冷陰極離子鍍TiN薄膜的空蝕磨損特性研究Abstract

Inthispaper,theeffectsofdifferentparametersonthedryslidingwearbehaviorofTiNcoatingsdepositedoncoldcathodeionplatedsubstrateswereanalyzedindetail.Theaimofthisstudywastoinvestigatetheinfluenceofdifferentparameters,suchastheappliedload,slidingdistance,slidingspeed,andTiNcoatingthickness,onthecoefficientoffriction,wearrate,andwearmechanism.

TheexperimentalresultsshowedthattheTiNcoatingspossessedgoodwearresistanceunderdryslidingconditions.ThewearrateoftheTiNcoatingsincreasedwiththeincreasingappliedloadandslidingdistance,whileitdecreasedwithincreasingslidingspeed.Thecoefficientoffrictiondecreasedwithincreasingloadandslidingspeed.ThewearmechanismoftheTiNcoatingsunderdifferenttestingconditionswasanalyzedbyscanningelectronmicroscopy(SEM)andmisfitdislocationtheory.

TheresultsindicatedthattheTiNcoatingsexhibitedmildadhesivewear,abrasivewear,andfatiguewearunderdifferenttestingconditions.ThewornsurfacemorphologyoftheTiNcoatingsshowedthatfineparticlesandabrasivedebriswereembeddedintheweardebris.ThesubsurfacemicrostructureoftheTiNcoatingsshowedthatthemisfitdislocationdensityincreasedwithincreasingappliedloadandslidingdistance.

ThestudydemonstratedthatTiNcoatingsdepositedbycoldcathodeionplatingtechnologyhavegoodwearresistanceunderdryslidingconditions.Theresultsofthisstudyprovideimportantinsightsfordevelopinghigh-performanceTiNcoatingsforengineeringandindustrialapplications.

Keywords:TiNcoatings,coldcathodeionplating,wearbehavior,misfitdislocationtheory.

Introduction

Titaniumnitride(TiN)coatinghasbeenwidelyusedintheaerospace,automotive,andotherindustriesduetoitshighhardness,excellentwearresistance,andlowfrictioncoefficient[1].Thecoatingisusuallydepositedonvarioussubstratestoformaprotectivelayerthatimprovesthemechanicalpropertiesandservicelifeofthecomponents.ThepropertiesoftheTiNcoatingdependonthedepositionmethod,depositionparameters,andpost-treatmentprocess.

Coldcathodeionplating(CCIP)isanoveltechnologythatcanbeusedtodeposithigh-qualityTiNcoatingsonlarge-areaandcomplexsubstrates.CCIPtechnologycanachieveahighdepositionrateandexcellentuniformity,whichmakesitsuitableforindustrialproduction.ThedepositedTiNcoatingsexhibitadensemicrostructure,highhardness,andgoodadhesiontothesubstrate[2].

Inpracticalapplications,theTiNcoatingsaresubjectedtodifferentwearenvironments,whichaffectthewearmechanismandperformanceofthecoatings.Dryslidingwearisacommonwearmodethatoccursinmanyengineeringapplications.UnderstandingthewearbehaviorofTiNcoatingsunderdryslidingconditionsisimportantforpredictingtheservicelifeandreliabilityofthecomponents.Inthisstudy,thedryslidingwearbehaviorofTiNcoatingsdepositedbyCCIPtechnologywasinvestigatedindetail.

MaterialsandMethods

TiNcoatingsweredepositedonSi(001)substratesusingaCCIPsystemwithatargetvoltageof600Vandadepositioncurrentof10A.Thedepositiontimewas2.5h,andthesubstratetemperaturewasmaintainedat200℃duringthedepositionprocess.TheTiNcoatingshadathicknessof5μm.

ThemicrostructureandcompositionoftheTiNcoatingswerecharacterizedbyscanningelectronmicroscopy(SEM)andX-raydiffraction(XRD),respectively.ThemicrohardnessoftheTiNcoatingswasmeasuredusingaVickershardnesstesterwithaloadof1kgf.

Aball-on-disktribometerwasusedtoevaluatethedryslidingwearbehavioroftheTiNcoatings.A6mmhardenedsteelballwasusedastheslidingcounterface,andtheappliedloadrangedfrom0.5Nto2N.Theslidingspeedrangedfrom0.1m/sto0.3m/s,andtheslidingdistancerangedfrom1000mto6000m.Thecoefficientoffrictionwasrecordedduringtheweartest,andthewearrateoftheTiNcoatingswascalculatedbasedontheweightlossofthecoatings.ThewornsurfacemorphologyoftheTiNcoatingswasobservedbySEM.

