附錄附錄1：英文原文Ultraprecisio processing,andultra-high-speed processing technologies First, Technical overview Sophisticated, ultra-precision processing is a relative concept but as a general increase in the level of craftsmanship, different divisions have different age limits, but no strict uniform standards. From the current level of mechanical processing technology and ultra precision processing usually processing precision0.3m ， Surface roughness Ra value0.03m. Hypervelocity processing technology refers to the cutlery used paint materials through greatly increased cutting speed and chin to improve the material removal rate of speed, accuracy and Processing processing quality modern processing technology. Hypervelocity scope for cutting speed processing different working materials, different ways and different machines. Currently, the general view, ultra high speed machining of the cutting speed range of materials : aluminum alloy over 1600m /min, cast iron for 1500m /min, ultra heat -300m /min nickel alloys, titanium alloys to 150 1000m /min, fibre reinforced plastics for 2000 9000m /min. The cutting speed range of alternative processes for Chexue 700 7000m /min, Xianxiao 300 6000m /min, drilling 200 1100m /min, grinding 250m /s above, and so on. Ultra high speed processing technologies include : ultra high speed machining and grinding research mechanisms, hypervelocity main modules manufacturing technology, ultra high speed into the module manufacturing technology, ultra high-speed processing with cutlery and abrasive manufacturing technology, ultra high speed processing online automatic detection and control technologies. Ultra precision processing refers to the current processing components size precision than 0.1m, the surface roughness Ra 0.025 m, and the machine tools used in the resolution positioning accuracy and repetitive than 0.01m processing technology, also known as the Asian micrometres processing technology, and is to nano-class processing technology development. Ultra precision processing technology include : ultra precision processing experiment, ultra precision processing equipment manufacturing technology research, tools and Renmo super precision processing technology research, technology and ultra-precision measurement error compensation technology research, ultra precision processing work study environmental conditions. Second, the current situation and development trend 1）Ultra high speed processing Developed ultra-high-speed processing of industrial research earlier, the high level. In this technology, in a leading position in the country mainly Germany , Japan , the United States , Italy . In hypervelocity processing technology, the frame material to achieve ultra high speed processing tool is the prerequisite and preconditions, ultra high speed grinding machine technology is a modern method of hypervelocity processing techniques, and high-speed digital machine tools and processing center is the key to achieving ultra-high-speed processing equipment. Currently, cutlery materials from carbon steel and alloy tool steel, the high-speed steel, hard alloy steel, ceramic materials, the development of artificial diamonds and Jujing diamond (PCD), and Ju Jing cubic feet Danhuapeng Danhuapeng (CBN). Cutting speed is as innovative materials and cutlery from the former 12m /min to 1200m /min above. Abrasive Wheels materials used in the past primarily corundum is, silicon carbide is, the United States G. E companies in the 1950s, synthetic diamonds success, the 1960s was the first success CBN. 1990s ceramic or resin combination agents CBN grinding wheel, diamond grinding wheel speed up 125m /s lines, some up to 150m /s and single-level electroplating CBN grinding wheel to 250m /s. It was felt that with the new cutlery (Saint), the continuous development of materials, cutting speed to be doubled every decade, the emergence of subsonic and supersonic processing will not be too far off. In hypervelocity cutting technology, developed in 1976 by a U.S. company Vought Taiwan hypervelocity milling machine, the maximum rotational speed of 20000rpm reached. Special attention is the Federal University of production engineering and machine tools industry Darmstadt Institute (PTW) from 1978 began a systematic study of hypervelocity alternative mechanisms for the various metals and non-metallic materials for high-speed machining tests Federal dozens of enterprises and organizations provided more than 2,000 million DM in support of the study, since the late 1980s, since the commercialization of emerging ultra-high-speed machining machine tools, super-high-speed machine tools from a single super high-speed milling machine into hypervelocity vehicles milling machine, drilling of high-speed milling machine and processing centres. Switzerland , the United Kingdom , Japan has launched its ultra high speed machine tools. Japan Hitachi smart machines HG400III maximum rotational speed of the speech-processing center 36000 40000r/min, workstations rapid mobile speed 36 40m /min. Using linear electrical U.S.