【實驗?zāi)康腟ilvacoTCAD【實驗原理MOSFET基本工作原當外加柵壓為0時，P區(qū)將N+源漏區(qū)隔開，相當于兩個背對背PN結(jié)，即使在源漏之間將出現(xiàn)耗盡層，隨著VGS的增加，半導(dǎo)體表面會由耗盡層轉(zhuǎn)為反型。當VGS>VT時，表面就NVDSVDSVGSMOSFET轉(zhuǎn)移特VDS恒定時，柵源電壓VGS和漏源電流IDS的關(guān)系曲線即是MOSFET的轉(zhuǎn)移特性。對于NMOSFET，VDS，VGS=0IDS=0VGS>VTIDS>0。MOSFET【實驗儀器計算機、SlivacoTCAD【代碼說明【實驗內(nèi)容及記錄采用ATLAS器件仿真工具對NMOS器件電學特性仿真（以下加粗字為修改的參數(shù)I-V輸出特性曲gomesh solveinitsolvevdrain=2logsolvename=gatevgate=0vfinal=5vstep=0.2tonyplotNMOS_0.logextractname="vt"\-extractname="beta"slope(maxslope(curve(abs(v."gate"),abs(i."drain"))))*\extractname="theta"((max(abs(v."drain"))*$"beta")/max(abs(i."drain")))\(1.0/(max(abs(v."gate"))-($"vt")))logoffsolvevgate=3.3solvevgate=4.4outf=solve_tmp2solvevgate=5.5outf=solve_tmp3loadinfile=solve_tmp1logsolvename=drainvdrain=0vfinal=8vstep=0.5loadinfile=solve_tmp2logsolvename=drainvdrain=0vfinal=8vstep=0.5loadinfile=solve_tmp3logsolvename=drainvdrain=0vfinal=8vstep=0.5tonyplot1.log-overlay2.log3.logExtractinitinfile=extractname="vt"\-extractname="beta"slope(maxslope(curve(abs(v."gate"),abs(i."drain"))))*\extractname="theta"((max(abs(v."drain"))*$"beta")/max(abs(i."drain")))\(1.0/(max(abs(v."gate"))-vt=3.41699Vbeta=8.4438e-006A/V2theta=1.083521/V改變器件結(jié)構(gòu)參數(shù)和工藝參數(shù)，分析對NMOS器件主要電學特性的影go#meshspace.mult=1.0x.meshloc=-1.1spac=1x.meshloc=-1spac=0.1x.meshloc=-0.5spac=0.008x.meshloc=0.5spac=0.008x.meshloc=1spac=0.1x.meshloc=1.1spac=1#y.meshloc=-0.15spac=0.02y.meshloc=-0.13spac=0.02y.meshloc=0spac=0.05y.meshloc=1spac=0.05y.meshloc=2spac=1y.meshloc=4spac=2# number=1x.min=-1.1x.max=1.1y.min=-0.15y.max=0material=SiO2 number=2x.min=-1.1x.max=1.1y.min=0y.max=4material=Silicon number=3x.min=-1x.max=-0.5y.min=0y.max=0.5material=Silicon number=4x.min=0.5x.max=1y.min=0y.max=0.5material=Silicon###1=gate#2=drain name=gatenumber=1x.min=-0.55x.max=0.55y.min=-0.15y.max=-0.13 name=drainnumber=2x.min=0.7x.max=0.9y.min=-0.15y.max=0.01 name=sourcenumber=3x.min=-0.9x.max=-0.7y.min=-0.15y.max=0.01tOX0.13um0.130.18,0.150.2，負號不變tOX=0.08um，0.13um、0.18um tOX=0.13um tOX=0.18um tOX=0.08umvt=3.41699beta=8.4438e-006theta=1.08352tOX=0.13umvt=3.72553Vbeta=4.77198e-011A/V2theta=2.85871tOX=0.18umvt=3.62455Vbeta=1.22098e-014A/V2theta=1.93643tOXBeta減小，Theta改變溝道長度L，由1um改為 number=1x.min=-1.1x.max=1.1y.min=-0.1y.max=0 number=2x.min=-1.1x.max=1.1y.min=0y.max=4 number=3x.min=-1x.max=-0.3y.min=0y.max=0.5 number=4x.min=0.3x.max=1y.min=0y.max=0.5 vt=3.41699Vbeta=8.4438e-006A/V2theta=1.083521/VL=0.6umvt=3.32613Vbeta=2.20624e-005A/V2theta=0.886557L增大時，vt減小，beta增大，Thetadouniformconc=1e16p.typedirection=yregions=2douniformconc=1e19n.typedirection=yregions=3douniformconc=1e19n.typedirection=yregions=4P1e171e16