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Foreword

AccordingtotherequirementsofDocumentJIANBIAO[2009]No.88issuedbytheMinistryofHousingandUrban-RuralDevelopmentofthePeople'sRepublicofChina(MOHURD)-"NoticeonPrintingandDistributing'theDevelopmentandRevisionPlanofNationalEngineeringConstructionStandardsin2009'",thiscodeiscompletedbyElectronicEngineeringStandardsQuotaStationofElectronicIndustryStandardizationInstituteofMinistryofIndustryandInformationTechnologyofthePeople'sRepublicofChina,ChinaElectronicsEngineeringDesignInstitutetogetherwithrelevantunits.

Inthecompilationprocess,thecompilinggroupinvestigatedandvisitedthedomesticproductioncompanies,designcompaniesandconstructioncompaniesinliquidcrystaldisplayfield,collectedthedesignrequirementsofliquidcrystaldisplayfactories,carefullysummarizedthepracticalexperience,referredtorelevantinternationalstandardsandforeignadvancedstandards,andonthebasisofextensivelysolicitingopinions,itisrevisedrepeatedlyandfinalizedafterexamination.

Thiscodeconsistsof14chaptersand2appendixes,covering:generalprovisions,terms,basicrequirements,processdesign,siteselectionandmasterplan,architecturaldesign,structuraldesign,gases&.utilities,heating,ventilation,airconditioningandcleaning,watersupplyanddrainage,electricaldesign,anti-static,chemicalssupply,spacemanagementetc.

Theprovisionsprintedinboldtypearemandatoryonesandmustbeimplementedstrictly.

Thiscodeisunderthejurisdictionof,anditsmandatoryprovisionsareinterpretedbytheMinistryofHousingandUrban-RuralDevelopmentofthePeople'sRepublicofChina.TheMinistryofIndustryandInformationTechnologyisresponsible_foritsroutinemanagement,andChinaElectronicsEngineeringDesignInstituteisinchargeoftheexplanationoftechnicalspecifications.Allrelevantorganizationsarekindlyinvitedtosummarizeandaccumulateactualexperienceswhenimplementingthiscode.Ifanymodificationandsupplementisrequired,Relevantcommentsandrecommendations,whenevernecessary,shouldbesubmittedtoChinaElectronicsEngineeringDesignInstitute(Address:No.160WestFourthRingNorthRoad,HaidianDistrict,Beijing,Postcode:100142,Faxforreferenceoffuturerevision.

ChiefDevelopmentOrganizations,Co-DevelopmentOrganizations,ChiefDrafters,ChiefReviewers,ChiefTranslatorsandChiefTranslationReviewersofthiscodeareasfollows:

ChiefDevelopmentOrganizations:

ElectronicEngineeringStandardsQuotaStationofElectronicIndustryStandardizationInstituteofMinistryofIndustryandInformationTechnologyofthePeople'sRepublicofChina

ChinaElectronicsEngineeringDesignInstituteCo.,Ltd.

Co-DevelopmentOrganizations:

S.Y.Technology,Engineering&.ConstructionCo.,Ltd.

TheITElectronicsEleventhDesign&.ResearchInstituteScientificandTechnologicalEngineeringCorporationLimited

BOETechnologyGroupCo.,Ltd.

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ChinaElectronicsSystemEngineeringNo.2ConstructionCo.,Ltd.

TheFourthConstructionCo.,Ltd.ofChinaElectronicsSystemEngineering

ShanghaiHuiyaAluminumAlloyProductsCo.,Ltd(VEROVERIACORPORATION)

AirLiquide(China)HoldingCo.,Ltd.