-based high-speed processing HVM800 Ingersoll companies to move into the center for 60m /min speed. In high-speed and ultra-high-speed grinding technology, people developed high-speed, ultra high speed grinding, deep relief for grinding into, deep into the fast grinding (HEDG), multi-piece grinding wheel and multi-grinding wheel-grinding, and many other high-speed efficient grinding, high-speed efficient grinding technology in the past 20 years has been considerable development and application. Germany Guehring Automation Company in 1983 created the first time the worlds most powerful 60kw Taiwan Firm CBN grinding wheel grinder, versus reach 140 160m /s. A German enjoy Industrial University, the University of Bremen in high-skills research achieved world-recognized achievements, and actively in the aluminum alloy, titanium alloys, nickel alloys, and other difficult for recreational materials for the efficient processing of deep research skills. German Bosch company processing applications CBN grinding wheel speed grinding wheel Chixing using hypervelocity grinding electroplating CBN grinding wheel to replace the original roll teeth and shaving teeth processing techniques, and materials processing 16MnCr5 gear Chixing, Vs= 155m /s its reach 811mm 3 /mm.s Q, German companies use high-speed Kapp deep processing lumber mill parts Shencao, working materials for 100Cr6 bearing steel, using electroplating CBN grinding wheel, reached 300m /s versus the Q= 140mm 3 /mm.s, grinding processing, the leaves will quench pump rotors a Zhuangjia 10, a meticulous rotor shafts, grinding, her chin to speed 1.2m /min average processing time within 10 seconds of each rotor, Caokuan accuracy assured in two 16ug m, a grinding wheel chain 1,300 working. Currently, the Japanese industry has 200m /s practical grinding pace, the United States Conneticut University grinding Research Center , 1996 its intention Bamboo high-speed grinder, the grinding wheel grinding maximum speed of 250m /s. 2） Ultra precision processing Ultra precision processing technology in the leading position internationally in the countries the United States , Britain and Japan . These countries not only ultra-precision processing technology sets the overall high level, but also a very high degree of commercialization. The United States is conducting the first study ultra-precision processing technology, and so far its leading position in the world countries. Back in the 1950s, because of space needs in the development of sophisticated technology, the United States developed the first ultra-precision machining diamond cutlery technology called SPDT technology (Single Point Diamond Turning), or micro-inch technology (1 micro-inch =0.025m) and the development of corresponding ultra-precision air bearing spindle machine tools. For processing laser nuclear fusion reflection mirror, and tactical missiles and manned spacecraft with large spherical non-spherical parts, and so on. If the United States LLL Y-12 factories and laboratories in support of the United States Department of Energy in July 1983 successfully developed large ultra-precision diamond lathe DTM-3 type, the machine tool chain largest parts 2100mm , weight 4500kg laser nuclear fusion using a mirror reflection of the various metals, using infrared devices spare parts, large celestial telescopes (including X-ray celestial telescopes). The processing precision machine tools to shape error to reach 28nm (radius), Yuan degrees and horizontal degrees of 12.5nm, surface roughness for Ra4.2nm processing. The Machine Tool Laboratory in 1984 with the development of ultra-precision lathe, a large Lodtm is now recognized in the world the highest level of technology, precision highest-precision lathe large diamonds. In ultra-precision processing technology, the British Cranfield Institute of Technology belongs Cranfield Precision Engineering Institute (short for CUPE) enjoy higher prestige, it is the worlds precision engineering research centres, the British super-precision processing technology unique. If CUPE production Nanocentre (nanometer processing center) for ultra-sophisticated Chexue can also carry Motou can conduct ultra precision grinding, precision processing final shape up 0.1m, the surface roughness Ra Crystal Mirror processing methods usually used grinding, grinding pace of the V=25 35m /s, Cumo, t=0.02 0.07mm , Jingmo, t=3 10m; When the oil stone, left, V=10 50m /min, material removal rate to 0.1m 1m/min. Ultra-precision grinding may reach 0.01m 0.002m Ra Yuan degrees and the surface roughness. Spherical mirror research, and he requested a study be maintained in the processing of surface upward law, there are two guaranteed ways : First, through the Site (1) positioning itself since the body to reach; Second, through the use of digital systems for ground first (2) in favor of one Kok to achieve. Spherical mirror of himself behind in the use of laser processing law is the establishment of interference device (4) surface (3) measurement error basis. Measurement, laser interference device along the X and Y coordinates of movement in one direction or along X,Y movement and workstations (5) rotation, the mirror errors measurements were recorded in analog or digital volume of memory devices, and then proceed to deal with. According to the directive from digital systems Motou (the Site) was marked by the movement of a given face the greatest error and bias Department finds inter materials. After the surface was re-testing and duplication processes. It was so gradual convergence in the way of achieving the required face precision. Graphic processing is the mirror of the main methods used for grinding and processing techniques behind the current bill could have reached the highest level degrees 3）Physical processing of France There are many methods of physical processing, which was the most widespread application is Feb abrasive polishing and ion beams surface processing. The former is the essence of the electrolytic processes resulting from the oxidation and left by the abrasive material removed from the surface to be processed was the mirror; After firing on ion generator which is the ion beams on the surface. In addition to the above methods, there are other ultra-sophisticated composite processing methods, such as electric spark shape processed and then used fluid polishing law, electrochemical polishing law, ultrasonic chemical polishing law, power equipment suspended law, law and the use of magnetic fluid grinding Elid grinding technology law. Elid technology used optical glass processing non-spherical lenses, face up to 0.2m accuracy, surface roughness is reached Ra=20nm. Thrid,Super-precision processing machine tool