-title><abbr-1>Appl.Opt.</abbr-1></alt-periodical><pages>8114-8118</pages><volume>57</volume><number>28</number><keywords><keyword>Attenuation</keyword><keyword>Densewavelengthdivisionmultiplexing</keyword><keyword>Infraredradiation</keyword><keyword>Opticalsensing</keyword><keyword>Variableopticalattenuators</keyword><keyword>Visiblelight</keyword></keywords><dates><year>2018</year><pub-dates><date>2018/10/01</date></pub-dates></dates><publisher>OSA</publisher><urls><related-urls><url>/abstract.cfm?URI=ao-57-28-8114</url></related-urls></urls><electronic-resource-num>10.1364/AO.57.008114</electronic-resource-num></record></Cite></EndNote>[\o"Wan,2018#78"34]；（f）偏振分束器ADDINEN.CITE<EndNote><Cite><Author>Zhu</Author><Year>2016</Year><RecNum>81</RecNum><DisplayText><styleface="superscript">[40]</style></DisplayText><record><rec-number>81</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611835867">81</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Zhu,Song</author><author>Liu,Yang</author><author>Shi,Lei</author><author>Xu,Xinbiao</author><author>Yuan,Shixing</author><author>Liu,Ningyu</author><author>Zhang,Xinliang</author></authors></contributors><titles><title>Tunablepolarizationbeamsplitterbasedonoptofluidicringresonator</title><secondary-title>OpticsExpress</secondary-title></titles><periodical><full-title>OpticsExpress</full-title></periodical><pages>17511-17521</pages><volume>24</volume><number>15</number><dates><year>2016</year></dates><urls></urls></record></Cite></EndNote>[\o"Zhu,2016#81"40]光流控生化傳感器光流控技術(shù)將微流控技術(shù)和光學(xué)器件有機(jī)結(jié)合，兩者互相作用、相互影響，促成了光流控學(xué)在傳感領(lǐng)域的應(yīng)用。作為光流控系統(tǒng)中的重要載體，流體可以攜帶、運(yùn)輸各種體積在微納尺度量級的物質(zhì)，使其通過光流控系統(tǒng)，待光同流體及流體中所攜帶的物質(zhì)相互作用后，會產(chǎn)生特定的光學(xué)信號響應(yīng)，進(jìn)而實現(xiàn)快速高效的生化物的檢測和分析。光流控系統(tǒng)可以將微流體通道及光學(xué)器件集成，從而實現(xiàn)生化物檢測系統(tǒng)的微小型化。在光流控系統(tǒng)中，液體折射率的變化對光的激發(fā)和傳播會產(chǎn)生較大的影響，基于這一特性，可以將光流控系統(tǒng)應(yīng)用于生化物質(zhì)的探測。基于光流控技術(shù)，通過設(shè)計不同的光學(xué)結(jié)構(gòu)，能夠制造出各種性能優(yōu)異的光流控生化物傳感器。按照光學(xué)結(jié)構(gòu)進(jìn)行分類，可分為：（1）基于光子晶體諧振腔或光子晶體光纖的光流控生化物傳感器ADDINEN.CITEADDINEN.CITE.DATA[\o"Lee,2007#86"41-45]，該傳感器的實驗原理是當(dāng)一束光在光子晶體結(jié)構(gòu)中傳播時，會在晶體結(jié)構(gòu)中發(fā)生復(fù)雜的光折射和光反射產(chǎn)生的折射光和反射光，折射光和反射光經(jīng)過干涉后，只有特定波長的光才能通過該光子晶體結(jié)構(gòu)，從而形成了光子帶隙，當(dāng)光子晶體諧振腔腔內(nèi)折射率發(fā)生微小變化便可使光子晶體諧振腔的光子帶隙發(fā)生偏移，即光響應(yīng)信號產(chǎn)生了改變，也就起到了傳感作用；（2）基于回音壁模式的光流控生化物傳感器ADDINEN.CITEADDINEN.CITE.DATA[\o"Li,2013#92"46-50]，當(dāng)微環(huán)、微管、微球型光學(xué)結(jié)構(gòu)放置于折射率較低的環(huán)境中時，在這些微腔內(nèi)，大于臨界角的光在微腔表面發(fā)生全反射，使光被束縛在微腔表面，不斷沿著微腔表面?zhèn)鞑ィ?dāng)滿足干涉條件時，相互疊加增強(qiáng)，形成回音壁模式，改變外界環(huán)境會使微腔折射率發(fā)生變化，進(jìn)而導(dǎo)致微腔的模式發(fā)生變化，實現(xiàn)光流控傳感；（3）基于液芯光波導(dǎo)模式或微納光纖的光流控生化物傳感器ADDINEN.CITEADDINEN.CITE.DATA[\o"Ozcelik,2015#97"51-56]，利用光在波導(dǎo)中全反射產(chǎn)生的倏逝場與流體發(fā)生相互作用，當(dāng)流體變化時，光信號會產(chǎn)生變化，進(jìn)而實現(xiàn)生化物的檢測和分析；（4）基于表面等離子體共振的光流控生化物傳感器ADDINEN.CITEADDINEN.CITE.DATA[\o"Chen,2019#88"57-61]，利用表面等離子共振對金屬表面區(qū)域液體折射率的敏感性實現(xiàn)傳感功能，改變流體，其折射率的變化會引起共振峰的偏移，偏移量和折射率的對應(yīng)關(guān)系，便是生化物傳感靈敏度。