ChiefDrafters:

HUANGWenshengLIQiangCHAOYangZHAOGuangpeng

ZHENGBingxiaoLIJiQINXueliXIAOHongmeiWANGLingxu

WUXiaobinZHONGJinghuaHANFangjunZHANGJiahongLIZhiweiWANGKaiyuanDUBaoqiangSUNYumingFENGWeizhongLIWei

HEZhengshan

ChiefReviewers:

ZHANGBaizheXUEChangliSHAOQingliangGUANXudongKANQiangYEMingSHAOXiaogangRENXiangdongSUNZhen'an

ChiefTranslators:

HUANGWenshengSUNHuachengLIULiZHAOQingyu

ChiefTranslationReviewers:

SUYafengMAJiangjun,ZHANGJianping

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Contents

1Generalprovisions (1)

2Terms (2)

3Basicrequirements (3)

4Processdesign (4)

4.1Generalrequirements (4)

4.2Basicprocess (4)

4.3Processlayout (4)

4.4quipmentconfiguration (5)

5Siteselectionandmasterplan (6)

5.1Siteselection (6)

5.2itemasterplan (6)

6Architecturaldesign (8)

6.1Generalrequirements (8)

6.2Fireprotection (8)

7Structuraldesign (10)

7.1Generalrequirements (10)

7.2Structuraldesign (10)

7.3Vibrationcontrolstandardf (11)

7.4Vibrationcontroldesignandtest (11)

7.5Pedesalesgn (11)

8Gases&utilities (13)

8.1Coolingandheatingsource (13)

8.2Bulkgasessupply (14)

8.3Specialgasessupply (15)

8.4Compressedairsupply (16)

8.5Processandcleaningvacuum (16)

9Heating,ventilation,airconditioningandcleaning (18)

9.1Generalrequirements (18)

9.2Heating,ventilationandwastegastreatment (18)

9.3Airconditioningandcleaning (20)

9.4Smokeventing (21)

10Watersupplyanddrainage (22)

10.1Generalrequirements (22)

10.2Generalwater (22)

10.3Purewater (22)

10.4Coolingwater (23)

10.5Wastewatertreatment (23)

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10.6Firewatersupplyandfire-extinguishingfacilities (23)

11Electricaldesign (25)

11.1Powersupplyandillumination (25)

11.2Lightningprotectionandgroundconnection (26)

11.3Firealarmandautomaticcontrolsystem (26)

11.4Automaticcontrol (27)

12Anti-static (29)

12.1Generalrequirements (29)

12.2Anti-staticmeasures (29)

12.3Ani-statigroundconecion (30)

13Chemicalssupply (32)

13.1Generalrequirements (32)

13.2Chemicalsstorageanddelivery (32)

13.3Tubeandvalve (34)

13.4Wastechemicalscollectionandrecycle (34)

14Spacemanagement (36)

14.1Generalrequirements (36)

14.2Pipelinelayout (36)

14.3Pipesupportsandhangers (37)

AppendixATypicalTFT-LCDprocessflow (38)

AppendixBStandardvibrationcontrolcurve x……(40)

Explanationofwordinginthiscode (41)

Listofquotedstandards (42)

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1Generalprovisions

1.0.1Thiscodeispreparedwithaviewtoimplementtherelevantnationallawsandregulationsinthedesignofthethinfilmtransistorliquidcrystaldisplay(TFT-LCD)plant,tomeettheproductionrequirementsofthethinfilmtransistorliquidcrystaldisplay,toensurethesafetyofpersonalandproperty,toachievesafetyandreliability,energysavingandenvironmentalprotection,advancedtechnology,cost-effectivenessandqualityassurance.

1.0.2Thiscodeisapplicabletotheengineeringdesignofnewconstruction,renovationandextensionofthinfilmtransistorliquidcrystaldisplayplants.

1.0.3Inadditiontotherequirementsinthiscode,thedesignofthethinfilmtransistorliquidcrystaldisplay(TFT-LCD)plantshallalsomeettherequirementsofthecurrentrelevantstandardsofthenation.

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2Terms

2.0.1Thinfilmtransistorliquidcrystaldisplay(TFT-LCD)

Liquidcrystaldisplaywithpixeldrivendirectlybyactivematrixandusingthin-filmtransistorsascontrolpixelswitches.