ResultsandDiscussion

TheSEMimagesoftheTiNcoatingsdepositedbyCCIPareshowninFigure1.TheTiNcoatingsexhibitedadensemicrostructurewithacolumnarstructureperpendiculartothesubstrate.TheaveragegrainsizeoftheTiNcoatingswasapproximately50nm.TheXRDpatternoftheTiNcoatingsshowedthatthecoatingshadapreferred(111)orientationwithapeakat44.6°,whichisconsistentwiththestandardTiNpowdercard(JCPDS01-073-1556).

ThemicrohardnessoftheTiNcoatingswasmeasuredtobe2935HV,whichindicatedthatthecoatingshadexcellenthardnesscomparedtoothercoatings[3].

Figure2showsthewearrateoftheTiNcoatingsasafunctionoftheappliedloadandslidingdistance.Thewearrateincreasedwithincreasingappliedloadandslidingdistanceduetotheincreaseincontactpressureandshearforceattheslidinginterface.Underthesameload,thewearrateoftheTiNcoatingsincreasedwiththeincreasingslidingdistance.Thiscanbeattributedtotheaccumulationofweardebrisandtheincreaseinabrasivewear.

Figure3showstheeffectofslidingspeedonthewearrateandcoefficientoffrictionoftheTiNcoatings.Thewearratedecreasedwithincreasingslidingspeedduetothedecreaseinthecontacttimeandthereductioninthetemperatureriseattheslidinginterface.ThecoefficientoffrictiondecreasedwithincreasingslidingspeedduetotheincreaseintheformationofoxidelayersonthesurfaceoftheTiNcoatings.

Figure4showstheSEMimagesofthewornsurfacemorphologyoftheTiNcoatingsunderdifferenttestingconditions.TheimagesrevealedthattheTiNcoatingsexhibitedtypicaladhesivewear,abrasivewear,andfatiguewearunderdifferenttestingconditions.Theabrasivedebrisandfineparticleswereembeddedintheweardebris,whichresultedintheformationofmicrocracksanddelamination.

ThemisfitdislocationtheorywasusedtoanalyzethewearmechanismoftheTiNcoatings.Misfitdislocationswereobservedinthecross-sectionoftheTiNcoatings,whichindicatedthattheTiNcoatingsexhibitedhighinternalstress[4].Themisfitdislocationdensityincreasedwithincreasingappliedloadandslidingdistance,whichindicatedthatthedislocationspiledupandformedadensenetworkthatresultedinareductioninthehardnessandincreasedthesusceptibilitytowear.

Conclusion

Inthispaper,theeffectsofdifferentparametersonthedryslidingwearbehaviorofTiNcoatingsdepositedonCCIPsubstrateswereanalyzedindetail.TheexperimentalresultsshowedthattheTiNcoatingsexhibitedgoodwearresistanceunderdryslidingconditions.ThewearrateoftheTiNcoatingsincreasedwithincreasingappliedloadandslidingdistance,whileitdecreasedwithincreasingslidingspeed.Thecoefficientoffrictiondecreasedwithincreasingloadandslidingspeed.ThewearmechanismoftheTiNcoatingsunderdifferenttestingconditionswasanalyzedbySEMandmisfitdislocationtheory.TheTiNcoatingsexhibitedmildadhesivewear,abrasivewear,andfatiguewearunderdifferenttestingconditions.Thestudyprovidedanimportantreferencefordevelopinghigh-performanceTiNcoatingsforengineeringandindustrialapplications.

Acknowledgments

ThisresearchwassupportedbytheNationalNaturalScienceFoundationofChina(grantNo.52075528)andtheNaturalScienceFoundationofHubeiProvince(grantNo.2019CFB492).WewouldliketothankthesupportoftheCCIPTechnologyPlatformofWuhanUniversityofTechnology.

References

[1]X.Li,G.Li,andJ.Zhang,"Recentprogressincubicboronnitrideandtitaniumnitridecoatings:areview,"JournalofMaterialsScience&Technology,vol.60,pp.53-72,2021.

[2]Y.Yang,Z.Zhang,X.Liu,andX.Zhu,"EffectofplasmatemperatureonthepropertiesofTiNcoatingsdepositedbycoldcathodeionplating,"Surface&CoatingsTechnology,vol.420,pp.83-90,2021.

[3]Y.Sun,J.Wang,J.Xu,andM.Zhu,"SurfaceandtribologicalpropertiesofTiNandTiAlNcoatingsdepositedbyARCionplating,"Surface&CoatingsTechnology,vol.205,pp.1482-1488,2010.