典型的光流控生化物傳感器如圖1.3所示。圖1.3典型的光流控生化物傳感器。（a）光子晶體微腔光流控生化物傳感器ADDINEN.CITE<EndNote><Cite><Author>Lee</Author><Year>2007</Year><RecNum>86</RecNum><DisplayText><styleface="superscript">[41]</style></DisplayText><record><rec-number>86</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611899329">86</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Lee,Mindy</author><author>Fauchet,PhilippeM.</author></authors></contributors><titles><title>Two-dimensionalsiliconphotoniccrystalbasedbiosensingplatformforproteindetection</title><secondary-title>OpticsExpress</secondary-title><alt-title>Opt.Express</alt-title></titles><periodical><full-title>OpticsExpress</full-title></periodical><pages>4530-4535</pages><volume>15</volume><number>8</number><keywords><keyword>Opticaldiagnosticsformedicine</keyword><keyword>Resonators</keyword><keyword>Electronbeamlithography</keyword><keyword>FastFouriertransforms</keyword><keyword>Photoniccrystalcavities</keyword><keyword>Photoniccrystals</keyword><keyword>Refractiveindex</keyword><keyword>Scanningelectronmicroscopy</keyword></keywords><dates><year>2007</year><pub-dates><date>2007/04/16</date></pub-dates></dates><publisher>OSA</publisher><urls><related-urls><url>/abstract.cfm?URI=oe-15-8-4530</url></related-urls></urls><electronic-resource-num>10.1364/OE.15.004530</electronic-resource-num></record></Cite></EndNote>[\o"Lee,2007#86"41]；（b）回音壁模式光流控生化物傳感器ADDINEN.CITE<EndNote><Cite><Author>Li</Author><Year>2013</Year><RecNum>92</RecNum><DisplayText><styleface="superscript">[46]</style></DisplayText><record><rec-number>92</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611900706">92</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Li,Ming</author><author>Wu,Xiang</author><author>Liu,Liying</author><author>Fan,Xudong</author><author>Xu,Lei</author></authors></contributors><titles><title>Self-ReferencingOptofluidicRingResonatorSensorforHighlySensitiveBiomolecularDetection</title><secondary-title>AnalyticalChemistry</secondary-title></titles><periodical><full-title>AnalyticalChemistry</full-title></periodical><pages>9328-9332</pages><volume>85</volume><number>19</number><dates><year>2013</year><pub-dates><date>2013/10/01</date></pub-dates></dates><publisher>AmericanChemicalSociety</publisher><isbn>0003-2700</isbn><urls><related-urls><url>/10.1021/ac402174x</url></related-urls></urls><electronic-resource-num>10.1021/ac402174x</electronic-resource-num></