附錄附錄一：外文文獻Anultra-precisionpositioningstageisanewtypeofprecisionmotionmechanism,whichisbasedongas-lubricatedbearingandlinearmotordriving.Thestagecanovercometheshortagesresultfromthetraditionalpositioningstage,suchasmoretransmissions,biggerlagofresponseandexistednonlinearfrictionbetweenmovingpartsandstaticones.Thestagecanachievethenanometerpositioningaccuracyandrapidmoving,andhasbeenwidelyusedinsemiconductorlithography,precisionmeasurementandbiomedicalfield.Whenthepositioningaccuracyapproachesthetraditionmanufacturinglimits,tomeetwiththemorestabilityandfasterresponseofthestagehavesomedifficulty.Thefactors,forexamplethestiffnessesofthegas-lubricatedbearings,thelocationofthebearingsandtheconfigurationofstage,caninfluencethedynamicscharacteristicofthestage,obviously.Thefactorshowtoaffectthedynamicscharacteristicofthestageisstudiedinthedissertationandcarriedoutintooptimizationcorrespondingly.Theperformancehasbeenappliedinthedevelopmentof100nmlithographysuccessfully.Thestructuraldynamicsandthefiniteelementmethodareusedtostudythestiffnesshowtoaffectthedynamicscharacteristicofthestage.Thestiffnessesaremodifiedinthedigitalmodel.Naturalfrequenciesandgeneralizedstiffnessesofthestageareobtainedbythecalculation.Therelationshipbetweenthesupportingstiffnessandthenaturalfrequenciesofthestageisobtainedbyleastsquaremethod.Theoptimizationmethodsofthestiffnessaccountingforthegas-lubricatedbearingareobtainedthroughthesensitivityanalysis.Thepartialgridmobiletechnologyisputforwardinthestudyfirstly,andsuccessedinapplyingthegas-lubricatedbearingpositionoptimization.Whentheair-bearingsareinstalledindifferentpositions,themaximalratiobetweentheoptimalandworstpositioninthefirst5ordernaturalfrequenciesis6.0961,5.4736,1.9246,1.6210,1.0917and1.2972.Andtheresponseamplitudeischangedmanifestly,forexamplethemaximalratioisabout10timesintypicalpositions.Thedrivearmisthekeycomponentoftheultra-precisionpositioningstage.Thetopologyoptimizationtechnologyisusedtosolvethedesignofthedrivearm.Theperfectdesignisproposedthroughtheoptimization.Thedrivearmdesignproblemissolved.Basedontheresultsfromtheaboveresearchoftheultra-precisionpositioningstagewithgas-lubricatedbearings,theexperimentalmodalanalysisisconductedonthestage.Whenthebearingisonthegivenpositionandthestiffnessesofthebearingsareequalto70N/m,themaximalrelativeerroris3.24%comparedwiththeresultsfromtheexperimentandthefiniteelementanalysis.Regulatedthesupplypressureofthegas-lubricatedbearings,thedynamicscharacteristicofthestageischanged.Comparedwiththeresultsfromtheexperimentalmodelanalysisandthefiniteelementanalysisunderthedifferentsupplypressureorthestiffness,theresultsareinagreementwiththeexperimentalmodelanalysisandthefiniteelementanalysis.High-speedandhigh-precisionmotionisoneofthemostimportanttechniquesinelectronicmanufacturingmachines.InICpacking,withthereductioninchipsizeandtheincreaseinproductivity,itneedshigheracceleration,highervelocityandhigherprecision,whichchallengesdesigningsuchcontrollerswithhighperformance.ThisdissertationanalyzesthemotionoftheICpackagingmachinesfirsttofindoutthatitisarepetitivefastmotionbetweentwopointswithhighaccelerationandhighpositionaccuracy,whiletherequirementfortrackingerrorduringthemotionismodest.Thusitcanberegardedasarepetitivefastpoint-to-pointmotion.Thenindicesaboutthepoint-to-pointmotionareproposed.Atlast,basedonaservosystemwithhighacceleration,anX-Ypositionplatformdrivenbylinearmotors,somecontrollersareproposedtomaketheplatformpositionquicklywithhighprecision.Onthebasisofthekineticsandcontinuousequationsofthefluidmechanics,thelawisstudiedaboutthestaticcharacteristicsoftheaerostaticguideusingorificerestriction.Theinfluenceoftheorificeandthethicknessoftheairfilmonthecarryingcapacity,rigidityandairconsumptionhasbeenanalyzed.Thestructuredesignmethodoftheaerostaticguideispresented.Agroupofoptimizedparametersabouttheaerostaticguideispresented,andthestaticcharacteristicsofthepositioningtableareverified.Ahigh-speedandhigh-precisionair-supportedpositioningtablewhichisdrivenbyvoicecoilactuators,supportedanddecoupledbyaerostaticguideispresented.Itappliesvoicecoilactuatorstoreplacetheformalservomotors.Thiseliminatesthebacklashandfrictionbetweentheleadscrewandnut.Itappliestheaerostaticguidetoeliminatefriction.Thetwovoicecoilactuatorsaremountedonthebasebyusingtheair-supporteddecouplestructure,sotheinertiaofthetablecanbereduced.Thesemeaningsmaketheprecisionpositioningtableenhancetheperformancepossible.Withhighspeed,highpositioningaccuracy，highresolutionandreliability，XYtablecanimplementtwodimensionalmovementandhasbeenextensivelyusedinmachiningequipment.Asthekeymotionmoduleofintegratedcircuits(IC)bonder，theexcellentprecisionanddynamicperformanceofXYtableareimportantforbondingfacilities.Recently,withtheincreaseoftheICchipintegrationdegreeandgreatdemandofthemarket，highspeedandprecisionhavebecomethetrendindevelopmentofICbondingequipment.Now，mostoftheICbondingequipments,suchaswirebonderanddiebonder.usescrew-drivenXYtable.Leadscrewisusedastheswitchingmechanismtochangetherotarymotiontolinearmotion，whichresultsinmotiongapandlargeinertia,limitingtheprecision,speedandaccelerationofthetabletobeimprovedfurther.ByusinglinearmotionactuatorinplaceofrotatingelectricalmachinetodriveXYtable,thedeficiencyofscrew-drivenXYtablecanbeavoidedtosomeextent.ButneitherscrewdrivenXYtablenorlinearmotor-drivenXYtablecansolvetheresponselag,limitedspeedandacceleration,anditisdifficulttoenhancethepositioningaccuracy.Sothehighspeedandprecisionpositioningsystemshouldberesearchedbasedonnewdrivingsystemanddynamiccontrolalgorithm,anditwillbehelpfultopromotetheICpackagingequipmentdevelopment.Inthispaper,basedonvoicecoilactuator(VCA)directdrive,akindofXYtableusingnovelflexibledecouplingmechanismisproposed.ByconsideringthepositioningtableaslumpedmassspringsystemandusingtheNewtonmechanicsprincipleandelectromagnetictheory,thedynamicmodelofXYtableandtheVCAaredeveloped,andtheelectromechanicalcouplingcontrolmodelofthesystemisdevelopedthroughLaplacetransform.BasedondisplacementPIDcontroller,thelooplockedcontrollingalgorithmforthepositioningsystemisinvestigated，andtheprecisionexperimentiscarriedout.Thedesigned一XYtablemainlyconsistsofbase,voicecoilactuator,XandYmobiletables,flexibledecouplingmechanismandlineargrating.VCAisusedasthedrivingelement.RealizingthedirectdriveofXYtable.YtableismountedonthetopofXtable.yaxialVCAisconnectedwithYtablethroughtheflexibledecouplingmechanism,andsoyaxialVCAcanbefixedonthebase.Theinertiaofmotionreducingmakesitpossiblethatthepositioningtablemovesathighspeedandprecision.ThelineargratingmountedonthebaseisusedasthefeedbackelementofXtableandthatmountedonXtableisusedasthefeedbackelementofYtable.Specificflexibledecouplingmechanismcanbedescribedasfollows:yaxialVCAisfixedwithguidingfin,andtheguidingfinismountedonthebaseandcanmovealongslidewayinydirection.Oneendofthepreloadedconnectingrodismountedontheguidingfinandtheotherendisconnectedwithpreloadedspring,whiletheotherendofspringismountedonguidingfin.Frontandbackshaftingbearingsaremountedonguidingfinandrollalongfrontandbacklappingplates,respectively.y-axialVCAdrivesYtablebydrivingflexibledecouplingmechanism.AndwhenYtablemoveswithXtableindirection,frontandbackshaftingbearingsrollalongfrontandbacklappingplatesseparately,sothemotiondecouplingofandYmotioncanbeimplemented.Flexibledecouplingmechanismhasflexiblehingesandpreloadedspring.Flexiblehingescaneliminatethedeformationinterferencecausedbytheassemblyerror,andthesmallelasticdeformationcaneliminatetheinstantinterferencegeneratedbythelargeinertiaresultingfromthehighspeedandacceleration.PreloadedspringcaneliminatetheclearanceVCAisaspecialdirectdriveelement.ItsoperatingprincipleisLorentzforce.TheversatiledirectdrivecharacteristicsofVCA,suchashighspeedandacceleration,cogfree,infinitepositionsensitiveandprecisecontrolcharacteristicsmakeVCAaperfectdirect-driveservocontroldevice.Itisadaptiveinhighacce1eration,highfrequencymotivationandhighprecisionpositioningcontrolsystem.SotheLAL30005085一BVCAisselectedfromSMAC.anditspeakforceis202NMaximumdisplacement50mm,forceconstant86,andmaximummovingmass0.8kg.Inordertoimprovethesystemreliability,mostofthecomponentsareselectedfrommatureproducts.LinearmotionguidesVR3125PX17ZandRSH一9KMareselectedfromTHK.NK一912TNandNK一812TNshaftbearingsofINAareusedinthesystem.Thekeyparts,suchasX,Ytableandguidingfinaremadeofhardaluminum.InordertoimprovethespeedandpositioningaccuracyofXYtableusedforICbonder,basedonVCAdirectd