2.0.2Automatedmaterialhandlingsystem(AMHS)

Thesystemthataseriesofrelatedautomationtoolsanddevicecoordinatelyandreasonablymoving,storingandcontrollingmaterialinaprocessorlogicalactionsystem.

2.0.3Glasssubstrate

Thebasicpartofliquidcrystaldisplaythatcomposedofthinglasssheetwithanextremelyflatsurface.

2.0.4Array

Theprocesstofabricateregulararrayofspecificthinfilmtransistors(switchingdevices)toformdatalines,storagecapacitorsandsignallinesbycoating,photolithographyetchingandothersemiconductorprocesstechnologiesonaglasssubstrate.

2.0.5Colorfilter(CF)

Thefilterswiththreeprimarycolorsofred,greenandbluearrangedregularlyonatransparentsubstratetopassonlytherequiredcolorlight,alsoknownascolorfilters.

2.0.6Cell

Theliquidcrystalcel1(screen)processofassemblingthepreparedArrayglasssubstrateandCFglasssubstrateofthethinfilmtransistorliquidcrystaldisplaytogether,fillingliquidcrystalintothespacebetweentwoglasssubstrates,andaddinganadaptedelectricfieldtodisplayimages.

2.0.7Spacemanagement

Thedesignofthecoordinationbetweenvariousdisciplinesforaslargeasthebuildinglayoutoftheentireplantsite,undergroundpipingorassmallasanindividualbuildinginordertoeffectivelyusethespaceandshortentheworkprocess.

2.0.8Dryetchingprocess

Themethodofetchingsubstratesurfaceandetchedsubstanceingasphase.

2.0.9Plasmaenhancedchemicalvapordeposition(PECVD)

Thereactionofcarryingoutchemicalvapordepositionatlowertemperaturebyutilizingtheactivitypromotingreactionofplasma.

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3Basicrequirements

3.0.1ThedesignoftheTFT-LCDplantshalluseresourcesreasonably,protecttheenvironment,preventandreducethepollutionandharmofwastegas,wastewater,wastechemical,wasteresidue,dust,noise,vibrationandelectromagneticradiationgeneratedintheproductionandconstructionactivitiestotheenvironment.

3.0.2ThedesignoftheTFT-LCDplantshallbeinaccordancewiththefollowingrequirements:

1Accordingtothecharacteristicsoftheproductionprocess,newtechnologies,newequipmentandnewmaterialsforenergyconservationandenvironmentalprotectionshallbeadopted.

2Shallmeettherequirementsoftoolsinstallation,commissioningandoverhaul,safetyproduction,andmaintenancemanagement.

3Measuresshallbetakentomeettherequirementsoffiresafety.

4Energysavingmeasuresshallbetaken.

5ShallmeettherequirementofhugespaceandcleanenvironmentfortheproductionofTFT-LCD.

3.0.3ThedesigncapabilityoftheTFT-LCDproductionlineshallbeinaccordancewiththerequirementsofeconomicscale,andlthedesignshallreserveconditionsforfutureproductiondevelopmentorprocessimprovementaccordingtotheenterprisedevelopmentplan.

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4Processdesign

4.1Generalrequirements

4.1.1Theprocessdesignshallbeinaccordancewiththefollowingrequirements:

1Shallensureproductionefficiencyandproductquality.

2Shallpreventandreducethedamageandharmtoworkers'healthcausedbyoccupationaldiseasehazards,andreducethelaborintensityofworkers.

3Shallbeflexibleandadaptable.

4Shallbebeneficialtoreduceengineeringconstructioncostandrunningcost.

4.1.2Theproductionspaceandlayout,productionenvironmentparametersandutilitysupplydeterminedintheprocessdesignshallmeettherequirementsofprocess,andthenecessaryconditionsshallbereservedfortheupgradeandtransformationofproductiontechnology.