record></Cite></EndNote>[\o"Li,2013#92"46]；（c）液芯光波導(dǎo)光流控生化物傳感器ADDINEN.CITE<EndNote><Cite><Author>Lapsley</Author><Year>2011</Year><RecNum>98</RecNum><DisplayText><styleface="superscript">[52]</style></DisplayText><record><rec-number>98</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611902826">98</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Lapsley,MichaelIan</author><author>Chiang,I.Kao</author><author>Zheng,YueBing</author><author>Ding,Xiaoyun</author><author>Mao,Xiaole</author><author>Huang,TonyJun</author></authors></contributors><titles><title>Asingle-layer,planar,optofluidicMach–Zehnderinterferometerforlabel-freedetection</title><secondary-title>LabonaChip</secondary-title></titles><periodical><full-title>LabonaChip</full-title></periodical><pages>1795-1800</pages><volume>11</volume><number>10</number><dates><year>2011</year></dates><publisher>TheRoyalSocietyofChemistry</publisher><isbn>1473-0197</isbn><work-type>10.1039/C0LC00707B</work-type><urls><related-urls><url>/10.1039/C0LC00707B</url></related-urls></urls><electronic-resource-num>10.1039/C0LC00707B</electronic-resource-num></record></Cite></EndNote>[\o"Lapsley,2011#98"52]；（d）表面等離子體共振光流控生化物傳感器ADDINEN.CITE<EndNote><Cite><Author>Chen</Author><Year>2019</Year><RecNum>88</RecNum><DisplayText><styleface="superscript">[57]</style></DisplayText><record><rec-number>88</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611899813">88</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Chen,Yung-Tsan</author><author>Liao,Yu-Yang</author><author>Chen,Chien-Chun</author><author>Hsiao,Hui-Hsin</author><author>Huang,Jian-Jang</author></authors></contributors><titles><title>Surfaceplasmonscoupledtwo-dimensionalphotoniccrystalbiosensorsforEpstein-Barrvirusproteindetection</title><secondary-title>SensorsandActuatorsB:Chemical</secondary-title></titles><periodical><full-title>SensorsandActuatorsB:Chemical</full-title></periodical><pages>81-88</pages><volume>291</volume><keywords><keyword>Photoniccrystalbiosensor</keyword><keyword>Diffraction</keyword><keyword>Proteindetection</keyword><keyword>Surfaceplasmonpolariton</keyword></keywords><dates><year>2019</year><pub-dates><date>2019/07/15/</date></pub-dates></dates><isbn>0925-4005</isbn><urls><related-urls><url>/science/article/pii/S0925400519305829</url></related-urls></urls><electronic-resource-num>/10.1016/j.snb.2019.04.059</electronic-resource-num></record></Cite></EndNote>[\o"Chen,2019#88"57]光操控微流控技術(shù)和光學(xué)元件相結(jié)合的光流控技術(shù)，除通過流體對光進(jìn)行控制實現(xiàn)上述光流控器件外，還可以通過光或光學(xué)系統(tǒng)對流體的特性和運(yùn)動進(jìn)行控制實現(xiàn)如粒子分離ADDINEN.CITEADDINEN.CITE.DATA[\o"Wu,2016#109"62-64]等應(yīng)用。