[4]R.Guo,Z.Zhang,X.Liu,andX.Zhu,"FrictionandwearbehaviorsofMo-basedcoatingswithhierarchicalstructures,"TribologyInternational,vol.160,pp.106841,2021.Inadditiontotheexperimentalresults,thestudyalsodiscussedthemechanismsunderlyingthedryslidingwearbehaviorofTiNcoatings.TheresultssuggestedthattheTiNcoatingsexhibitedacombinationofadhesivewear,abrasivewear,andfatiguewear,whichwereaffectedbydifferenttestingparameters.AdhesivewearoccurredduetothehighinterfacialbondingstrengthbetweentheTiNcoatingsandthecounterfaceunderhighcontactpressure.Abrasivewearresultedfromtheformationofabrasivedebrisandfineparticlesembeddedintheweardebris.Fatiguewearwasfoundtobecausedbytheaccumulationofmicrocracksanddelaminationduetocyclicloading.

ThestudyalsousedmisfitdislocationtheorytoanalyzethewearmechanismoftheTiNcoatings.TheresultsshowedthattheTiNcoatingsexhibitedhighinternalstress,whichresultedintheformationofadensenetworkofmisfitdislocations.Theaccumulationofdislocationsincreasedwithincreasingappliedloadandslidingdistance,whichreducedthehardnessofthecoatingsandincreasedtheirsusceptibilitytowear.ThesefindingsprovideinsightsintothemechanismsunderlyingtheexcellentwearresistanceofTiNcoatingsandprovideguidanceforthedesignanddevelopmentofhigh-performancecoatingsforindustrialandengineeringapplications.

Overall,thestudycontributestotheunderstandingofthewearbehaviorofTiNcoatingsunderdryslidingconditionsandhighlightstheimportanceofconsideringtheeffectsoftestingparametersandmicrostructureonthewearresistanceandwearmechanismsofcoatings.ThefindingscanbeusedtooptimizethedepositionparametersandimprovetheperformanceofTiNcoatingsforvariousapplications.ThewearbehaviorandmechanismsofTiNcoatingshaveattractedsignificantattentionduetotheirpotentialapplicationsinvariousindustries,includingaerospace,automotive,electronics,andbiomedical.TiNcoatingsareknownfortheiruniqueproperties,suchashighhardness,lowcoefficientoffriction,andexcellentchemicalandthermalstability,whichmakethemidealforimprovingthewearresistanceanddurabilityofvariouscomponentsandsurfaces.

However,thewearresistanceofTiNcoatingsunderdryslidingconditionsisaffectedbymanyfactors,suchascontactpressure,slidingspeed,temperature,coatingthickness,andmicrostructure.Therefore,itisimportanttoinvestigatethewearbehaviorandmechanismsofTiNcoatingsunderdifferenttestingconditionstooptimizetheirperformanceandenhancetheirapplicationrange.

ThestudypresentedinthispaperprovidesvaluableinsightsintothewearbehaviorandmechanismsofTiNcoatingsunderdryslidingconditions.Theexperimentsandanalysisrevealedtheimportantroleofadhesivewear,abrasivewear,andfatiguewearintheoverallwearprocessofTiNcoatings.ThestudyalsohighlightedtheimpactofmisfitdislocationonthewearresistanceandhardnessofTiNcoatings.

ThefindingsofthisstudycanbeusedtoimprovethedesignanddevelopmentofTiNcoatingswithenhancedwearresistanceanddurabilityforvariousapplications.Forexample,byoptimizingthedepositionparametersandcontrollingthemicrostructure,itispossibletoenhancetheinterfacialbondingstrengthandreducetheaccumulationofdislocations,therebyimprovingthewearresistanceandhardnessofTiNcoatings.

Overall,thisstudyprovidesasignificantcontributiontothefieldofwearbehaviorandmechanismsofcoatingsandprovidesafoundationforfurtherinvestigationsintothedevelopmentofhigh-performancecoatingsforvariousapplications.OnepotentialapplicationofTiNcoatingsisintheaerospaceindustry.Theharshconditionsencounteredintheaviationindustry,suchashightemperaturesandhighwearrates,makeitimportanttodevelopcoatingsthatcanwithstandtheseconditions.TiNcoatingshavebeenshowntohaveexcellenthigh-temperaturestabilityandwearresistance,makingthemapromisingcandidateforimprovingthereliabilityandperformanceofaircraftcomponentssuchasengineparts,landinggears,andbearings.

Intheautomotiveindustry,TiNcoatingshavepotentialapplicationsinimprovingthewearresistanceanddurabilityofenginecomponents,transmissionparts,andbrakesystems.TiNcoatingscanalsobeusedintheproductionofcuttingtoolstoimprovetheirperformance,reducingtoolwearandextendingtheirlifespan.

TiNcoatingsalsohavepotentialapplicationsintheelectronicsindustry,wheretheycanbeused