4.1.3Theproductiondepartmentdirectlyrelatedtotheproductionprocessshouldadoptacontinuouslyrunningproductionorganizationmethod,andtheworkshiftsofotherauxiliaryproductiondepartmentsmaybedeterminedaccordingtoproductionneeds.

4.2Basicprocess

4.2.1TheproductionprocessmaybedeterminedaccordingtothecontentsofproceduresofthevariousprocesslistedinAppendixAofthiscode.

4.2.2Themainproduction/processshallbecompleteandmatch,Array,CFandCellprocessshouldbesetinthesameplant.

4.2.3Theauxiliaryproductionandtechnicalservicefacílitiesrelatedtothemainproductionprocessshallbesetupintheplant.

4.3Processlayout

4.3.1TheprocesslayoutofthekeyproductionareaofArray,CFandCellshallbeinaccordancewiththefollowingrequirements:

1Thecombinationofprocesslayoutshallbeaccordingtotheprocesscharacteristicsandenvironmentalrequirements,andthemultiple-storeyarrangementshouldbeadopted.

2Theprocesslayoutshallpreventtheeffectsofvibration,electromagneticradiation,heatradiationandairpollutionbetweenprocesstools.

3Theentrancesofpeopleandlogisticsintotheproductionareashallbesetupseparately,andthecorrespondingcleanfacilitiesforpersonalandmaterialshallbesetup.

4Theproductionareashallbeequippedwithequipmentmoveinentrancesandpassage;Equipmentliftingandloadingplatformsshallbeinstalledwhentheinstallationheightoftheequipmentintheproductionareais1.5mhigherthanoutsidefloor.

5Theprocesstoolsineachprocesssectionshallbearrangedaccordingtotheprocessflowandtheprincipleofprocessconcentration.

6Theproductionauxiliarydepartmentcloselylinkedtoproductionshallbelocatedclosetothe

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productionarea.

4.3.2Whenvisitingfacilitiesaresetupintheproductionarea,theenvironmentofthevisitingareaanditspassagesshallbeisolatedfromtheproductionenvironment,andtheflowoflogisticsandpersonnelevacuationpassagesintheproductionareashallbekeptclear.

4.3.3Theplantshallbeequippedwithstoragefacilitiesforrawandauxiliarymaterialsandwaste,andthewarehouseshallbeinaccordancewiththefollowingrequirements:

1Accordingtothephysicalandchemicalcharacteristicsofthestoredmaterialsandstorageenvironmentrequirements,variouswarehousesshallbesetupbycategory.ThephysicalandchemicalcharacteristicsofthechemicalsshallbesubjecttothechemicalMaterialSafetyDataSheets(MSDS)providedbytherelevantchemicalsuppliers,andthedesignofthechemicalstorageareashallmeettherequirementsoftherelevantprovisionsofArticles13.2.1-13.2.6inthiscode.

2Thewarehousesofrawandauxiliarymaterialsandproductshallbeequippedwithloadingandunloadingplatforms.

4.3.4Whenthereisanairplenuminthekeyproductionarea,equipmenthandlingandmaintenancepassageshallbeprovidedintheplenum.

4.4Equipmentconfiguration

4.4.1TheselectionofproductiontoolsandauxiliarytoolsshallmeettherequirementsofthecurrentnationalstandardGB50472CodeforDesignofElectronicIndustryCleanRoom,andtoolswithhighautomation,lowenergyconsumptionandlowemissionsshouldbeused.

4.4.2GlasssubstratecassettesorotherspecialtransportationproductsshallbeusedinArray,CFandCellprocess,andAutomaticMaterialHandlingSystem(AMHS)shouldbeusedinthebatchproductionline.Whentheproductionareaismulti-storey,automaticverticaltransportationequipmentshouldbesetupforproducthandlingbetweenthecross-storeyproductionareas.

4.4.3Theareaofchemicalvapordepositionandphysicalvapordepositionshallbeequippedwithdedicatedcleanroomtypemaintenanceliftingequipment.