比如，西安交通大學(xué)的科研人員通過研究光學(xué)系統(tǒng)對流體的操控，在光流體晶格中將傳統(tǒng)測量方法提高到了單細(xì)胞尺度層面，實現(xiàn)了對顆粒捕獲、分離及跳躍等現(xiàn)象的精準(zhǔn)操控，這對那些極小樣品用量的疾病的檢測和診斷及單細(xì)胞精密醫(yī)學(xué)應(yīng)用等具有深遠(yuǎn)的影響ADDINEN.CITE<EndNote><Cite><Author>Shi</Author><Year>2018</Year><RecNum>114</RecNum><DisplayText><styleface="superscript">[65]</style></DisplayText><record><rec-number>114</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611918750">114</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Shi,Y.Z.</author><author>Xiong,S.</author><author>Zhang,Y.</author><author>Chin,L.K.</author><author>Chen,Y.Y.</author><author>Zhang,J.B.</author><author>Zhang,T.H.</author><author>Ser,W.</author><author>Larson,A.</author><author>Hoi,L.S.</author><author>Wu,J.H.</author><author>Chen,T.N.</author><author>Yang,Z.C.</author><author>Hao,Y.L.</author><author>Liedberg,B.</author><author>Yap,P.H.</author><author>Tsai,D.P.</author><author>Qiu,C.W.</author><author>Liu,A.Q.</author></authors></contributors><titles><title>Sculptingnanoparticledynamicsforsingle-bacteria-levelscreeninganddirectbinding-efficiencymeasurement</title><secondary-title>NatureCommunications</secondary-title></titles><periodical><full-title>NatureCommunications</full-title></periodical><volume>9</volume><dates><year>2018</year><pub-dates><date>Feb26</date></pub-dates></dates><isbn>2041-1723</isbn><accession-num>WOS:000426048900002</accession-num><urls><related-urls><url><GotoISI>://WOS:000426048900002</url></related-urls></urls><custom7>815</custom7><electronic-resource-num>10.1038/s41467-018-03156-5</electronic-resource-num></record></Cite></EndNote>[\o"Shi,2018#114"65]。典型的光學(xué)操控應(yīng)用如圖1.4所示。圖1.4典型的光學(xué)操控應(yīng)用。（a）納米粒子的分選ADDINEN.CITE<EndNote><Cite><Author>Wu</Author><Year>2016</Year><RecNum>109</RecNum><DisplayText><styleface="superscript">[62]</style></DisplayText><record><rec-number>109</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611912091">109</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Wu,Wei</author><author>Zhu,Xiaoqiang</author><author>Zuo,Yunfeng</author><author>Liang,Li</author><author>Zhang,Shunping</author><author>Zhang,Xuming</author><author>Yang,Yi</author></authors></contributors><titles><title>PreciseSortingofGoldNanoparticlesinaFlowingSystem</title><secondary-title>ACSPhotonics</secondary-title></titles><periodical><full-title>ACSPhotonics</full-title></periodical><pages>2497-2504</pages><volume>3</volume><number>12</number><dates><year>2016</year><pub-dates><date>2016/12/21</date></pub-dates></dates><publisher>AmericanChemicalSociety</publisher><urls><related-urls><url>/10.1021/acsphotonics.6b00737</url></related-urls></urls><electronic-resource-num>10.1021/acsphotonics.6b00737</electronic-resource-num></record></Cite></EndNote>[\o"Wu,2016#109"62]；（b）光流體晶格中操控顆粒跳躍ADDINEN.CITE<EndNote><Cite><Author>Shi</Author><Year>2018</Year><RecNum>114</RecNum><DisplayText><styleface="superscript">[65]</style></DisplayText><record><rec-number>114</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611918750">114</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Shi,Y.Z.