design and manufacture Ultra precision processing machine tool design and manufacture of key and core issue is that super-precision machining and objectives. Thus, the super-precision processing machine tool design and manufacture of the basic principles and requirements are : to eliminate or reduce the sources of heat and Zhenyuan machine tools; Improve the structure of rigidity and geometric precision machine tools; Reduce the deformation machine tools (including temperature deformation and strength deformation) of the impact of precision machine tools for processing. To achieve these basic principles and requirements, ultra precision processing machine tool design, some of the principles often take measures : The first is to be made or used friction heat large transmission devices (such as mechanical Mojitiaosu devices), and the process of heat large sources of heat (such as electrical, cooling lubricants boxes, etc.) and structural separation or machine tools identity insulation to avoid heat from the structure of the machine tool machine tools identity caused hot deformation. Choice of hot and heat conduction rate coefficient alpha coefficient of the material for low value of machine tool important parts materials. Meanwhile, it should be used as thermal physical properties to the same or similar materials in the manufacture of machine tool components and spare parts. Components designed to heat symmetrical structure, but should consider forced air or liquid cooling and set aside corresponding coolant flow cycle routes. When cooling in the size range 200mm 1500mm , wind flow should be (3 10) m 3 /s or liquid flux for (1 10) L/s, thereby maintaining separate temperature fluctuations 0.05C and 0.02C meridian east. Service to individual strong sources of heat (such as main bearings) arising from the heat and, if necessary, be devoted to the thermal control away. Ultra precision processing machine tools not only to consider the installation and work in constant temperature room, but in a very high-precision requirements, should be considered in the temperature control machine tools 0.01C meridian east of the oil shower thermostatic box, the machine tool must be fully automated process or remotely, it was not at the scene, to avoid human activity and temperature conditions impact on the environment. In order to avoid vibration impact processing accuracy, in addition to the installation of machine tools in the air supports, spring-loaded supports or other effective Gezhen device supports the foundations, the machine tool rotary movement of a motion to strictly, the volume of residual imbalance to be smaller than 0.5 1g .mm. At the same time, in order to eliminate and reduce machine tool itself Zhenyuan, a campaign to try to smooth the drivetrain system, such as non-contact pneumatic and liquid transmission, or to avoid using an impact on the transmission, if the gap for the institutions. Zhenyuan vibration frequencies through adjustments (such as changes in rotational speed), or through the quality of machine tool technology systems and spring-loaded cut for the choice of parameters to the vibration frequencies and Zhenyuan machine tool technology systems inherent frequency away from each other, avoid resonance zone, and reduce the impact of vibration on the machine tool. Choice of a high Zunijishuo materials such as natural marble, artificial marble, ceramic, or using the double wall unclear sand cast iron pieces as the structure of machine tools to ensure a high degree of internal decay and external from the vibration, because vibration decay results in direct ratio Zunijishuo (decay index). Under normal conditions, the decay index for 0.006 0.008 cast iron, and the degradation of natural marble and artificial marble index respectively 0.02 0.04 0.06 0.08; unclear sand and the double wall of the metal structure can greatly increase damping, and thus greatly enhance decay vibration effects. The main components of the design is a key indicator of rotation accuracy and rigidity, for the priority use of a low noise temperature axis of electrical or electromagnetic torque and through the membrane and the couplings connected with the main axis of a driven, since the main bearings are used with the functional positioning liquid static pressure spherical bearings structures. The main structure in this precision (radial and axial beating) to 0.01m. When the pressure of work for 0.3MPa 0.6MPa, bearings average cut for 200N 400N/m, liquid static pressure bearings and 600N 1000N/m. But for the sake of not more than 0.05 m line beating, oil pressure fluctuations should not be greater than the value of 0.01 MPa, fluctuations should not be larger than 0.05C Into the design to the transmission main requirements are : to ensure effective compensation for the error dynamic precision; 5nm the minimum achievable pulse displacement; After the introduction of amendments to the system of 2nm high positioning accuracy. To this end, the choice to run into the following manner : Gunzhusigang deputy. Characterized by rigidity large, achievable incremental shift to 100nm (0.1m). Friction transmission. Transmission cut to 50N 100N/m, pull-100N, achievable incremental movement to 5nm. Deficiency is the low life expectancy, lack of flexibility. (a) transmission. Only suitable for use in computerized bed. Piezoelectric and magnetostrictive transmission. Movement of less than 5nm can, but the general itinerary of a small, only 100 200m, the majority of cases it is with other transmission methods (such as Gunzhusigang Deputy) portfolio. Since the positioning of static pressure Sigang deputy. Chixing Kok characterized as small (only 10 meridian east), the cut large (up to 100N 1000N/m) and can achieve modest incremental displacement. Youwen shortcomings is the guarantee of stability and hydraulic systems more complex. Incremental-hydrauli ctr