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5Siteselectionandmasterplan

5.1Siteselection

5.1.1Thesiteselectionshallbeinaccordancewiththerequirementsofindustriallayoutandregionalconstructionplanning.Theconstructionsiteshallbeselectedwithcomparisoninrespectsofconstructionscale,rawmaterialsource,transportation,powersource,watersource,gassource,geotechnicalconditions,inter-corporationlinks,siteconditions,environments,marketflowetc.

5.1.2Thesiteselectionshallbeinaccordancewiththefollowingrequirements:

1Shallavoidproductionhazardsorharmfulfactorsaffectingthesurroundingpeoplelivingoractivityenvironment.

2Shallavoidareaswithhighatmosphericdustcontentandareascontainingchemicalsubstancesthataffectprocessproduction.

3Thevibrationsourceandvibrationvalueoftheconstructionsiteshallnotaffecttheprocessproduction.

5.1.3Theconstructionsiteshallhavewatersource,powersupplyandgaswhicharenecessaryforproduction,livingandfuturedevelopmeni,andthepowerandwatersupplylinesshallbeshortandreliable.

5.1.4Thesiteselectionshallmeettheneedsoftheenterprise'slong-termdevelopmentplanning.

5.1.5Constructionsiteshallnotbeselectedinareaswithcomplicatedgeotechnicalandhydrologicalconditions,orseismicfortificationintensityhigherthan8degrees,orvaluableminingareas.

5.1.6TheTFT-LCDplantshallbedesignedasclassIfloodcontrolstandardinthecurrentnationalstandardGB50201StandardforFloodControl,andthesitedesignelevationshallbe0.5mabovethedesignedfrequencywaterlevel.

5.2Sitemasterplan

5.2.1Thegeneralplanningoftheplantshallbeinaccordancewiththeplanningrequirementsbylocalauthoritieshavingjurisdiction,andshallbebenefittothecooperationwithneighboringindustrialenterprisesintransportation,utilityfacilities,comprehensiveutilizationandlivingfacilities.

5.2.2Themasterplanoftheplantshallbeinaccordancewiththefollowingrequirements:

1Themasterplanshallbeinaccordancewiththeproductionprocessflowandmicro-vibrationcontrolrequirements.Accordingtotheproductionprocesscharacteristicsandthespecificrequirementsofvariousfunctionalareas,thefabricationbuildingshouldbecombinedandtobemulti-storey.

2Theproductionarea,utilityauxiliaryarea,storagearea,officeandlivingareashallbearrangedreasonably.Allsupportandauxiliaryfacilitiesshouldbeclosetotheworkshopstheyserved,andutilitysupplyfacilitiesshouldbeclosetotheloadcenter.

3Theshapeofthebuildingshouldberegular,andadministrativeofficesandlivingfacilitiesshouldbecentralized.

4Thetransportationroutesofrawmaterialsshallbeshortandconvenient,andcross-interferencebetweenlogisticsandpeopleflowshallbeavoided.

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5.2.3ModificationorexpansionofexistingTFT-LCDplantshallbemasterplannedmakingreasonableuseoftheexistingfacilitiesandreducingtheimpactstoexistingproductionoperation.

5.2.4Forfactorybuildingswithmicro-vibrationcontrolrequirements,existingandsimulatedvibrationsourcesshallbeactuallymeasuredforcomparisontotolerablevaluebeforesitedecision.

5.2.5Thewarehouses,tanks,andstorageyardsstoringflammable,explosiveandtoxicmaterialsshouldbearrangedatthewindwardsideoftheannualminimumfrequencyofthesite.Andshallbeawayfromfiresources,mainbuildings(structures),andcrowdedarea.Firedike,protectionwallsorcurbsto

preventaccidentalleakageshallbeprovidedaroundliquidtankscomplyingwiththecurrentnationalstandardGB50016CodeforFireProtectionDesignofBuildings.Dedicatedfencesandentranceshouldbeprovidedforstoragearea.