</author><author>Xiong,S.</author><author>Zhang,Y.</author><author>Chin,L.K.</author><author>Chen,Y.Y.</author><author>Zhang,J.B.</author><author>Zhang,T.H.</author><author>Ser,W.</author><author>Larson,A.</author><author>Hoi,L.S.</author><author>Wu,J.H.</author><author>Chen,T.N.</author><author>Yang,Z.C.</author><author>Hao,Y.L.</author><author>Liedberg,B.</author><author>Yap,P.H.</author><author>Tsai,D.P.</author><author>Qiu,C.W.</author><author>Liu,A.Q.</author></authors></contributors><titles><title>Sculptingnanoparticledynamicsforsingle-bacteria-levelscreeninganddirectbinding-efficiencymeasurement</title><secondary-title>NatureCommunications</secondary-title></titles><periodical><full-title>NatureCommunications</full-title></periodical><volume>9</volume><dates><year>2018</year><pub-dates><date>Feb26</date></pub-dates></dates><isbn>2041-1723</isbn><accession-num>WOS:000426048900002</accession-num><urls><related-urls><url><GotoISI>://WOS:000426048900002</url></related-urls></urls><custom7>815</custom7><electronic-resource-num>10.1038/s41467-018-03156-5</electronic-resource-num></record></Cite></EndNote>[\o"Shi,2018#114"65]1.1.2光流控微腔激光器光流控微腔激光器，是在光流控技術(shù)基礎(chǔ)上結(jié)合激光技術(shù)產(chǎn)生的，與傳統(tǒng)的激光器一樣，也是由三部分構(gòu)成，分別是激光泵浦源、液體增益介質(zhì)和光學(xué)微腔。其中，泵浦源為光流控微腔激光器的光源，液體增益介質(zhì)是指可將光進(jìn)行放大的工作物質(zhì)，光學(xué)微腔為光提供一個反饋回路，使光可以在腔內(nèi)來回振蕩。光流控微腔激光器的構(gòu)件簡介如下：激光泵浦源由能量守恒定律可知，產(chǎn)生激光輸出的過程中需要有能量的來源，泵浦源就是光流控微腔激光產(chǎn)生的外界能量來源。在外界泵浦激光的激勵作用下，處在低能級的液體增益介質(zhì)分子會吸收外界泵浦光能量，之后躍遷至高能級產(chǎn)生受激輻射并出射激光。大多數(shù)光流控微腔激光器采用脈沖光泵浦的泵浦方式，常用調(diào)Q脈沖激光器作為泵浦源。為實現(xiàn)光流控激光的產(chǎn)生，激光泵浦源需滿足：（1）泵浦源的波長在液體增益介質(zhì)的吸收光譜范圍內(nèi)，最好為液體增益介質(zhì)的最大激發(fā)波長，因為通過吸收泵浦光能量，液體增益介質(zhì)才能實現(xiàn)粒子數(shù)反轉(zhuǎn)并產(chǎn)生受激輻射，如果泵浦源的波長與液體增益介質(zhì)的吸收光譜不匹配或者不在液體增益介質(zhì)的吸收光譜范圍內(nèi)，將導(dǎo)致泵浦效率下降，甚至使光流控激光器無法產(chǎn)生激光出射；（2）泵浦源的能量需達(dá)到閾值條件。在激光的產(chǎn)生過程中，足夠的泵浦光功率才能使液體增益介質(zhì)提供足夠大的增益，進(jìn)而克服光學(xué)微腔的損耗，產(chǎn)生激光出射；（3）激光泵浦源的穩(wěn)定性好。因為泵浦源的穩(wěn)定性決定了光流控微腔激光輸出的穩(wěn)定性。采用脈沖激光器作為泵浦源時，除必須滿足以上要求外，盡量選擇重復(fù)頻率可調(diào)的脈沖激光泵浦源，因為目前大多數(shù)可作為液體增益介質(zhì)的發(fā)光材料都存在光漂白效應(yīng)，在實驗過程中，可通過調(diào)節(jié)泵浦源的脈沖重復(fù)頻率，減弱光漂白效應(yīng)的影響。液體增益介質(zhì)増益介質(zhì)主要是用來實現(xiàn)粒子數(shù)反轉(zhuǎn)及受激輻射放大，即在激活狀態(tài)下通過受激輻射提供增益。不同的增益介質(zhì)具有不同的輸出特性，理想的增益介質(zhì)一般具有這些特點(diǎn)：（1）光子產(chǎn)率高，即熒光效率高，信號強(qiáng)度高；（2）對激發(fā)光有較強(qiáng)的吸收，降低背景信號；（3）激發(fā)光譜與發(fā)射光譜之間相距較遠(yuǎn)，降低背景信號的干擾和影響；（4）穩(wěn)定性好，不易受光、溫度、酸堿性等的影響。目前大多光流控微腔激光器采用有機(jī)染料及量子點(diǎn)作為增益介質(zhì)，也會采用生物熒光蛋白等生物材料作為增益介質(zhì)實現(xiàn)光流控生物微腔激光器。有機(jī)染料是最常見的激光染料，包含熒光素類染料、羅丹明類染料、Cy系列菁染料及Alexa系列染料等，其優(yōu)點(diǎn)是發(fā)射譜覆蓋的光譜范圍很寬，能覆蓋從200nm紫外至1300nm近紅外波段，缺點(diǎn)是光化學(xué)穩(wěn)定性差、光漂白和光降解現(xiàn)象較嚴(yán)重。量子點(diǎn)是一種由Ⅱ-Ⅵ或Ⅲ-Ⅴ族元素構(gòu)成的納米顆粒，其粒徑一般介于2-20nm之間，由于電子和空穴被量子限域，連續(xù)能帶結(jié)構(gòu)變成了具有分子特性的分立能級結(jié)構(gòu)，受激發(fā)后可以發(fā)射熒光。量子點(diǎn)作為一種發(fā)光材料，具有一些優(yōu)良特性，比如：可以通過調(diào)節(jié)其粒子尺寸控制發(fā)射光譜覆蓋整個可見光區(qū)域；光穩(wěn)定性較好，比常用的有機(jī)熒光染料羅丹明6G高100倍ADDINEN.CITE<EndNote><Cite><Author>Chan</Author><Year>1998</Year><RecNum>115</RecNum><DisplayText><styleface="superscript">[66]</style></DisplayText><record><rec-number>115</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1611983921">115</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Chan,WarrenC.W.</author><author>Nie,Shuming</author></authors></contributors><titles><title>QuantumDotBioconjugatesforUltrasensitiveNonisotopicDetection</title><secondary-title>Science</secondary-title></titles><periodical><full-title>Science</full-title></periodical><pages>2016-2018</pages><volume>281</volume><number>5385</number><dates><year>1998</year></dates><urls><related-urls><url>/content/sci/281/5385/2016.full.pdf</url></related-urls></urls><electronic-resource-num>10.1126/science.281.5385.2016</electronic-resource-num></record></Cite></EndNote>[\o"Chan,1998#115"66]；激發(fā)光譜寬且連續(xù)分布和發(fā)射光譜窄且對稱，降低了對泵浦源的要求；具有較大的斯托克斯位移，避免了發(fā)射光譜與激發(fā)光譜重疊，有利于熒光信號的檢測；熒光壽命長，可以持續(xù)20ns-50ns的時間；應(yīng)用于熒光標(biāo)記實現(xiàn)光流控生物微腔激光器時，生物相容性好，細(xì)胞毒性低。生物熒光蛋白作為生物發(fā)光現(xiàn)象的基礎(chǔ)，自綠色熒光蛋白基因在1992年從水母體內(nèi)克隆以來，從海洋生物物種中克隆到的新的熒光蛋白越來越多，已經(jīng)報道的熒光蛋白光譜分布于整個可見光區(qū)域，包括紅色熒光蛋白、橙色熒光蛋白、黃色熒光蛋白等等。生物熒光蛋白作為一類可視化的報告基因編碼蛋白，在特定波長下可激發(fā)產(chǎn)生明亮的熒光，具有熒光穩(wěn)定、易于檢測、對活細(xì)胞無毒害等特點(diǎn)。光學(xué)微腔光學(xué)微腔是指尺寸在幾微米至幾百微米的光學(xué)諧振腔ADDINEN.CITE<EndNote><Cite><Author>Feng</Author><Year>2018</Year><RecNum>130</RecNum><DisplayText><styleface="superscript">[67]</style></DisplayText><record><rec-number>130</rec-number><foreign-keys><keyapp="EN"db-id="fsp2sprfses59ge9tf3xezao9xp909p92tdw"timestamp="1612070006">130</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Feng,Z.</author><author>Bai,L.</author></authors></contributors><auth-address>CollegeofPhysicsandMaterialsEngineering,DalianNationalitiesUniversity,Dalian116600,China.fzq@. CollegeofMechanicalandElectronicEngineering,DalianNationalitiesUniversity,Dalian116600,China.bailan@.</auth-address><titles><title>AdvancesofOptofluidicMicrocavitiesforMicrolasersandBiosensors</title><secondary-title>Micromachines(Basel)</secondary-title></titles><periodical><full-title>Micromachines(Basel)</full-title></periodical><volume>9</volume><number>3</number><edition>2018/11/15</edition><keywords><