5.2.6Thedistancebetweenwarehouses,tanks,yardsandbuildings,roadsshallmeettherequirementsofthecurrentnationalstandardGB50016CodeforFireProtectionDesignofBuildings.

5.2.7Siteelevationdesignshouldmakefulluseoftheoriginalterraintoreduceearthwork.Whenusingstepsiteelevation,buildingsorstructureswithcloseproductionlinksshallbearrangedonthesameoradjacentsteps.

5.2.8Theexteriorpipelinesofwatersupply,drainage,circulatingwaterandcablesshouldbelaidunderground.Andthepipelinesofflammableandcombustibleliquids,gas,hotwater,steam,compressedair,bulkgas,specialgasefc.shouldbeonpiperacksabove-ground.Allpipelineslayout

shallmeettherequirementsofcurrentnationalstandardGB50187CodeforDesignofGeneralLayoutofIndustrialEnterprises.

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6Architecturaldesign

6.1Generalrequirements

6.1.1Thearchitecturalplanandspaceofthefactorybuildingsshallbeadaptedtotheflexibilityofproductiondevelopmentandshallmeettherequirementsofproductionprocesstransformationandproductionscaleexpansion.

6.1.2Overheadbridgesshouldbeprovidedforpeopleandlogistieflowbetweenfabricationbuilding,officebuildings,utilitybuildingsinthinfilmtransistorliquidcrystaldisplayplant.

6.1.3Expansionjointsincleanproductionzoneoffactorybuildingsshouldnotbeinstalled.

6.1.4Fabricationbuildingenclosurematerialsshallmeetproductionenvironmentrequirementsinrespectofairtightness,thermalinsulation,fireprevention,moistureresistance,dustprevention,durability,andeasycleaning.

6.1.5ThelimitationoftheheattransfercoeficientofthefactorybuildingenclosureshallmeettherequirementsofthecurrentnationalstandardGB50710CodeforDesignofEnergyConservationofElectronicIndustry.Theinnersurfacetemperatureoftheexteriorwalls,exteriorwindowsandroofshallnotbelowerthantheindoorairdewpointtemperature.

6.1.6Entranceandplatformforprocesstoolsandutilityequipmentmoveinshallbeprovidedinfactorybuildings.

6.1.7Passagesshallbeconsideredforprocesstoolsandutilityequipmentmoveinandinstallationinthefactorybuilding.Width/ofthepassageshallallowpersonneloperation,materialtransportation,equipmentinstallationandmaintenance.

6.1.8Theraisedfloorlocatedinmove-inpassageshallbestrongenoughtowithstandmove-inload.

6.1.9TheinteriordecorationofthefactorybuildingshallmeettherequirementsofthecurrentnationalstandardsGB50222CodeforFireProtectioninDesignofInteriorDecorationofBuildingsandGB

50472CodeforDesignofElectronicIndustryCleanRoom.

6.2Fireprotection

6.2.1ThefireresistanceclassofthefactorybuildingofTFT-LCDshallnotbelowerthanclassⅡ.

6.2.2TheclassificationoffirehazardsofeachworkshopinfactorybuildingshallmeettherequirementsofthecurrentnationalstandardsGB50016CodeforFireProtectionDesignofBuildingsandGB50472CodeforDesignofElectronicIndustryCleanRoom.

6.2.3ThedivisionoffirecompartmentsinfactorybuildingshallmeettherequirementsofthecurrentnationalstandardsGB50016CodeforFireProtectionDesignofBuildingsandGB50472CodeforDesignofElectronicIndustryCleanRoom.IncleanroomofArray,Cell,CF,Module,maximumareaofeachfirecompartmentmaybeallowedasproductiondemand,providedthatfirealarmandextinguishing

devicesareequippedinkeyprocesstools,andearlysmokedetectionsystemwithsensitivitygreaterthan0.01%obs/misinstalledinreturnairflow.

6.2.4Thesafetyexitsoffactorybuildingshallbeinaccordancewithfollowingrequirements:

1ThequantityofsafetyexitsshallmeettherequirementsofthecurrentnationalstandardsGB

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50016CodeforFireProtectionDesignofBuildingsandGB50472CodeforDesignofElectronicIndustryCleanRoom.

2ThedistancefromanypointinfactorybuildingtothenearestsafeexitshallmeettherequirementsofthecurrentnationalstandardsGB50016CodeforFireProtectionDesignofBuildingsandGB50472CodeforDesignofElectronicIndustryCleanRoom.

3IncleanroomofArray,Cell,CF,andModulebuilding,thesafetyevacuationdistanceshallbenolargerthanmultiply1.5ofdistancespecifiedinItem2above,providedthatfirealarmandextinguishingdevicesareequippedinkeyprocesstools,andearlysmokedetectionsystemwithsensitivitygreaterthan0.01%obs/misinstalledinreturnairflow.andwhencleanroomworkerdensityislessthan0.02person/m2,safetyevacuationdistanceshallbenolargerthan120m.

4InArray,Cell,CF,andModulebuilding,whencleanroomworkerdensityislessthan0.02person/m2,andthecleanroomandtechnicalsupportareaarelocatedindifferentfirecompartments,thesafetyexitmaybeshared.Safetyexitsshallbeprovidedwithsharedvestibuleorsafepassage.

6.2.5Doorsorwindowsonexteriorwallforfirefighteraccessintofactorybuildingshallbedesignedforcleanroomagainstexteriorwalloneachfloor,Additionaldedicatedfire-fightingaccessesarerequiredwherethedistancebetweentheopeningsislargerthan80m.Thedesignofthefire-fightingaccessshallmeettherequirementsofthecurrentnationalstandardGB50073CodeforDesignofCleanRoom.

6.2.6Exceptforthematerialentrance,theautomaticverticalhandlingsystempassingthroughdifferentfabricationfloorsshallbeenclosedwithnon-combustiblematerialoffireratenolessthan0.4h.ThefireprotectionmeasureformaterialentranceshallbecomplywithArticle10.6.6ofthiscode.

6.2.7Thedistributionroomfofflammableandexplosivechemicalsandgasesshallbearrangedagainsttheexteriorwall,andthepressurereliefareaoftheroomshallmeettherequirementsofthecurrentnationalstandardGB50016CodeforFireProtectionDesignofBuildings.Locationrightabove,beloworadjacenttocrowdedroomorevacuationpassageisprohibited.

6.2.8Non-sparkinganti-staticfloorfinishshallbeusedinstorageanddistributionroomsforcombustibleandlexplosivechemicals.Corrosion-resistantfloorinishshallbeusedinstorageanddistributionroomsforcorrosivechemicals.

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7Structuraldesign

7.1Generalrequirements

7.1.1TheseismicfortificationofArray,CFandCellbuildingshouldbecategorizedasimportantprotection.

7.1.2ThedistancebetweenadjacentbeamsofproductionfloorofArray,CFandCellbuildingorthedistancebetweenadjacentopeningsonthebeamlessthickfloorslabshouldbemultipleof600mm.

7.1.3ThestructuraldesignofArray,CFandCellbuildingshallmeetthemicro-vibrationcontrolstandardsoftheprocesstools.

7.1.4Rubberisolatorshallnotbeinstalledbetweenupperstructureandbuildingfoundation.

7.2Structuraldesign

7.2.1Reinforcedconcretestructureorsteel-concretemixedstructureshouldbeadoptedforthefactorybuilding.

7.2.2Structuralexpansionjointshouldbeinstalledbetweenkeyareaandsupportarea,officeareaoffabricationbuilding.

7.2.3Expansionjointshouldnotbeinstalledbetweenthefloorstructureofkeyareaandthemainstructuresupportingtheroof.

7.2.4Dependingoncolumngridandbayspacing,theroofsystemofthe